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Ion source apparatus and method

  • US 7,122,966 B2
  • Filed: 12/16/2004
  • Issued: 10/17/2006
  • Est. Priority Date: 12/16/2004
  • Status: Active Grant
First Claim
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1. An ion source tube for sustaining a plasma discharge therein, the ion source tube comprising:

  • a slit opening along a side of the ion source tube, wherein the slit opening has a width less than 0.29 mm;

    an end opening in an end of the ion source tube, wherein the end opening is smaller than an inner diameter of the ion source tube and is displaced by 0–

    1.5 mm from a central axis of the ion source tube toward the slit opening; and

    a cavity that accommodates the plasma discharge.

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