Sealed integral MEMS switch
First Claim
1. An integral micro-electro mechanical systems (“
- MEMS”
) switch adapted for selectively coupling an electrical signal present on a first input conductor connected to the MEMS switch to a first output conductor also connected to the MEMS switch, the MEMS switch comprising;
a. a monolithic layer of material having micro-machined therein;
i. a seesaw;
ii. a pair of torsion bars that are disposed on opposite sides of and coupled to the seesaw, and which establish an axis about which the seesaw is rotatable; and
iii. a frame to which ends of the torsion bars furthest from the seesaw are coupled, the frame supporting through the torsion bars the seesaw for rotation about the axis established by the torsion bars;
iv. an electrically conductive first shorting bar carried at an end of the seesaw distal from the rotation axis established by the torsion bars;
b. a base that is joined to a first surface of the monolithic layer;
c. a substrate that is bonded to a second surface of the monolithic layer which is distal from the first surface thereof to which the base is joined, the substrate having formed thereon;
i. a first electrode which is juxtaposed with a surface of the seesaw that is located to one side of the rotation axis established by the torsion bars, application of an electrical potential between the first electrode and the seesaw urging the seesaw to rotate in a first direction about the rotation axis established by the torsion bars;
ii. a first pair of switch contacts adapted to be connectable respectively to the first input conductor and to the first output conductor, and which;
(1) are disposed adjacent to but spaced apart from the first shorting bar when no force is applied to the seesaw;
(2) when no force is applied to the seesaw are electrically insulated from each other;
(3) the first shorting bar contacts upon application of a sufficiently strong force to the seesaw which urges the seesaw to rotate in the first direction about the rotation axis established by the torsion bars; and
(4) first electrical conductors that respectively carry electrical signals between the switch contacts and the first input and first output conductors; and
d. a first ground plate which is disposed adjacent to and is electrically insulated from the first electrical conductors;
whereby upon rotation of the seesaw about the rotation axis established by the torsion bars in the first direction to such an extent that the first shorting bar contacts the first pair of switch contacts, the contacting first shorting bar electrically couples together the first pair of switch contacts.
1 Assignment
0 Petitions
Accused Products
Abstract
A MEMS switch includes a micro-machined monolithic layer (122) having, a seesaw (52), a pair of torsion bars (66a, 66b), and a frame (64). The frame (64) supports the seesaw (52) for rotation about an axis (68) established by the torsion bars (66a, 66b). Shorting bars (58a, 58b) at ends of the seesaw (52) connect across pairs of switch contacts (56a1, 56a2, 56b1, 56b2) carried on a substrate (174) bonded to one surface of the layer (122). A base (104) is also joined to a surface of the layer (122) opposite the substrate (174). The substrate (174) carries electrodes (54a, 54b) for applying forces to the seesaw (52) urging it to rotate about the axis (68). An electrical contact island (152) supported at a free end of a cantilever (166) ensures good electrical conduction between ground plates (162a, 162b) on the layer (122) and electrical conductors on the substrate (174).
