Photonic MEMS and structures
First Claim
1. A line-at-a-time electronic driving method comprisingapplying a bias voltage to rows or columns of a device, applying data voltages to the columns, in the case when the bias voltage is applied to the rows, or the rows, in the case when the bias voltage is applied to the columns, the data voltages being applied alternately about a value of the bias voltage, actuation of the device occurring when a difference between the values of the data voltage and a select voltage is above a first predetermined level, release of the device occurring when the difference between the values of the data voltage and the select voltage is below a second predetermined level lowest, and the device maintaining its state when the select voltage is at the bias level.
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Accused Products
Abstract
An interference modulator (Imod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of IMods or other micromechanical devices. An improved color scheme provides greater flexibility. Electronic hardware can be field reconfigured to accommodate different display formats and/or application functions. An IMod'"'"'s electromechanical behavior can be decoupled from its optical behavior. An improved actuation means is provided, some one of which may be hidden from view. An IMod or IMod array is fabricated and used in conjunction with a MEMS switch or switch array. An IMod can be used for optical switching and modulation. Some IMods incorporate 2-D and 3-D photonic structures. A variety of applications for the modulation of light are discussed. A MEMS manufacturing and packaging approach is provided based on a continuous web fed process. IMods can be used as test structures for the evaluation of residual stress in deposited materials.
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Citations
11 Claims
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1. A line-at-a-time electronic driving method comprising
applying a bias voltage to rows or columns of a device, applying data voltages to the columns, in the case when the bias voltage is applied to the rows, or the rows, in the case when the bias voltage is applied to the columns, the data voltages being applied alternately about a value of the bias voltage, actuation of the device occurring when a difference between the values of the data voltage and a select voltage is above a first predetermined level, release of the device occurring when the difference between the values of the data voltage and the select voltage is below a second predetermined level lowest, and the device maintaining its state when the select voltage is at the bias level.
Specification