Electrooptical device and a method of manufacturing the same

• US 7,122,835 B1
• Filed: 04/04/2000
• Issued: 10/17/2006
• Est. Priority Date: 04/07/1999
• Status: Expired due to Fees

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Ikeda, Takayuki, Yamazaki, Shunpei
• Primary Examiner(s): Flynn, Nathan J.
• Assistant Examiner(s): Sefer, Ahmed N.
• Application Number:
  US09/542,473
• Time in Patent Office: 2,387 Days
• Field of Search: 257/72, 257/336, 257/347, 257/408, 257/344, 257/350, 257/59, 349/39
• US Class Current: 257/72
• CPC Class Codes: G02F 1/13454 Drivers integrated on the active matrix substrate G02F1/136277 takes precedence
• CPC Class Codes: H01L 27/1255 integrated with passive devices, e.g. auxiliary capacitors
• CPC Class Codes: H01L 27/14603 Special geometry or disposition of pixel-elements, address-lines or gate-electrodes
• CPC Class Codes: H01L 27/14609 Pixel-elements with integrated switching, control, storage or amplification elements scanning details of imagers (circuitry of solid-state image sensors H04N25/00); circuitry of imagers H04N25/70
• CPC Class Codes: H01L 27/14625 Optical elements or arrangements associated with the device
• CPC Class Codes: H01L 27/14643 Photodiode arrays; MOS imagers
• CPC Class Codes: H01L 29/42384 for thin film field effect transistors, e.g. characterised by the thickness or the shape of the insulator or the dimensions, the shape or the lay-out of the conductor
• CPC Class Codes: H01L 29/78621 with LDD structure or an extension or an offset region or characterised by the doping profile
• CPC Class Codes: H01L 29/78627 with a significant overlap between the lightly doped drain and the gate electrode, e.g. GOLDD

Abstract

To provide a semiconductor device of high reliability by arranging TFTs that have appropriate structures in accordance with circuit functions. In a semiconductor device having a driver circuit portion and a pixel portion on the same insulator, gate insulating films of a driver TFT are designed to be thinner than a gate insulating film of a pixel TFT. In the pixel TFT, channel forming regions are formed under a gate electrode, and a separation region is formed between the channel forming regions. At this point, LDD regions have a region that overlaps with the gate electrode and a region that does not.

Claims

1. A display device comprising a pixel portion and a driver circuit portion on a substrate, said pixel portion comprising:

a semiconductor film comprising a plurality of channel forming regions, a plurality of impurity regions, a source region, and a drain region;

a gate electrode overlapping with the plurality of channel forming regions and some of the plurality of impurity regions, with a gate insulating film interposed therebetween;

a gate wiring electrically connected to said gate electrode;

a source wiring electrically connected to one of said source region and said drain region; and

;

a pixel electrode over said source wiring,

wherein said some of the plurality of impurity regions are located between the plurality of channel forming regions in the semiconductor film and contain a low concentration impurity region and a high concentration impurity region

wherein a thickness of a gate insulating film of a TFT in said driver circuit portion is thinner than that of the gate insulating film of a TFT in the pixel portion, and

wherein a first portion of said source wiring overlapped with said gate wiring has smaller line width than a second portion of said source wiring not overlapped with said gate electrode wiring, and a portion of said second portion overlaps with said pixel electrode.

2. An electronic equipment comprising the display device according to claim 1, wherein said electronic equipment is selected from the group consisting of a video camera, a digital camera, a projector, a projection TV, a goggle type display, a navigation system, a sound reproduction device, a notebook type personal computer, a game machine, a portable information terminal, a mobile computer, a portable telephone, a portable game machine, an electronic book, and an image reproduction device having a recording medium.

3. The display device according to claim 1, wherein said plurality of impurity regions comprises a plurality of low concentration impurity regions, a high concentration impurity region, and wherein said some of the plurality of low concentration impurity regions and the high concentration impurity region are located between the plurality of the channel forming regions in the semiconductor film.

4. The display device according to claim 3, wherein each of said plurality of low concentration impurity regions contains an element at a concentration of 2×

10¹⁶ to 5×

10¹⁹ atoms/cm³, and said high concentration impurity region contains the element at a concentration of 5×

10¹⁹ to 3×

10²¹ atoms/cm³.

5. The display device according to claim 4, wherein the element belongs to group XV in the periodic table.

6. The display device according to claim 3, wherein the high concentration impurity region is located between a pair of the plurality of low concentration impurity regions under the gate electrode.

