High angular deflection micro-mirror system

• US 7,116,463 B2
• Filed: 07/15/2004
• Issued: 10/03/2006
• Est. Priority Date: 07/15/2004
• Status: Expired due to Fees

• Current Assignee: Optron Systems Incorporated
• Original Assignee: Optron Systems Incorporated
• Inventors: Wu, Xingtao, Warde, Cardinal
• Primary Examiner(s): Dang, Hung Xuan
• Assistant Examiner(s): TRA, TUYEN Q
• Application Number:
  US10/891,908
• Publication Number:
  US 20060012851A1
• Time in Patent Office: 810 Days
• Field of Search: 359/290, 359/291, 359/292, 359/293, 359/295, 359/298, 359/223, 359/224, 359/320
• US Class Current: 359/291
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 27/1026 for use with reflective spatial light modulators
• CPC Class Codes: G02B 27/145 having sequential partially reflecting surfaces
• CPC Class Codes: G02B 5/32 Holograms used as optical elements

Abstract

A high angular deflection micro-mirror system including a substrate, a spacer structure extending from the substrate, a deformable membrane supported by the spacer structure, one or more supports located off center on the deformable membrane, and one or more mirrors on the support cantilevered therefrom to achieve a high angular deflection of the mirrors as the deformable membranes deform.

Claims

1. A high angular deflection micro-mirror system comprising:

a substrate;

a spacer structure having two spacers extending from the substrate;

a deformable membrane having a center point and supported only by the two spacers of the spacer structure;

a support having a first and a second end and where the first end is disposed away from the center point on the deformable membrane; and

a mirror disposed on the second end of the support.

2. The system of claim 1 in which the support is a post upstanding on the deformable membrane.

3. The system of claim 1 in which the mirror is a rigid mirror.

4. The system of claim 1 in which the substrate includes an electrically conductive layer.

5. The system of claim 4 in which the substrate further includes a layer over the electrically conductive layer.

6. The system of claim 5 in which the said layer is electrically insulating.

7. The system of claim 5 in which the said layer is an anti-stiction layer.

8. The system of claim 4 in which the deformable membrane includes an electrode layer.

9. The system of claim 8 in which the deformable membrane further includes an insulating layer.

10. The system of claim 8 further including a voltage source interconnected with the electrically conductive layer of the substrate and the electrode layer of the deformable membrane.

11. The system of claim 1 in which the spacer structure is made of an insulating material.

12. The system of claim 1 in which the spacer structure includes a plurality of spaced members upstanding on the substrate and supporting the ends of the membrane.

13. The system of claim 1 in which the mirror includes a support layer and, on top thereof, a reflective surface.

14. The system of claim 1 in which the support and the deformable membrane are integral in construction.

15. The system of claim 1 in which the mirror and the support are integral in construction.

16. The system of claim 1 in which the support, the deformable membrane, and the mirror are integral in construction.

17. The system of claim 1 in which the mirror extends away from the center point of the deformable membrane.

18. The system of claim 1 further comprising a second mirror and a second support, the second support having a first and a second end, the first end is disposed away from the center point on the deformable membrane, the second mirror disposed on the second end of the support.

19. The system of claim 18 where the first mirror is configured to reflect and direct a first optical beam and the second mirror is configured to reflect and direct a second optical beam, the first and the second optical beams directed by the first and second mirror to overlap after reflecting off of the first and second mirrors.

20. An array of high angular deflection micro-mirrors comprising:

a substrate;

a plurality of spacer structures extending from the substrate;

a plurality of deformable membranes each having a center point and each supported by at least one associated spacer structure;

a plurality of supports each having a first and second end and each disposed away from the center point and away from the at least one spacer of an associated one of the plurality of deformable membranes; and

a plurality of mirrors, each mirror is disposed on an associated one of the plurality of supports and cantilevered therefrom.

21. The array of high angular deflection micro-mirrors of claim 20 where the substrate is a layer of a very large scale integrated (VLSI) chip of the active matrix addressed type.

22. The array of high angular deflection micro-mirrors of claim 20 where the array is configured to direct light within a sequential color display application.

23. The array of high angular deflection micro-mirrors of claim 20 where the array is configured to direct light within a parallel color display application.

24. A high angular deflection micro-mirror system comprising:

a substrate;

a spacer structure extending from the substrate;

a deformable membrane supported by the spacer structure;

a rigid mirror having a first and a second end, the mirror supported on the first end above the deformable membrane and having a second end which rotates upward when the deformable membrane deflects downwards towards the substrate, the first end of the mirror disposed between the center point on the deformable membrane and the spacer structure.

25. The system of claim 24 in which the first end of the mirror is disposed closer to the spacer structure than the center point on the deformable membrane.