Method for generating extreme ultraviolet with mather-type plasma accelerators for use in Extreme Ultraviolet Lithography
First Claim
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1. A device for generating/producing extremely short-wave ultraviolet electromagnetic wave radiation, comprising:
- a wave front zone;
a plasma generating gas within the wave front zone;
a first plasma accelerator source having an anode and a cathode thereby being adapted to form a first plasma generating zone and producing a first plasma beam;
a second plasma accelerator source having a second anode and a second cathode thereby being adapted to form a second plasma generating zone and producing a second plasma beam;
wherein the second plasma beam intersects the first plasma beam within the wave front zone at an angle of intersection {acute over (α
)}, wherein the angle {acute over (α
)} is from 90°
to 180° and
the intersecting plasma beams within the wave front zone emits electromagnetic radiation at a wavelength from about 10 nm to about 20 nm.
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Abstract
A device and method for generating extremely short-wave ultraviolet electromagnetic wave uses two intersecting plasma beams generated by two plasma accelerators. The intersection of the two plasma beams emits electromagnetic radiation and in particular radiation in the extreme ultraviolet wavelength. In the preferred orientation two axially aligned counter streaming plasmas collide to produce an intense source of electromagnetic radiation at the 13.5 nm wavelength. The Mather type plasma accelerators can utilize tin, or lithium covered electrodes. Tin, lithium or xenon can be used as the photon emitting gas source.
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Citations
10 Claims
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1. A device for generating/producing extremely short-wave ultraviolet electromagnetic wave radiation, comprising:
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a wave front zone; a plasma generating gas within the wave front zone; a first plasma accelerator source having an anode and a cathode thereby being adapted to form a first plasma generating zone and producing a first plasma beam; a second plasma accelerator source having a second anode and a second cathode thereby being adapted to form a second plasma generating zone and producing a second plasma beam; wherein the second plasma beam intersects the first plasma beam within the wave front zone at an angle of intersection {acute over (α
)}, wherein the angle {acute over (α
)} is from 90°
to 180° and
the intersecting plasma beams within the wave front zone emits electromagnetic radiation at a wavelength from about 10 nm to about 20 nm. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A device for generating/producing extremely short-wave ultraviolet electromagnetic wave radiation, comprising:
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a wave front zone; a plasma generating gas within the wave front zone; a first plasma accelerator source having an anode and a cathode thereby being adapted to form a first plasma generating zone and producing a first plasma beam; a second plasma accelerator source having a second anode and a second cathode thereby being adapted to form a second plasma generating zone and producing a second plasma beam; wherein the first plasma beam and the second plasma beam oppose one another and are axially aligned and the first plasma beam intersects the second plasma beam within the wave front zone and the intersecting plasma beams collide within the wave front zone emit electromagnetic radiation at a wavelength from about 10 nm to about 20 nm.
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10. A method for generating/producing extremely short-wave ultraviolet electromagnetic wave, comprising:
- providing a wave front zone;
providing a plasma generating gas within the wave front zone; providing a first plasma accelerator source having an anode and a cathode thereby being adapted to form a first plasma generating zone and producing a first plasma beam; providing a second plasma accelerator source having a second anode and a second cathode thereby being adapted to form a second plasma generating zone and producing a second plasma beam; wherein the second plasma beam intersects the first plasma beam within the wave front zone at an angle of intersection a, wherein the angle {acute over (α
)} is from 90°
to 180° and
the intersecting plasma beams within the wave from zone emits electromagnetic radiation at a wavelength from about 10 nm to about 20 nm.
- providing a wave front zone;
Specification
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Current AssigneeUnited States Department of Energy (Government of the United States of America)
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Original AssigneeUnited States Department of Energy (Government of the United States of America)
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InventorsHassanein, Ahmed, Konkashbaev, Isak
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Primary Examiner(s)Berman, Jack
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Assistant Examiner(s)YANTORNO, JENNIFER M
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Application NumberUS11/079,238Time in Patent Office567 DaysField of SearchNoneUS Class Current250/504.00RCPC Class CodesH05G 2/003 the plasma being generated ...H05G 2/005 containing a metal as princ...