7. The display device according to claim 1, wherein the plurality of impurity regions have the same conductivity as the source region and the drain region.

8. A display device comprising a pixel portion and a driver circuit portion on a substrate, said pixel portion comprising:

a semiconductor film comprising a plurality of channel forming regions, a plurality of impurity regions, a source region, and a drain region;

a gate electrode overlapping with the plurality of channel forming regions and some of the plurality of impurity regions, with a gate insulating film interposed therebetween;

a gate wiring electrically connected to said gate electrode;

a source wiring electrically connected with one of said source region and said drain region; and

a pixel electrode over said source wiring,

wherein said some of the plurality of impurity regions are located between the plurality of channel forming regions in the semiconductor film and contain a low concentration impurity region and a high concentration impurity region,

wherein a gate insulating film of a TFT in said driver circuit portion and a dielectric of a storage capacitor formed in said pixel portion comprise the same material and have the same film thickness,

wherein the thickness of the gate insulating film of the TFT in said driver circuit portion is thinner than that of the gate insulating film of a TFT in the pixel portion, and

wherein a first portion of said source wiring overlapped with said gate wiring has smaller line width than a second portion of said source wiring not overlapped with said gate wiring, and a portion of said second portion overlaps with said pixel electrode.

9. The display device according to claim 8, wherein said plurality of impurity regions comprises a plurality of low concentration impurity regions, a high concentration impurity region, and wherein said some of the plurality of low concentration impurity regions and the high concentration impurity region are located between the plurality of the channel forming regions in the semiconductor film.

10. The display device according to claim 8, wherein at least two of said plurality of impurity regions overlapped with the gate electrode contain an element at a concentration of 2×

10¹⁶ to 5×

10¹⁹ atoms/cm³, and at least one of the plurality of impurity regions overlapped with the gate electrode contains the element at a concentration of 5×

10¹⁹ to 3×

10²¹ atoms/cm³.

11. The display device according to claim 10, wherein the element belongs to group XV in the periodic table.

12. An electronic equipment comprising the display device according to claim 8, wherein said electronic equipment is selected from the group consisting of a video camera, a digital camera, a projector, a projection TV, a goggle type display, a navigation system, a sound reproduction device, a notebook type personal computer, a game machine, a portable information terminal, a mobile computer, a portable telephone, a portable game machine, an electronic book, and an image reproduction device having a recording medium.

13. The display device according to claim 8, wherein the plurality of impurity regions have the same conductivity as the source region and the drain region.

14. A display device comprising a pixel portion and a driver circuit portion on a substrate, said pixel portion comprising:

a semiconductor film comprising at least two channel forming regions, at least one first impurity region, at least one second impurity region, a source region, and a drain region;

a gate electrode overlapped with said at least two channel forming regions and the first impurity region, and a part of the second impurity region with a gate insulating film interposed therebetween;

a gate wiring electrically connected to said gate electrode;

a source wiring electrically connected with one of said source region and said drain region; and

a pixel electrode over said source wiring,

wherein one of the at least two channel forming regions is located between the first impurity region and the second impurity region,

wherein a thickness of a gate insulating film of a TFT in said driver circuit portion is thinner than that of the gate insulating film in the pixel portion, and

wherein a first portion of said source wiring overlapped with said gate wiring has smaller line width than a second portion of said source wiring not overlapped with said gate wiring, and a portion of said second portion overlaps with said pixel electrode.

15. An electronic equipment comprising the display device according to claim 14, wherein said electronic equipment is selected from the group consisting of a video camera, a digital camera, a projector, a projection TV, a goggle type display, a navigation system, a sound reproduction device, a notebook type personal computer, a game machine, a portable information terminal, a mobile computer, a portable telephone, a portable game machine, an electronic book, and an image reproduction device having a recording medium.

16. The display device according to claim 14, wherein the first impurity region and the second impurity region have the same conductivity as the source region and the drain region.

17. The display device according to claim 14, wherein each of the first impurity region and the second impurity region contains an element at a concentration of 2×

10¹⁶ to 5×

10¹⁹ atoms/cm³, and

wherein the semiconductor film further comprises a third impurity region including the element at a concentration of 5×

10¹⁹ to 3×

10²¹ atoms/cm³.

18. The display device according to claim 17, wherein the element belongs to group XV in the periodic table.

19. The display device according to claim 14, wherein a gate insulating film of a TFT in said driver circuit portion and a dielectric of a storage capacitor formed in said pixel portion comprise the same material and have the same film thickness.

