Z-axis accelerometer with at least two gap sizes and travel stops disposed outside an active capacitor area
First Claim
1. An accelerometer, comprising:
- a substrate having a surface;
a pair of conductive capacitor plates fixedly mounted on the substrate surface;
a structure coupled to the substrate surface, and suspended above the conductive capacitor plates, the structure having first and second regions of differing mass that are each disposed above a respective conductive capacitor plate to form a capacitor therewith, and are separated by a flexure axis about which the structure rotates during an acceleration normal to the substrate; and
at least one protective shield mounted on the substrate surface, and positioned entirely laterally apart from either of the conductive capacitor plates, and further positioned to limit rotation of the structure and thereby prevent the structure from contacting one of the conductive capacitor plates.
18 Assignments
0 Petitions
Accused Products
Abstract
An accelerometer includes a pair of conductive plates fixedly mounted on a substrate surface, a structure coupled to the substrate surface and suspended above the conductive plates, and at least one protective shield mounted on the substrate surface. The structure includes two regions of differing total moments disposed above a respective conductive plate and separated by a flexure axis about which the structure rotates during an acceleration normal to the substrate, each region having a substantially planar outer surface and an inner surface having a first corrugation formed thereon. For each of the two regions, an inner gap exists between the first corrugation and an opposing conductive plate, and an outer gap exists between the substantially planar outer surface and the opposing conductive plate, the outer gap being larger than the inner gap. The at least one protective shield is placed apart from either of the conductive plates.
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Citations
19 Claims
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1. An accelerometer, comprising:
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a substrate having a surface; a pair of conductive capacitor plates fixedly mounted on the substrate surface; a structure coupled to the substrate surface, and suspended above the conductive capacitor plates, the structure having first and second regions of differing mass that are each disposed above a respective conductive capacitor plate to form a capacitor therewith, and are separated by a flexure axis about which the structure rotates during an acceleration normal to the substrate; and at least one protective shield mounted on the substrate surface, and positioned entirely laterally apart from either of the conductive capacitor plates, and further positioned to limit rotation of the structure and thereby prevent the structure from contacting one of the conductive capacitor plates. - View Dependent Claims (2, 3, 4, 5, 6)
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7. An accelerometer, comprising:
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a substrate having a surface; a pair of conductive plates fixedly mounted on the substrate surface; and a structure coupled to the substrate surface, and suspended above the conductive plates, the structure comprising; first and second regions of differing total moments disposed above a respective conductive plate and separated by a flexure axis about which the structure rotates during an acceleration normal to the substrate, each region having a substantially planar outer surface and an inner surface having a first corrugation formed parallel to the flexure axis formed thereon, whereby for each of the first and second regions, an inner gap exists between the first corrugation and an opposing conductive plat, and an outer gap exists between the substantially planar outer surface and the opposing conductive plate, the outer gap being larger than the inner gap. - View Dependent Claims (8, 9, 10, 11)
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12. An accelerometer, comprising:
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a substrate having a surface; a pair of conductive capacitor plates fixedly mounted on the substrate surface; a structure coupled to the substrate surface, and suspended above the conductive capacitor plates to form capacitors therewith the structure comprising; first and second regions of differing total moments disposed above a respective conductive capacitor plate and separated by a flexure axis about which the structure rotates during an acceleration normal to the substrate, each region having a substantially planar outer surface and an inner surface having a first corrugation formed parallel to the flexure axis formed thereon, whereby for each of the first and second regions, an inner gap exists between the first corrugation and an opposing conductive capacitor plate, and an outer gap exists between the substantially planar outer surface and the opposing conductive capacitor plate, the outer gap being larger than the inner gap; and at least one protective shield mounted on the substrate surface, and positioned entirely laterally apart from either of the conductive capacitor plates, and further positioned to limit rotation of the structure and thereby prevent the structure from contacting one of the conductive capacitor plates. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19)
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Specification