Apparatus to prevent damage to probe card
First Claim
1. A probe card used as an interface or a testing computer for testing at least one semiconductor die having at least one bond pad comprising:
- a substrate having a first surface and a second surface forming surfaces of the probe card during testing of at least one semiconductor die using the testing computer;
a plurality of conductive traces disposed adjacent at least one of the first surface and the second surface, at least one conductive trace for carrying current during the testing of at least one semiconductor die using the testing computer;
a plurality of probe elements in respective electrical communication with the plurality of conductive traces, at least one probe element of the plurality of probe elements for contacting the at least one bond pad of the at least one semiconductor die during testing; and
a plurality of fuses disposed adjacent the at least one of the first surface and the second surface and in respective electrical communication with the plurality of conductive traces for conducting current below a predetermined maximum level and or preventing conducting current when the current is above a predetermined maximum level during the testing of the at least one semiconductor die.
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Accused Products
Abstract
Probe cards are configured with protective circuitry suitable for use in electrical testing of semiconductor dice without damage to the probe cards. Protective fuses are provided in electrical communication with conductive traces and probe elements (e.g., probe needles) of a probe card. The fuses may be active or passive fuses and are preferably self-resetting, repairable, and/or replaceable. Typically, the fuses will be interposed in, or located adjacent to, conductive traces residing over a surface of the probe card. Methods of fabricating a probe card are provided, as well as various probe card configurations. A semiconductor die testing system using the probe card is also provided.
33 Citations
48 Claims
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1. A probe card used as an interface or a testing computer for testing at least one semiconductor die having at least one bond pad comprising:
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a substrate having a first surface and a second surface forming surfaces of the probe card during testing of at least one semiconductor die using the testing computer;
a plurality of conductive traces disposed adjacent at least one of the first surface and the second surface, at least one conductive trace for carrying current during the testing of at least one semiconductor die using the testing computer;
a plurality of probe elements in respective electrical communication with the plurality of conductive traces, at least one probe element of the plurality of probe elements for contacting the at least one bond pad of the at least one semiconductor die during testing; and
a plurality of fuses disposed adjacent the at least one of the first surface and the second surface and in respective electrical communication with the plurality of conductive traces for conducting current below a predetermined maximum level and or preventing conducting current when the current is above a predetermined maximum level during the testing of the at least one semiconductor die. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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24. A probe card comprising:
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a substrate having a first surface and a second surface forming surfaces of the probe card;
a plurality of conductive traces disposed adjacent at least one of the first surface and the second surface;
a plurality of probe elements in respective electrical communication with the plurality of conductive traces; and
a plurality of fuses disposed adjacent the at least one of the first surface and the second surface and in respective electrical communication with the plurality of conductive traces, at least one fuse of the plurality of fuses configured as a discrete electrical component, the discrete electrical component mounted by conductive pins into through-hole portions of the surfaces of the probe card.
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25. A probe card having a substrate having a first surface and a second surface used as an interface for a testing computer for testing at least one semiconductor die having at least one bond pad comprising:
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a plurality of conductive traces disposed adjacent at least one of the first surface and the second surface, at least one conductive trace for carrying current during the testing of the at least one semiconductor die using the testing computer;
a plurality of probe elements in respective electrical communication with the plurality of conductive traces, at least one probe element of the plurality of probe elements for contacting the at least one bond pad of the at least one semiconductor die during the testing; and
a plurality of fuses disposed adjacent the at least one of the first surface and the second surface and in respective electrical communication with the plurality of conductive traces for conducting current below a predetermined maximum level and or preventing conducting current when the current is above a predetermined maximum level during the testing of the at least one semiconductor die. - View Dependent Claims (26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47)
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48. A probe card having a substrate having a first surface and a second surface comprising:
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a plurality of conductive traces disposed adjacent at least one of the first surface and the second surface;
a plurality of probe elements in respective electrical communication with the plurality of conductive traces; and
a plurality of fuses disposed adjacent the at least one of the first surface and the second surface and in respective electrical communication with the plurality of conductive traces, at least one fuse of the plurality of fuses configured as a discrete electrical component, the discrete electrical component mounted by conductive pins into through-hole portions of a surface of the probe card.
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Specification