Reflective spatial light modulator

• US 7,118,234 B2
• Filed: 01/13/2004
• Issued: 10/10/2006
• Est. Priority Date: 06/19/2002
• Status: Expired due to Fees

• Current Assignee: Miradia Inc. (Walsin Lihwa Corporation)
• Original Assignee: Miradia Inc. (Walsin Lihwa Corporation)
• Inventors: Yang, Xiao, Chen, Dongmin, Pan, Shaoher X, Zhang, Shoucheng
• Primary Examiner(s): Robinson, Mark A.
• Application Number:
  US10/756,936
• Publication Number:
  US 20040145822A1
• Time in Patent Office: 1,001 Days
• Field of Search: 359/872, 359/871, 359/877, 359223-224, 359290-296
• US Class Current: 359/872
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: Y10S 359/904 Micromirror

Abstract

A micro-mirror array that is useful, for example, in a reflective spatial light modulator. In one embodiment, the micro mirror array includes spacer support walls, a vertical torsion hinge, and a mirror plate, all being fabricated from a single wafer. The micro-mirror array has a large fill ratio.

Claims

1. A micro mirror comprising:

a mirror plate having an upper surface and a lower surface defining a mirror plate thickness;

a frame coupled to the mirror plate, wherein the frame comprises a wall portion characterized by a wall height greater than the mirror plate thickness; and

a hinge connected to the frame and the mirror plate for allowing the mirror plate to rotate relative to the frame about an axis defined by the hinge, wherein each of the mirror plate, the frame, and the hinge are fabricated from a single continuous piece of material.

2. The micro mirror of claim 1, wherein the material is single crystal silicon.

3. The micro mirror of claim 1, wherein the hinge is a vertically oriented torsion spring.

4. The micro mirror of claim 1, wherein the mirror plate has a reflective top surface.

5. The micro mirror of claim 1, further comprising a reflective layer on top of the plate.

6. The micro mirror of claim 1, wherein the wall portion of the frame has a width of about 1 micron or less.

7. The micro mirror of claim 1, further comprising a mechanical stop for stopping rotation of the mirror plate relative to the frame when the mirror plate has rotated to a predetermined angle.

8. A spatial light modulator comprising:

a plurality of micro-mirors in an array, each micro-mirror in the array having at least one mirror plate with an upper surface and a lower surface defining a mirror plate thickness and having at least one hinge connected to the at least one mirror plate of that micro-mirror for allowing that mirror plate to rotate; and

a support frame with a plurality of support walls characterized by a wall height greater than the mirror plate thickness, each hinge connected to the at least one support wall, for supporting the hinge and the mirror plate and separating each mirror plate from a substrate connected to the support frame wherein the mirror plates, the support frame, and the hinges are fabricated from a single continuous piece of material.

9. The spatial light modulator of claim 8, wherein the mirror plates the upper surfaces of the mirror plates are polished to reflect light.

10. The spatial light modulator of claim 8, wherein a reflective layer is deposited on each upper surface of the mirror plates for reflecting light.

11. The spatial light modulator of claim 8, further comprising a control substrate connected to the spacer support frame and having at least one electrode corresponding to each of the mirror plates for receiving a voltage to controllably deflect the mirror plate of the micro-mirror.

12. The spatial light modulator of claim 11, wherein the hinge divides the mirror plate into a first part and a second part, such that when the first part of the mirror plate moves toward the control substrate as the mirror plate rotates about the axis defined by the hinge, the second part of the mirror plate moves away from the control substrate.

13. The spatial light modulator of claim 11, wherein the control substrate further comprises addressing and control circuitry for selectively applying voltages to the at least one electrode to selectively controllably deflect the mirror plate of the micro-mirror.

14. The spatial light modulator of claim 8, wherein the surfaces of the mirror plates in the micro-mirror array make up at least 85 % of the surface area of the array.

15. The spatial light modulator of claim 14, wherein the surfaces of the mirror plates in the micro-mirror array make up at least 90 % of the surface area of the array.

16. The spatial light modulator of claim 8, wherein there is a gap of 0.2 microns or less between an edge of the upper surface of the mirror plate and a support wall of the support frame.

17. The spatial light modulator of claim 8, wherein the upper surfaces of the mirror plates are substantially rectangular in shape.

18. The spatial light modulator of claim 17, wherein the upper surface of the mirror plates have an area approximately 225 square microns.