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Method of isolating the current sense on power devices while maintaining a continuous stripe cell

  • US 7,118,951 B2
  • Filed: 05/17/2005
  • Issued: 10/10/2006
  • Est. Priority Date: 01/22/2002
  • Status: Expired due to Term
First Claim
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1. On an integrated circuit die, a method of isolating a current sense area from a main device active area while maintaining a continuous stripe cell, the sense area having an overlying sense metal layer, the main device active area having an overlying active metal layer, said method comprising:

  • fabricating on the die a plurality of polysilicon gate stripes, polysilicon openings, and body stripes that extend in a continuous and uninterrupted manner from the active area into the sense area;

    excluding source dopants and contact from a first region that surrounds the periphery of the sense area; and

    breaking the active area metal layer over the first region to thereby electrically isolate the sense area from the active area.

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