Lithographic projection apparatus using catoptrics in an optical sensor system, optical arrangement, method of measuring, and device manufacturing method

• US 7,116,401 B2
• Filed: 12/22/2003
• Issued: 10/03/2006
• Est. Priority Date: 03/08/1999
• Status: Expired due to Term

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Hoogendam, Christiaan Alexander, Bruinsma, Anastasius Jacobus Anicetus, Vanneer, Roeland Nicolaas Maria, Nijmeijer, Gerrit Johannes
• Primary Examiner(s): Kim, Peter B.
• Application Number:
  US10/740,823
• Publication Number:
  US 20040189964A1
• Time in Patent Office: 1,016 Days
• Field of Search: 355/55, 355/53, 355/77, 430/30, 310/12, 356/399, 356/400, 356/401, 250/548
• US Class Current: 355/55
• CPC Class Codes: G03F 9/70 for microlithography measuring printed patterns for monitoring overlay G03F7/70633 or focus G03F7/70641; projection system adjustment G03F7/70258; position control G03F7/70775
• CPC Class Codes: G03F 9/7026 Focusing
• CPC Class Codes: G03F 9/7034 Leveling
• CPC Class Codes: G03F 9/7049 Technique, e.g. interferometric
• CPC Class Codes: G03F 9/7088 Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection

Abstract

A lithographic projection apparatus according to an embodiment of the invention includes a measurement system configured to determine a position of a target portion of a substrate, using at least one among an optical sensing operation and an optical detecting operation. The position is determined via an optical path that includes at least one catoptrical system arranged to have an imaging function of at least one dioptrical element.

Claims

1. A lithographic apparatus comprising:

a projection system configured to project a patterned beam of radiation onto a target portion of a substrate; and

a measurement system having at least one catoptrical system, wherein the catoptrical system includes two or more reflective elements and wherein said measurement system is configured to determine a position of the target portion of the substrate relative to a focus plane of the projection system using a measurement beam having an optical path that traverses the at least one catoptrical system, wherein said at least one catoptrical system is configured to perform an imaging function of at least one dioptrical element.

2. The lithographic apparatus according to claim 1, wherein said measurement system includes at least one of an optical sensor and an optical detector, and

wherein said at least one of the optical sensor and the optical detector includes said at least one catoptrical system.

3. The lithographic apparatus according to claim 1, wherein said measurement system is configured to determine the position of the target portion of the substrate in a vacuum ambient.

4. The lithographic apparatus according to claim 1, wherein said measurement system is configured to determine the position of the target portion of the substrate in a liquid ambient.

5. The lithographic apparatus according to claim 1, wherein said measurement system is configured to determine the position of the target portion of the substrate in an ambient substantially comprising at least one among nitrogen, helium, and argon.

6. A lithographic apparatus comprising:

a projection system configured to project a patterned beam of radiation onto a target portion of a substrate; and

a measurement system having at least one catoptrical system, wherein the catoptrical system includes two or more reflective elements and wherein said measurement system is configured to determine a position of the target portion of the substrate relative to a focus plane of the projection system using a measurement beam having an optical path that traverses the at least one catoptrical system, wherein said at least one catoptrical system is configured to perform an imaging function of a dioptrical arrangement that includes at least one among a convex lens, a concave lens, a planoconvex lens, and a planoconcave lens.

7. A lithographic apparatus comprising:

a projection system configured to project a patterned beam of radiation onto a target portion of a substrate; and

a measurement system having at least one catoptrical system, wherein the catoptrical system includes two or more reflective elements and wherein said measurement system is configured to determine a position of the target portion of the substrate relative to a focus plane of the projection system using a measurement beam having an optical path that traverses the at least one catoptrical system, wherein the at least one catoptrical system includes at least one among a concave mirror and a convex mirror.

8. A lithographic projection apparatus comprising:

a projection system configured to project a patterned beam of radiation onto a target portion of a substrate; and

a measurement system configured to determine a position of the target portion of the substrate relative to a focus plane of the projection system using at least one among an optical sensing operation and an optical detecting operation,

wherein the measurement system is configured to determine the position via a measurement beam that traverses an optical path that includes at least one catoptrical system, wherein the catoptrical system include two or more reflective elements, wherein the catoptrical system is arranged to have an imaging function of at least one dioptrical element.

9. The lithographic projection apparatus according to claim 8, wherein said measurement system is configured to determine the position of the target portion of the substrate in a vacuum ambient.

10. A lithographic projection apparatus comprising:

a projection system configured to project a patterned beam of radiation onto a target portion of a substrate; and

a measurement system configured to determine a position of the target portion of the substrate relative to a focus plane of the projection system using at least one among an optical sensing operation and an optical detecting operation,

wherein the measurement system is configured to determine the position via a measurement beam that traverses an optical path that includes at least one catoptrical system, wherein the catoptrical system include two or more reflective elements, wherein said at least one catoptrical system is configured to perform an imaging function of a dioptrical arrangement that includes at least one among a convex lens, a concave lens, a planoconvex lens, and a planoconcave lens.

