Method for manufacturing nanopowders of oxide through DC plasma thermal reaction

• US 7,125,537 B2
• Filed: 12/30/2004
• Issued: 10/24/2006
• Est. Priority Date: 02/20/2004
• Status: Active Grant

• Current Assignee: Industrial Technology Research Institute
• Original Assignee: Industrial Technology Research Institute
• Inventors: Liao, Shih-Chieh, Lin, Hsiu-Fen, Hong, Song-Wein
• Primary Examiner(s): THEISEN, MARY LYNN F
• Application Number:
  US11/024,404
• Publication Number:
  US 20050186132A1
• Time in Patent Office: 663 Days
• Field of Search: None
• US Class Current: 423/592.1
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: C01B 13/20 by oxidation of elements in the gaseous state; by oxidation or hydrolysis of compounds in the gaseous state
• CPC Class Codes: C01F 7/424 using a plasma
• CPC Class Codes: C01G 1/02 Oxides
• CPC Class Codes: C01P 2004/04 obtained by TEM, STEM, STM or AFM
• CPC Class Codes: C01P 2004/64 Nanometer sized, i.e. from 1-100 nanometer
• CPC Class Codes: C01P 2006/12 Surface area

Abstract

A method for manufacturing powders of oxides in a nanometer level through a direct current plasma thermal reaction is disclosed. The energy required is provided by the plasma that is generated in the non-transferred DC plasma apparatus. Once the solid precursors are introduced into the plasma, the solid precursors are vaporized and oxidized in the plasma reaction region of the non-transferred DC plasma apparatus continuously. Then, the oxide powders in a nanometer scale can form homogeneously and continuously. By controlling the nozzle size, the speed of the plasma can be adjusted and the coarsening and agglomeration of the nanopowders can be effectively prevented. Finally, oxide nanopowders of high-purity and high-dispersity are obtained by cooling down the plasma gas containing the vaporized and oxidized precursor through a vortical cooling-gas.

Claims

1. A method for manufacturing oxide nanopowders, comprising the following steps:

providing a non-transferred DC plasma apparatus equipped with one to three sets of non-transferred electrodes, a plasma-convergence section and a nozzle for spraying out plasma;

generating a plasma in the plasma-convergence section by introducing a direct current to the non-transferred electrodes in the presence of the plasma-forming gas;

introducing a solid precursor to the plasma-convergence section continuously, wherein the solid precursor is vaporized and oxidized before being sprayed out with the plasma jet; and

obtaining nanopowders by blowing the plasma jet containing the vaporized and oxidized precursor through a vortical cooling-gas.

2. The method as claimed in claim 1, wherein the plasma-forming gas is selected from a group consisting of argon, helium, hydrogen and nitrogen.

3. The method as claimed in claim 1, wherein the plasma-forming gas is argon, helium, nitrogen, or a combination thereof.

4. The method as claimed in claim 1, wherein the feeding rate of the solid precursor ranges from 0.5 to 2.0 Kg/hour.

5. The method as claimed in claim 1, wherein the solid precursor is a metal wire.

6. The method as claimed in claim 1, wherein the solid precursor is selected from a group consisting of micro-scaled metal powders, metal carbonate powders, metal nitrate powders, metal oxalate powders, metal ammonium powders, and metal oxide powders.

7. The method as claimed in claim 6, wherein the solid precursor is introduced to the plasma jet in the plasma-convergence section continuously through a carrier gas.

8. The method as claimed in claim 7, wherein the carrier gas is selected from a group consisting of air, argon, nitrogen and oxygen.

9. The method as claimed in claim 7, wherein the carrier gas is air, argon, nitrogen, oxygen, or a combination thereof.

10. The method as claimed in claim 7, wherein the flow rate of the carrier gas ranges from 3 to 25 L/min.

11. The method as claimed in claim 1, wherein the cooling-gas is air.

12. The method as claimed in claim 1, wherein the cooling-gas is a combination of air and nitrogen.

13. The method as claimed in claim 1, wherein flow rate of the cooling-gas ranges from 1 to 5 m³/min.