Yield patrolling system

• US 7,117,057 B1
• Filed: 09/10/2002
• Issued: 10/03/2006
• Est. Priority Date: 09/10/2002
• Status: Expired due to Fees

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: Kuo, Woei-Chyi, King, Mingchu, Liang, Shih-Tsung
• Primary Examiner(s): Paladini, Albert W.
• Assistant Examiner(s): Kasenge, Charles
• Application Number:
  US10/238,708
• Time in Patent Office: 1,484 Days
• Field of Search: 700/108, 700/109, 700/110, 700/121, 700/95, 700/111, 438/14, 702/179, 702/180, 702/181, 702/182, 702/183
• US Class Current: 700/108
• CPC Class Codes: G05B 19/41875 characterised by quality surveillance of production
• CPC Class Codes: G05B 2219/32197 Inspection at different locations, stages of manufacturing
• CPC Class Codes: G05B 2223/02 Indirect monitoring, e.g. monitoring production to detect faults of a system
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

A yield patrolling system, which monitors production yield of a manufacturing line, has at least one product measurement and test device. The product measurement and test device measures yield determining parameters of product at completion of process steps executed by equipment within the manufacturing line. The system further has a test database in communication with the product measurement and test device to receive and retain the measured yield determining parameters. A statistical calculator is in communication with the test database to receive the measured yield determining parameters. The statistical calculator then calculates from the measured yield determining parameters production yield statistics indicating an amount of the product being fabricated on the manufacturing line. A yield-warning device is in communication with the statistical calculator to receive the production yield statistics and to provide a yield warning alert to a responsible person indicating that the manufacturing line is not fabricating product with a sufficient yield. Further, a yield information interface receives a compilation of the production yield statistics for each process step from the statistical calculator.

Claims

1. A system for the monitoring of production yield of a manufacturing line comprising:

at least one product measurement and test device for measuring yield determining parameters of product fabricated on said manufacturing line at completion of process steps executed within said manufacturing line;

a test database in communication with said product measurement and test device to receive and retain said measured yield determining parameters;

a statistical calculator in communication with said test database to receive said measured yield determining parameters and calculating from said measured yield determining parameters yield production statistics indicating an amount of said product being fabricated on said manufacturing line;

a yield warning device in communication with said statistical calculator to receive said production yield statistics and to provide a yield warning alert indication that said manufacturing line is not fabricating product with a sufficient yield; and

a yield information interface in communication with said statistical calculator to provide a compilation of said production yield statistics for each process step, wherein the statistical calculator executes the steps of;

determining if a grouping of said yield determining parameters have a normal statistical distribution;

if said grouping of the yield determining parameters have a normal statistical distribution, determining a normal mean and normal variance for said grouping of the yield determining parameters; and

if said grouping of yield-determining parameters do not have a normal distribution determining a median for said grouping of the yield determining parameters.

2. The system of claim 1 wherein said manufacturing line is a semiconductor fabrication line for the fabrication of integrated circuits upon a substrate.

3. The system of claim 2 wherein yield-determining parameters are generated by measuring performance of electronic devices fabricated within test structures of said integrated circuits.

4. The system of claim 1 wherein determining if said grouping of yield determining parameters have a normal statistical distribution includes the step of performing a Shapiro-Wilk W test.

5. The system of claim 1 wherein determining said normal mean and normal variance includes the step of performing analysis of variance upon said grouping of yield determining parameters.

6. The system of claim 1 wherein determining said median includes the step of performing a Kruskal-Wallis analysis of ranks test.

7. The system of claim 1 wherein said yield warning alert is an electronic message transmitted to a person responsible for repair of said manufacturing line such that said manufacturing line is fabricating product with sufficient yield.

8. The system of claim 1 wherein said yield warning alert comprises

a listing of equipment employed in said manufacturing line not having sufficient yield;

a listing of processes accomplished by said manufacturing line not having sufficient yield;

a listing of stages of each process with said equipment employed for each process not having sufficient yield; and

a listing of production yield statistics for each piece of equipment and each process of said manufacturing line not having sufficient yield.

9. The system of claim 1 wherein said yield information interface comprises a web page.

10. The system of claim 9 wherein said web page includes:

a listing of equipment employed in said manufacturing line,

a listing of processes accomplished by said manufacturing line,

a listing of stages of each process with said equipment employed for each process, and

a listing of production yield statistics for each piece of equipment and each process of said manufacturing line.

34. The computing system of claim 3 wherein determining if said grouping of yield determining parameters have a normal statistical distribution includes the step of performing a Shapiro-Wilk W test.

11. A method for the monitoring of production yield of a manufacturing line comprising the steps of:

measuring yield determining parameters of a product fabricated on said manufacturing line at completion of process steps executed within said manufacturing line;

retaining within a test database said measured yield determining parameters;

calculating from said measured yield determining parameters, production yield statistics indicating an amount of said product being fabricated on said manufacturing line;

providing a yield warning alert indication that said manufacturing line is not fabricating product with a sufficient yield; and

providing a compilation of said production yield statistics for each process step, wherein calculating production yield statistics executes the steps of;

determining if a grouping of said yield determining parameters have a normal statistical distribution;

if said grouping of the yield determining parameters have a normal statistical distribution, determining a mean and variance for said grouping of the yield determining parameters; and

if said grouping of yield-determining parameters do not have a normal distribution determining a median for said grouping of the yield determining parameters.

