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Integrated three-dimensional magnetic sensing device and method to fabricate an integrated three-dimensional magnetic sensing device

  • US 7,126,330 B2
  • Filed: 06/03/2004
  • Issued: 10/24/2006
  • Est. Priority Date: 06/03/2004
  • Status: Expired due to Fees
First Claim
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1. An integrated three-dimensional magnetic sensing device comprising:

  • a first magnetic sensor unit formed on a first surface area of a single substrate;

    a second magnetic sensor unit formed on a second surface area of the single substrate; and

    a third magnetic sensor unit formed at least in part on a first sloped surface and a second sloped surface, wherein the first and second sloped surfaces are sloped with respect to the first and second surface areas of the single substrate,wherein the first magnetic sensor unit is arranged to sense a component of a magnetic field in a first direction, the second magnetic sensor unit is arranged to sense a component of the magnetic field in a second direction, and the third magnetic sensor unit is arranged to sense a component of the magnetic field in a third direction, andwherein the first, second, and third directions are substantially mutually orthogonal.

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