Actuator element and device including the actuator element

• US 7,126,254 B2
• Filed: 06/30/2004
• Issued: 10/24/2006
• Est. Priority Date: 07/22/2003
• Status: Expired due to Fees

• Current Assignee: NGK Insulators Limited
• Original Assignee: NGK Insulators Limited
• Inventors: Yamamoto, Hisanori, Kimura, Koji, Nanataki, Tsutomu, Shimogawa, Natsumi
• Primary Examiner(s): Schuberg, Darren
• Assistant Examiner(s): SAN MARTIN, JAYDI A
• Application Number:
  US10/881,328
• Publication Number:
  US 20050057120A1
• Time in Patent Office: 846 Days
• Field of Search: 310/324, 310330-332, 313/269, 313/508, 367/163
• US Class Current: 310/324
• CPC Class Codes: G02B 26/0858 the reflecting means being moved or deformed by piezoelectric means
• CPC Class Codes: G02B 6/3502 involving direct waveguide displacement, e.g. cantilever type waveguide displacement involving waveguide bending, or displacing an interposed waveguide between stationary waveguides
• CPC Class Codes: G02B 6/3578 Piezoelectric force piezoelectric forces controlling reflecting elements in general G02B26/0858; piezo-optic devices G02F1/0131
• CPC Class Codes: H10N 30/2047 Membrane type
• CPC Class Codes: H10N 30/874 embedded within piezoelectric or electrostrictive material, e.g. via connections

Abstract

An actuator element has a plate member, a piezoelectric/electrostrictive body disposed in facing relation to the plate member, and a beam disposed between the plate member and the piezoelectric/electrostrictive body and fixing the piezoelectric/electrostrictive body to the plate member. The piezoelectric/electrostrictive body has a piezoelectric/electrostrictive layer, an upper electrode formed on a surface of the piezoelectric/electrostrictive layer which faces the plate member, and a lower electrode formed on a surface of the piezoelectric/electrostrictive layer which is opposite to the surface thereof facing the plate member. When an electric field is applied to the upper electrode and the lower electrode, a portion of the piezoelectric/electrostrictive body is displaced toward or away from the plate member.

Claims

1. An actuator element comprising:

a plate member;

a piezoelectric/electrostrictive body disposed in facing relation to said plate member; and

a beam disposed between said plate member and said piezoelectric/electrostrictive body and fixing said piezoelectric/electrostrictive body to said plate member;

said piezoelectric/electrostrictive body having a piezoelectric/electrostrictive layer that overlaps an entirety of said beam, an upper electrode formed on a surface of said piezoelectric/electrostrictive layer which faces said plate member, and a lower electrode formed on a surface of said piezoelectric/electrostrictive layer which is opposite to the surface thereof facing said plate member;

whereby when an electric field is applied to said upper electrode and said lower electrode, a portion of said piezoelectric/electrostrictive body is displaced toward or away from said plate member.

2. An actuator element according to claim 1, wherein said upper electrode and said lower electrode are formed on a portion of said piezoelectric/electrostrictive body which corresponds to said beam.

3. An actuator element according to claim 1, wherein a region disposed between said plate member and said piezoelectric/electrostrictive body and divided by said beam serves as a drive region, and said upper electrode and said lower electrode are formed on a portion of said piezoelectric/electrostrictive body which corresponds to said drive region.

4. An actuator element according to claim 1, wherein a region disposed between said plate member and said piezoelectric/electrostrictive body and divided by said beam serves as a drive region, and said upper electrode and said lower electrode are formed on a portion of said piezoelectric/electrostrictive body which corresponds to said beam and a portion of said piezoelectric/electrostrictive body which corresponds to said drive region.

5. An actuator element according to claim 1, wherein said upper electrode is connected to the surface of said piezoelectric/electrostrictive layer on which said lower electrode is formed, through a through hole formed in said piezoelectric/electrostrictive layer.

6. An actuator element according to claim 1, wherein said piezoelectric/electrostrictive body comprises a laminated assembly of piezoelectric/electrostrictive layers, an upper electrode formed on a surface of said laminated assembly which faces said plate member, a lower electrode formed on a surface of said laminated assembly which is opposite to the surface thereof facing said plate member, and an intermediate electrode formed in said laminated assembly between said piezoelectric/electrostrictive layers.

7. An actuator element according to claim 6, wherein said upper electrode, said intermediate electrode, and said lower electrode are formed on a portion of said piezoelectric/electrostrictive body which corresponds to said beam.

8. An actuator element according to claim 6, wherein a region disposed between said plate member and said piezoelectric/electrostrictive body and divided by said beam serves as a drive region, and said upper electrode, said intermediate electrode, and said lower electrode are formed on a portion of said piezoelectric/electrostrictive body which corresponds to said drive region.

9. An actuator element according to claim 6, wherein a region disposed between said plate member and said piezoelectric/electrostrictive body and divided by said beam serves as a drive region, and said upper electrode, said intermediate electrode, and said lower electrode are formed on a portion of said piezoelectric/electrostrictive body which corresponds to said beam and a portion of said piezoelectric/electrostrictive body which corresponds to said drive region.

10. An actuator element according to claim 6, wherein said upper electrode and said intermediate electrode are connected to the surface of said laminated assembly on which said lower electrode is formed, via through holes formed in said laminated assembly.

11. An actuator element according to claim 1, further comprising:

a displacement transmitter for transmitting displacement of said piezoelectric/electrostrictive body to said plate member in a region disposed between said plate member and said piezoelectric/electrostrictive body and divided by said beam.

12. An actuator element according to claim 11, wherein said plate member comprises a transparent plate into which light is introduced, further comprising at least a light scattering layer disposed on said displacement transmitter.

13. An actuator element according to claim 1, further comprising:

a spacer disposed between said plate member and said piezoelectric/electrostrictive body;

wherein said plate member is held in contact with an upper surface of said spacer and said piezoelectric/electrostrictive body is held in contact with a lower surface of said spacer, said beam including said spacer.

14. An actuator element according to claim 1, further comprising:

a spacer disposed between said plate member and said piezoelectric/electrostrictive body;

wherein at least one-layer film is formed between a lower surface of said spacer and said piezoelectric/electrostrictive body, said beam including said spacer and a portion of said film directly beneath said spacer.

15. An actuator element according to claim 1, wherein said beam includes a buffer layer.

16. A device having an actuator element according to claim 1.