50 Citations
23 Claims
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1. An integral micro-electro mechanical systems (“
- MEMS”
) switch adapted for selectively coupling an electrical signal present on a first input conductor connected to the MEMS switch to a first output conductor also connected to the MEMS switch, the MEMS switch comprising;a. a monolithic layer of material having micro-machined therein; i. a seesaw; ii. a pair of torsion bars that are disposed on opposite sides of and coupled to the seesaw, and which establish an axis about which the seesaw is rotatable; and iii. a frame to which ends of the torsion bars furthest from the seesaw are coupled, the frame supporting through the torsion bars the seesaw for rotation about the axis established by the torsion bars; iv. an electrically conductive first shorting bar carried at an end of the seesaw distal from the rotation axis established by the torsion bars; b. a base that is joined to a first surface of the monolithic layer; c. a substrate that is bonded to a second surface of the monolithic layer which is distal from the first surface thereof to which the base is joined, the substrate having formed thereon; i. a first electrode which is juxtaposed with a surface of the seesaw that is located to one side of the rotation axis established by the torsion bars, application of an electrical potential between the first electrode and the seesaw urging the seesaw to rotate in a first direction about the rotation axis established by the torsion bars; ii. a first pair of switch contacts adapted to be connectable respectively to the first input conductor and to the first output conductor, and which; (1) are disposed adjacent to but spaced apart from the first shorting bar when no force is applied to the seesaw; (2) when no force is applied to the seesaw are electrically insulated from each other; (3) the first shorting bar contacts upon application of a sufficiently strong force to the seesaw which urges the seesaw to rotate in the first direction about the rotation axis established by the torsion bars; and (4) first electrical conductors that respectively carry electrical signals between the switch contacts and the first input and first output conductors; and d. a first ground plate which is disposed adjacent to and is electrically insulated from the first electrical conductors; whereby upon rotation of the seesaw about the rotation axis established by the torsion bars in the first direction to such an extent that the first shorting bar contacts the first pair of switch contacts, the contacting first shorting bar electrically couples together the first pair of switch contacts. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
- MEMS”
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12. A micro-electro mechanical systems (“
- MEMS”
) structure comprising;a first layer having disposed thereon an electrical conductor; and a second layer also having disposed thereon an electrical conductor, the second layer including; a. a cantilever; and b. an electrical contact island which is supported at a free end of the cantilever, the electrical contact island at an end thereof which is distal from the cantilever carrying a portion of the electrical conductor that is disposed on the second layer, the portion of the electrical conductor at the end of the electrical contact island being continuously urged by force supplied by the cantilever into an unswitched intimate contact with the electrical conductor that is disposed on the first layer.
- MEMS”
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13. A micro-electro mechanical systems (“
- MEMS”
) electrical contact structure adapted for forming an unswitched electrical contact between an electrical conductor that is disposed on a first layer of a MEMS device and an electrical conductor that is disposed on a second layer of the MEMS device, the MEMS electrical contact structure comprising;a cantilever included in the second layer; and an electrical, contact island also included in the second layer which is supported at a free end of the cantilever, the electrical contact island at an end thereof which is distal from the cantilever carrying a portion of the electrical conductor that is disposed on the second layer, the portion of the electrical conductor at the end of the electrical contact island being continuously urged by force supplied by the cantilever into an unswitched intimate contact with the electrical conductor that is disposed on the first layer.
- MEMS”
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14. An integral micro-electro mechanical systems (“
- MEMS”
) switch adapted for selectively coupling an electrical signal present on a first input conductor connected to the MEMS switch to a first output conductor also connected to the MEMS switch, the MEMS switch comprising;a. a monolithic layer of material having micro-machined thereon a moveable electrically conductive first shorting bar that is disposable in at least two (2) alternative positions; b. a base that is joined to a first surface of the monolithic layer; c. a substrate that is bonded to a second surface of the monolithic layer which is distal from the first surface thereof to which the base is joined, the substrate having formed thereon a first pair of switch contacts which; i. are disposed adjacent to but spaced apart from the first shorting bar when the first shorting bar is disposed in a first position; ii. are electrically insulated from each other when the first shorting bar is disposed in the first position; iii. the first shorting bar contacts when the first shorting bar is disposed in a second position; and iv. connect to a pair of first electrical conductors that are respectively adapted for conducting an electrical signal between the first pair of switch contacts and the first input and first output conductors; and d. a first ground plate which is disposed adjacent to and is electrically insulated from both; i. the first pair of switch contacts; and ii. the first electrical conductors; whereby movement of the first shorting bar from the first position to the second position establishes an electrical connection between the first shorting bar and the first pair of switch contacts thereby electrically coupling together the first pair of switch contacts while the first ground plate remains separated from but in close proximity to both; a. the first pair of switch contacts; and b. the first electrical conductors. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23)
- MEMS”
Specification