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Micromirror device and method for making the same

  • US 7,119,944 B2
  • Filed: 02/11/2005
  • Issued: 10/10/2006
  • Est. Priority Date: 08/25/2004
  • Status: Active Grant
First Claim
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1. A micromirror device, comprising:

  • a substrate;

    a mirror plate;

    a deformable hinge disposed in the same plane as the mirror plate and connected to the mirror plate such that the mirror plate is movable relative to the substrate;

    first and second posts positioned proximate to the mirror plate for holding the mirror plate on the substrate, wherein the first and second posts are disposed such that a line connecting the first and second posts is not coincident with a diagonal of the mirror plate;

    a semiconductor substrate having thereon an addressing electrode for addressing and deflecting the mirror plate, wherein the semiconductor substrate supports the first and second posts; and

    wherein the mirror plate and/or the deformable hinge comprises single crystal silicon.

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