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Reflective spatial light modulator

  • US 7,118,234 B2
  • Filed: 01/13/2004
  • Issued: 10/10/2006
  • Est. Priority Date: 06/19/2002
  • Status: Expired due to Fees
First Claim
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1. A micro mirror comprising:

  • a mirror plate having an upper surface and a lower surface defining a mirror plate thickness;

    a frame coupled to the mirror plate, wherein the frame comprises a wall portion characterized by a wall height greater than the mirror plate thickness; and

    a hinge connected to the frame and the mirror plate for allowing the mirror plate to rotate relative to the frame about an axis defined by the hinge, wherein each of the mirror plate, the frame, and the hinge are fabricated from a single continuous piece of material.

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