Sublimation bed employing carrier gas guidance structures

• US 7,122,085 B2
• Filed: 07/29/2003
• Issued: 10/17/2006
• Est. Priority Date: 07/30/2002
• Status: Active Grant

• Current Assignee: ASM IP Holding B.V. (ASM International NV)
• Original Assignee: ASM America Incorporated (ASM International NV)
• Inventors: Shero, Eric J., Schmidt, Ryan, Givens, Michael E.
• Primary Examiner(s): BUEKER, RICHARD R
• Application Number:
  US10/629,029
• Publication Number:
  US 20050072357A1
• Time in Patent Office: 1,176 Days
• Field of Search: 392388-389, 118/726, 342/09, 342/11, 342/15, 342/26
• US Class Current: 118/726
• CPC Class Codes: C23C 16/4481 by evaporation using carrier gas in contact with the source material C23C16/4486 takes precedence
• CPC Class Codes: C23C 16/4483 using a porous body
• CPC Class Codes: C23C 16/45544 characterized by the apparatus

Abstract

Preferred embodiments of the present invention provides a sublimation system employing guidance structures including certain preferred embodiments having a high surface area support medium onto which a solid source material for vapor reactant is coated. Preferably, a guidance structure is configured to facilitate the repeated saturation of the carrier gas with the solid source for a vapor reactant. Methods of saturating a carrier gas using guidance structures are also provided.

Claims

1. A sublimation apparatus for producing a vapor reactant for flowing through a reaction chamber, comprising:

a sublimation vessel;

a plurality of beds of solid source for the vapor reactant, each solid source bed contained within the vessel and in the form of a solid powder;

a carrier gas guidance structure with which the solid source is directly in contact, the carrier gas guidance structure configured to guide a carrier gas to contact the solid source for the vapor reactant by providing a substantially helical pathway for the carrier gas, wherein the carrier gas guidance structure comprises;

a plurality of stacked trays, each tray containing one of the beds of the solid source and confining the carrier gas to a single path from a tray inlet to a tray outlet, the single path defining one of a plurality of levels of the helical pathway, the carrier gas being in contact along the single path with the solid source in each tray;

a vessel inlet port located at the beginning of the substantially helical pathway provided by the carrier gas guidance structure; and

a vessel outlet port located at the end of the substantially helical pathway provided by the carrier gas guidance structure,

wherein the carrier gas guidance structure is configured to ensure contact of the carrier gas with the solid source for the vapor reactant along the substantially helical pathway having a length greater than about 2.5 times a linear distance measured from the vessel inlet port to the vessel outlet port.

2. The sublimation apparatus according to claim 1, wherein the guidance structure is a flow guide configured to extend from a sublimation vessel floor to a sublimation vessel ceiling.

3. The sublimation apparatus according to claim 1, wherein the single path of at least one of the plurality of stacked trays comprises at least one substantially circular pathway, the at least one substantially circular pathway being configured to guide the carrier gas at least one lap of at least about 200°

around the tray before channeling the carrier gas through the tray outlet to the inlet of an adjacent tray.

4. The sublimation apparatus according to claim 1, wherein at least one of the plurality of stacked trays comprises a secondary partial divider which partially defines at least two substantially circular pathways of the single path, the secondary partial divider in combination with tray sidewalls being configured to guide the carrier gas about two laps around the tray before channeling the carrier gas to an adjacent stacked tray, each lap being at least about 200°

around the tray.

5. The sublimation apparatus according to claim 4, wherein the two substantially circular pathways are configured to channel the carrier gas in substantially opposite directions relative to one another.

6. The sublimation apparatus according to claim 1, wherein the carrier gas guidance structure comprises a central inlet that extends from the vessel inlet port vertically through an aligned central channel of the upper tray to open into a channel compartment of a lowermost tray.

7. The sublimation apparatus according to claim 6, wherein the lowermost tray includes a partial divider that allows gas flow thereover.