12. The method of claim 11 wherein said manufacturing line is a semiconductor fabrication line for the fabrication of integrated circuits upon a substrate.

13. The method of claim 12 wherein yield-determining parameters are generated by measuring performance of electronic devices fabricated within test structures of said integrated circuits.

14. The method of claim 11 wherein determining if said grouping of yield determining parameters have a normal statistical distribution includes the step of performing a Shapiro-Wilk W test.

15. The method of claim 11 wherein determining said mean and variance includes the step of performing analysis of variance upon said grouping of yield determining parameters.

16. The method of claim 11 wherein determining said median includes the step of performing a Kruskal-Wallis analysis of ranks test.

17. The method of claim 11 wherein said yield warning alert is an electronic message transmitted to a person responsible for repair of said manufacturing line such that said manufacturing line is fabricating product with sufficient yield.

18. The method of claim 11 wherein providing said yield warning alert comprises the steps of:

providing a listing of equipment employed in said manufacturing line not having sufficient yield;

providing a listing of processes accomplished by said manufacturing line not having sufficient yield;

providing a listing of stages of each process with said equipment employed for each process not having sufficient yield; and

providing a listing of production yield statistics for each piece of equipment and each process of said manufacturing line not having sufficient yield.

19. The method of claim 11 wherein providing said yield information interface comprises the step of creating a web page.

20. The method of claim 19 wherein said web page includes:

creating a listing of equipment employed in said manufacturing line,

creating a listing of processes accomplished by said manufacturing line,

creating a listing of stages of each process with said equipment employed for each process, and

creating a listing of production yield statistics for each piece of equipment and each process of said manufacturing line.

21. An apparatus for the monitoring of production yield of a manufacturing line comprising:

means for measuring yield determining parameters of a product fabricated on said manufacturing line at completion of process steps executed within said manufacturing line;

means for retaining within a test database said measured yield determining parameters;

means for calculating from said measured yield determining parameters, production yield statistics indicating an amount of said product being fabricated on said manufacturing line;

means for providing a yield warning alert indication that said manufacturing line is not fabricating product with a sufficient yield; and

means for providing a compilation of said production yield statistics for each process step, wherein the means for calculating production yield statistics comprises;

the means for calculating production yield statistics comprises;

means for determining if a grouping of said yield determining parameters have a normal statistical distribution;

means for determining a mean and variance for said grouping of the yield determining parameters, if said grouping of the yield determining parameters have a normal statistical distribution; and

means for determining a median for said grouping of the yield determining parameters, if said grouping of yield-determining parameters do not have a normal distribution.

22. The apparatus of claim 21 wherein said manufacturing line is a semiconductor fabrication line for the fabrication of integrated circuits upon a substrate.

23. The apparatus of claim 22 wherein yield-determining parameters are generated by measuring performance of electronic devices fabricated within test structures of said integrated circuits.

24. The apparatus of claim 21 wherein means for determining if said grouping of yield determining parameters have a normal statistical distribution includes means for performing a Shapiro-Wilk W test.

25. The apparatus of claim 21 wherein determining said mean and variance includes means for performing analysis of variance upon said grouping of yield determining parameters.

26. The apparatus of claim 21 wherein determining said median includes means for Kruskal-Wallis analysis of ranks test.

27. The apparatus of claim 21 wherein said yield warning alert is an electronic message transmitted to a person responsible for repair of said manufacturing line such that said manufacturing line is fabricating product with sufficient yield.

28. The apparatus of claim 21 wherein means for providing said yield warning alert comprises:

means for providing a listing of equipment employed in said manufacturing line not having sufficient yield;

means for providing a listing of processes accomplished by said manufacturing line not having sufficient yield;

means for providing a listing of stages of each process with said equipment employed for each process not having sufficient yield; and

means for providing a listing of production yield statistics for each piece of equipment and each process of said manufacturing line not having sufficient yield.

29. The apparatus of claim 21 wherein means for providing said yield information interface comprises means for creating a web page.

30. The apparatus of claim 29 wherein said means for creating said web page includes:

means for creating a listing of equipment employed in said manufacturing line,

means for creating a listing of processes accomplished by said manufacturing line,

means for creating a listing of stages of each process with said equipment employed for each process, and

means for creating a listing of production yield statistics for each piece of equipment and each process of said manufacturing line.