11. A lithographic projection apparatus comprising:

a projection system configured to project a patterned beam of radiation onto a target portion of a substrate; and

a measurement system configured to determine a position of the target portion of the substrate relative to a focus plane of the projection system using at least one among an optical sensing operation and an optical detecting operation,

wherein the measurement system is configured to determine the position via a measurement beam that traverses an optical path that includes at least one catoptrical system, wherein the catoptrical system include two or more reflective elements, wherein the at least one catoptrical system includes at least one among a concave mirror and a convex mirror.

12. A lithographic apparatus comprising:

a projection system configured to project a patterned beam of radiation onto a target portion of a sub substrate; and

a level sensor that includes at least one catoptrical system, wherein the catoptrical system includes two or more reflective elements,

wherein the level sensor is configured to determine a height of a surface of the substrate using a beam that traverses an optical path that includes the at least one catoptrical system, and wherein the at least one catoptrical system is configured to perform an imaging function of at least one dioptrical element.

13. The lithographic apparatus according to claim 12, wherein the level sensor comprises a system that includes the at least one catoptrical system and is configured to project an image onto the substrate.

14. The lithographic apparatus according to claim 12, wherein the level sensor comprises a system that includes the at least one catoptrical system and is configured to detect an image projected onto the substrate.

15. The lithographic apparatus according to claim 12, wherein the optical path of the level sensor includes no refractive elements to guide the beam.

16. The lithographic apparatus according to claim 15, wherein the level sensor is configured to determine the height of the surface of the substrate in a vacuum ambient.

17. A device manufacturing method, said method comprising:

projecting a patterned beam of radiation onto a target portion of a substrate; and

using at least one of an optical detection action and an optical sensing action to position the target portion of the substrate relative to a focus position of the patterned beam of radiation, wherein the at least one optical detection action and the optical sensing action is performed using a beam that traverses an optical path that includes at least one catoptrical system, wherein the catoptrical system includes two or more reflective elements, wherein the at least one catoptrical system is configured to perform an imaging function of at least one dioptrical element.

18. The device manufacturing method according to claim 17, wherein said using at least one of the optical detection action and the optical sensing action to position the target portion includes determining a height of a surface of the substrate.

19. The device manufacturing method according to claim 18, further comprising adjusting the position of the target portion of the substrate based on the determined height.

20. The device manufacturing method according to claim 17, wherein the target portion is sensitive to radiation of the patterned beam.

21. The device manufacturing method according to claim 17, wherein said using at least one of the optical detection action and the optical sensing action is performed in a vacuum ambient.

22. The device manufacturing method according to claim 17, wherein said using at least one of the optical detection action and the optical sensing action is performed in a liquid ambient.

23. A device manufactured according to the method according to claim 17.

24. A device manufacturing method, said method comprising:

projecting a patterned beam of radiation onto a target portion of a substrate; and

using a measurement system to position the target portion relative to a focus position of the patterned beam of radiation, wherein the measurement system uses a beam that traverses an optical path that includes at least one catoptrical system and wherein the catoptrical system includes two or more reflective elements, and wherein the at least one catoptrical system is configured to perform an imaging function of at least one dioptrical element.

25. The device manufacturing method according to claim 24, said method further comprising performing a calibration of the measurement system in a first ambient and positioning the target portion in a second ambient that is different from the first ambient.

26. The device manufacturing method according to claim 25, wherein one of the first and second ambient is a vacuum ambient.

27. The device manufacturing method according to claim 25, wherein performing the calibration of the measurement system includes using the measurement system to determine a height of a surface of the substrate.

28. The device manufacturing method according to claim 27, wherein said using the measurement system to position the target portion includes determining a height of the target portion.

29. A lithographic apparatus comprising:

a projection system configured to project a patterned beam of radiation onto a target portion of a substrate; and

a measurement system having at least two catoptrical systems, wherein the at least two catoptrical systems include two or more reflective elements, wherein said measurement system is configured to determine a position of the target portion of the substrate relative to a focus plane of the projection system using a measurement beam having an optical path that traverses the at least two catoptrical systems, and wherein at least one of said at least two catoptrical systems is configured to perform an imaging function of at least one dioptrical element.

30. A lithographic apparatus comprising:

a projection system configured to project a patterned beam of radiation onto a target portion of a substrate; and

a measurement system having at least two catoptrical systems, wherein at least one of the two catoptrical systems includes two or more reflective elements and wherein said measurement system is configured to determine a position of the target portion of the substrate relative to a focus plane of the projection system using a measurement beam having an optical path that traverses the at least two catoptrical systems, and wherein the at least one of the two catoptrical systems is configured to perform an imaging function of at least one dioptrical element.