Multi-beam heterodyne laser Doppler vibrometer

• US 7,116,426 B2
• Filed: 10/31/2005
• Issued: 10/03/2006
• Est. Priority Date: 03/31/2003
• Status: Active Grant

• Current Assignee: MetroLaser, Inc.
• Original Assignee: MetroLaser, Inc.
• Inventors: Lal, Amit K., Markov, Vladimir B., Hurtado, L. Ernesto, Aranchuk, Vyacheslav, Hess, Cecil F., Zhang, Hansheng
• Primary Examiner(s): Toatley, Jr., Gregory J.
• Assistant Examiner(s): Lyons, Michael A.
• Application Number:
  US11/262,707
• Publication Number:
  US 20060055937A1
• Time in Patent Office: 337 Days
• Field of Search: 356/486, 356/487, 356/488, 356/492, 356/493, 356/494, 356/498, 356/499, 356/502, 356/521
• US Class Current: 356/486
• CPC Class Codes: G01H 9/00 Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means

Abstract

A multi-beam laser Doppler vibrometer simultaneously measures velocity, displacement, and vibration history of multiple locations on an object. A beam of coherent light is split into an object beam and a reference beam. The object beam is divided into a plurality of object beams to simultaneously illuminate multiple locations on the object under inspection. The reference beam is frequency shifted and split into a corresponding plurality of frequency-shifted reference beams. A portion of each object beam is reflected by the object as a modulated object beam. The plurality of modulated object beams are collected and respectively mixed with the plurality of frequency-shifted reference beams to provide a plurality of beam pairs. Each beam pair may be focused onto a photodetector or an optical fiber connected to a photodetector.

Claims

1. A multi-beam heterodyne vibrometer for analyzing vibration of an object, the vibrometer comprising:

an optical system for;

generating a plurality of object beams and a plurality of reference beams, one of the plurality of beams having a frequency that is shifted from a frequency of the other plurality of beams;

transmitting the object beams to the object, a portion of each of the object beams being reflected off of the object as a modulated object beam; and

collecting the modulated object beams; and

a combining element for combining each of the modulated object beams with a respective one of the reference beams into a plurality of beam pairs.

2. The vibrometer of claim 1 wherein the plurality of object beams is frequency shifted.

3. The vibrometer of claim 1 wherein the plurality of reference beams is frequency shifted.

4. The vibrometer of claim 1 wherein the plurality of modulated object beams and the plurality of reference beams have the same polarization.

5. The vibrometer of claim 1 wherein the plurality of modulated object beams and the plurality of reference beams are collimated prior to being combined into the beam pairs.

6. The vibrometer of claim 1 wherein the optical system includes a pair of beam splitters for respectively splitting an object beam into the plurality of object beams and a reference beam into the plurality of reference beams.

7. The vibrometer of claim 6 wherein the beam splitters split the object beam and the reference beam such that the plurality of object beams and the plurality of reference beams diverge from the respective beam splitter at substantially the same angle.

8. The vibrometer of claim 6 wherein the optical system further includes:

a laser for providing an output beam; and

an output beam splitter for splitting the output beam into the object beam and a reference beam;

one of the beams being frequency shifted prior to being split into the plurality of frequency-shifted beams.

9. The vibrometer of claim 1 wherein the optical system includes a collecting lens for collecting the modulated object beams and an aperture positioned next to the collecting lens;

the collecting lens having a focal length and being positioned from a surface of the object by a distance substantially equal to the focal length.

10. The vibrometer of claim 9 further comprising a focusing lens positioned downstream from the combining element and having a focal length, wherein the focusing lens renders the plurality of beam pairs substantially parallel with each other.

11. The vibrometer of claim 10 further comprising an output element including a plurality of optical fibers connected to a plurality of photodetectors being positioned downstream from the focusing lens by a distance substantially equal to the focal length of the focusing lens, the focusing lens for focusing each of the beam pairs onto a respective one of the optical fibers.

12. The vibrometer of claim 1 further comprising a mirror for reflecting the transmitted object beams onto the object and a motor for rotating the mirror so that the transmitted object beams scan the object.

13. A method for analyzing vibration of an object, the method comprising:

transmitting a plurality of object beams to the object, a portion of the object beams being reflected by the object as modulated object beams;

collecting the modulated object beams; and

combining the modulated object beams with a reference beam;

wherein one of the combined beams has a frequency that is shifted from a frequency of the other of the combined beams.

14. The method of claim 13 wherein the plurality of object beams is frequency shifted.

15. The method of claim 13 wherein the reference beam is frequency shifted.

16. The method of claim 13 further comprising splitting an object beam into the plurality of object beams.

17. The method of claim 16 wherein the object beam has a frequency that is shifted from the frequency of the reference beam.

18. The method of claim 16 wherein the reference beam has a frequency that is shifted from the frequency of the object beam.

19. The method of claim 13 further comprising splitting a reference beam into a plurality of reference beams for respectively combining with the object beams.

20. The method of claim 13 further comprising splitting a coherent light beam into the object beam and the reference beam.

21. The method of claim 13 wherein the object beam and the reference beam are respectively split into an equal number of object beams and reference beams.

22. A multi-beam heterodyne vibrometer for analyzing vibration of an object, the vibrometer comprising:

a laser configured to provide an output beam;

a first beam splitter configured to split the output beam into an object beam and a reference beam;

a frequency shifter configured to shift a frequency of either the object beam or the reference beam;

a second beam splitter configured to split the reference beam into a plurality of reference beams;

a third beam splitter configured to split the object beam into a plurality of object beams for transmission to the object, a portion of the object beams being reflected by the object as a modulated object beam;

a collecting lens disposed to collect the plurality of modulated object beams; and

a combining element for combining the modulated object beams with one of the reference beams into a plurality of beam pairs.

23. The vibrometer of claim 22 further comprising an output element for receiving the plurality of beam pairs.

24. The vibrometer of claim 23 wherein the output element is an array including a plurality of elements.

25. The vibrometer of claim 24 wherein the output element provides a plurality of frequency-modulated signals based on the plurality of beam pairs.