31. A computing system in communication with a manufacturing line for the monitoring of production yield of said manufacturing line comprising:

at least one data collection device in communication with a product measurement and test device, said product measurement and test device measuring yield determining parameters of product fabricated on said manufacturing line at completion of process steps executed within said manufacturing line;

a test database in communication with each of said data collection devices to receive and retain said measured yield determining parameters;

a statistical calculator in communication with said test database to receive said measured yield determining parameters and calculating from said measured yield determining parameters production yield statistics indicating an amount of said product being fabricated on said manufacturing line;

a yield warning device in communication with said statistical calculator to receive said production yield statistics and to provide a yield warning alert indication that said manufacturing line is not fabricating product with a sufficient yield; and

a yield information interface in communication with said statistical calculator to provide a compilation of said production yield statistics for each process step, wherein the statistical calculator executes the steps of;

determining if a grouping of said yield determining parameters have a normal statistical distribution;

if said grouping of the yield determining parameters have a normal statistical distribution, determining a mean and variance for said grouping of the yield detemmining parameters; and

if said grouping of yield-determining parameters do not have a normal distribution determining a median for said grouping of the yield determining parameters.

32. The computing system of claim 31 wherein said manufacturing line is a semiconductor fabrication line for the fabrication of integrated circuits upon a substrate.

33. The computing system of claim 32 wherein yield determining parameters are generated by measuring performance of electronic devices fabricated within test structures of said integrated circuits.

35. The computing system of claim 31 wherein determining said mean and variance includes the step of performing analysis of variance upon said grouping of yield determining parameters.

36. The computing system of claim 31 wherein determining said median includes the step of performing a Kruskal-Wallis analysis of ranks test.

37. The computing system of claim 31 wherein said yield warning alert is an electronic message transmitted to a person responsible for repair of said manufacturing line such that said manufacturing line is fabricating product with sufficient yield.

38. The computing system of claim 31 wherein said yield warning alert comprises

a listing of equipment employed in said manufacturing line not having sufficient yield;

a listing of processes accomplished by said manufacturing line not having sufficient yield;

a listing of stages of each process with said equipment employed for each process not having sufficient yield; and

a listing of production yield statistics for each piece of equipment and each process of said manufacturing line not having sufficient yield.

39. The computing system of claim 31 wherein said yield information interface comprises a web page.

40. The computing system of claim 39 wherein said web page includes:

a listing of equipment employed in said manufacturing line,

a listing of processes accomplished by said manufacturing line,

a listing of stages of each process with said equipment employed for each process, and

a listing of production yield statistics for each piece of equipment and each process of said manufacturing line.

41. A medium for retaining a computer program which, when executed on a computing system, executes a process for the monitoring of production yield of a manufacturing line said process comprising the steps of:

measuring yield determining parameters of a product fabricated on said manufacturing line at completion of process steps executed within said manufacturing line;

retaining within a test database said measured yield determining parameters;

calculating from said measured yield determining parameters, production yield statistics indicating an amount of said product being fabricated on said manufacturing line;

providing a yield warning alert indication that said manufacturing line is not fabricating product with a sufficient yield; and

providing a compilation of said production yield statistics for each process step, wherein calculating production yield statistics includes the steps of;

determining if a grouping of said yield determining parameters have a normal statistical distribution;

if said grouping of the yield determining parameters have a normal statistical distribution, determining a mean and variance for said grouping of the yield determining parameters; and

if said grouping of yield-determining parameters do not have a normal distribution determining a median for said grouping of the yield determining parameters.

42. The medium for retaining a computer program of claim 41 wherein said manufacturing line is a semiconductor fabrication line for the fabrication of integrated circuits upon a substrate.

43. The medium for retaining a computer program of claim 42 wherein yield determining parameters are generated my measuring performance of electronic devices fabricated within test structures of said integrated circuits.

44. The medium for retaining a computer program of claim 41 wherein determining if said grouping of yield determining parameters have a normal statistical distribution includes the step of performing a Shapiro-Wilk W test.

45. The medium for retaining a computer program of claim 41 wherein determining said mean and variance includes the step of performing analysis of variance upon said grouping of yield determining parameters.

46. The medium for retaining a computer program of claim 41 wherein determining said median includes the step of performing a Kruskal-Wallis analysis of ranks test.

47. The medium for retaining a computer program of claim 41 wherein said yield warning alert is an electronic message transmitted to a person responsible for repair of said manufacturing line such that said manufacturing line is fabricating product with sufficient yield.

48. The medium for retaining a computer program of claim 41 wherein providing said yield warning alert comprises the steps of:

providing a listing of equipment employed in said manufacturing line not having sufficient yield;

providing a listing of processes accomplished by said manufacturing line not having sufficient yield;

providing a listing of stages of each process with said equipment employed for each process not having sufficient yield; and

providing a listing of production yield statistics for each piece of equipment and each process of said manufacturing line not having sufficient yield.

49. The medium for retaining a computer program of claim 41 wherein providing said yield information interface comprises the step of creating a web page.

50. The medium for retaining a computer program of claim 49 wherein said web page includes:

creating a listing of equipment employed in said manufacturing line,

creating a listing of processes accomplished by said manufacturing line,

creating a listing of stages of each process with said equipment employed for each process, and

creating a listing of production yield statistics for each piece of equipment and each process of said manufacturing line.

51. The medium for retaining a computer program of claim 41 wherein said medium is selected from the group of media consisting of storage nodes of a cluster network of computer systems or a global communication network such as the Internet, a read only memory (ROM), an electro-optical disk or a magnetic disk.