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Methods and apparatus for calibration and metrology for an integrated RF generator system

  • US 7,122,965 B2
  • Filed: 07/23/2004
  • Issued: 10/17/2006
  • Est. Priority Date: 02/24/2003
  • Status: Expired due to Fees
First Claim
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1. A method for operating an RF plasma generation system, the method comprising the steps of:

  • applying an RF signal to an input port of an impedance matching network having a fixed impedance during operation of the system;

    monitoring at least one parameter of the RF signal associated with the input port of the impedance matching network;

    providing an output of the impedance matching network to a plasma load;

    providing calibration data that associates values of the at least one RF signal parameter with values of at least one characteristic of the load; and

    determining a value of the at least one characteristic of the load associated with the monitored value of the at least one parameter of the RF signal by referencing the calibration data.

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