Method of producing regular arrays of nano-scale objects using nano-structured block-copolymeric materials
First Claim
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1. A method of forming an ordered array of nanofeatures comprising the steps of:
- depositing a block copolymer on a substrate, wherein the block copolymer comprises at least two different blocks, and wherein the block copolymer can self-assemble into an ordered polymeric array of a plurality of regular nanometer-scale structures;
activating the block-copolymer to self-assemble to form the polymeric array;
etching an ordered orientation guide recess array comprising a plurality of orientation guide recesses into the substrate such that the structure of the orientation guide array is determined by the polymeric array;
applying a catalytic material, wherein the catalytic material is chosen such that an ordered catalytic material array is formed comprising a plurality of catalytic nucleation regions and having a structure defined by the polymeric array;
removing the polymeric array from the substrate such that only the catalytic material array remains; and
growing nanofeatures on the catalytic material array to form an ordered nanofeature array having a structure defined by the catalytic material array.
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Abstract
A method of forming a periodic array of nano-scale objects using a block copolymer, and nano-scale object arrays formed from the method are provided. The method for forming the arrays generally includes the steps of depositing a block copolymer of at least two blocks on a substrate to form an ordered meso-scale structured array of the polymer materials, forming catalytic metal dots based on the meso-scale structure, and growing nano-scale objects on the catalytic dots to form an ordered array of nano-scale objects.
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Citations
40 Claims
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1. A method of forming an ordered array of nanofeatures comprising the steps of:
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depositing a block copolymer on a substrate, wherein the block copolymer comprises at least two different blocks, and wherein the block copolymer can self-assemble into an ordered polymeric array of a plurality of regular nanometer-scale structures; activating the block-copolymer to self-assemble to form the polymeric array; etching an ordered orientation guide recess array comprising a plurality of orientation guide recesses into the substrate such that the structure of the orientation guide array is determined by the polymeric array; applying a catalytic material, wherein the catalytic material is chosen such that an ordered catalytic material array is formed comprising a plurality of catalytic nucleation regions and having a structure defined by the polymeric array; removing the polymeric array from the substrate such that only the catalytic material array remains; and growing nanofeatures on the catalytic material array to form an ordered nanofeature array having a structure defined by the catalytic material array. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40)
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Specification