20. A display device comprising a pixel portion and a driver circuit portion on a substrate, said pixel portion comprising:

a semiconductor film having at least two channel forming regions, first low concentration impurity regions and a second low concentration impurity region, a high concentration impurity region, a source region, and a drain region;

a gate electrode overlapping with said at least two channel forming regions, the first low concentration impurity regions, the high concentration impurity region, and a portion of the second low concentration impurity region, with a gate insulating film interposed therebetween;

a gate wiring electrically connected to said gate electrode;

a source wiring electrically connected with one of said source region and said drain region; and

a pixel electrode over said source wiring,

wherein the high concentration impurity region is located between the at least two channel forming regions,

wherein a gate insulating film of a TFT in said driver circuit portion and a dielectric of a storage capacitor formed in said pixel portion comprise the same material and have the same film thickness, and

wherein a first portion of said source wiring overlapped with said gate wiring has smaller line width than a second portion of said source wiring not overlapped with said gate wiring, and a portion of said second portion overlaps with said pixel electrode.

21. The display device according to claim 20, wherein a thickness of a gate insulating film of a TFT in said driver circuit portion is thinner than that of the gate insulating film in the pixel portion.

22. An electronic equipment comprising the display device according to claim 20, wherein said electronic equipment is selected from the group consisting of a video camera, a digital camera, a projector, a projection TV, a goggle type display, a navigation system, a sound reproduction device, a notebook type personal computer, a game machine, a portable information terminal, a mobile computer, a portable telephone, a portable game machine, an electronic book, and an image reproduction device having a recording medium.

23. The display device according to claim 20, wherein the first low concentration impurity region, the second low concentration impurity region and the high concentration impurity region have the same conductivity as the source region and drain region.

24. The display device according to claim 20, wherein the high concentration impurity region is located between a pair of the first low concentration impurity regions.

25. The display device according to claim 20, wherein each of the first low concentration impurity regions and the second low concentration impurity region contains an element at a concentration of 2×

10¹⁶ to 5×

10¹⁹ atoms/cm³, and the high concentration impurity region includes the element at a concentration of 5×

10¹⁹ to 3×

10²¹ atoms/cm³.

26. The display device according to claim 25, wherein the element belongs to group XV in the periodic table.

27. A semiconductor device comprising:

a semiconductor film having at least first and second channel forming regions, first, second, third, and fourth low concentration impurity regions, a high concentration impurity region, a source region, and a drain region;

a gate electrode overlapping with the first and second channel forming regions, the second and third low concentration impurity regions, the high concentration impurity region, and portions of the first and fourth low concentration impurity regions, with a gate insulating film interposed therebetween;

a gate wiring electrically connected to said gate electrode;

a source wiring electrically connected with one of said source region and said drain region; and

a pixel electrode over said source wiring,

wherein the high concentration impurity region is located between the first and second channel forming regions, and

wherein a first portion of said source wiring overlapped with said gate wiring has smaller line width than a second portion of said source wiring not overlapped with said gate wiring, and a portion of said second portion overlaps with said pixel electrode.

28. The semiconductor device according to claim 27, wherein the first, second, third, and fourth low concentration impurity regions and the high concentration impurity region have the same conductivity as the source region and the drain region.

29. The semiconductor device according to claim 27, wherein the high concentration impurity region is located between the second and third low concentration impurity regions in the semiconductor film.

30. The semiconductor device according to claim 27, wherein each of said first, second, third, and fourth low concentration impurity regions contains an element at a concentration of 2×

10¹⁶ to 5×

10¹⁹ atoms/cm³, and said high concentration impurity region contains the element at a concentration of 5×

10¹⁹ to 3×

10²¹ atoms/cm³.

31. The semiconductor device according to claim 30, wherein the element belongs to group XV in the periodic table.

32. The semiconductor device according to claim 27, wherein a thickness of a gate insulating film of a TFT in said driver circuit portion is thinner than that of the gate insulating film in the pixel portion.

33. The semiconductor device according to claim 27, wherein a gate insulating film of a TFT in said driver circuit portion and a dielectric of a storage capacitor formed in said pixel portion comprise the same material and have the same film thickness.

34. An electronic equipment comprising the semiconductor device according to claim 27, wherein said electronic equipment is selected from the group consisting of a video camera, a digital camera, a projector, a projection TV, a goggle type display, a navigation system, a sound reproduction device, a notebook type personal computer, a game machine, a portable information terminal, a mobile computer, a portable telephone, a portable game machine, an electronic book, and an image reproduction device having a recording medium.