Electrostatic capacitance detection device
First Claim
1. An electrostatic capacitance detection device that reads surface contours of a target object by detecting electrostatic capacitance, which changes according to a distance from the target object, comprising:
- output lines;
power supply lines;
M number of row lines, and N number of column lines that are arranged in a matrix of M rows and N columns; and
an electrostatic capacitance detection element that is formed at intersections between the row lines and column lines;
the electrostatic capacitance detection element including a signal detection element, a signal amplifying element, a column selection element and a row selection element;
the signal detection element including a capacitance detecting electrode, a capacitance detecting dielectric layer and a reference capacitor;
the reference capacitor including a reference capacitor first electrode, a reference capacitor dielectric layer and a reference capacitor second electrode;
the signal amplifying element, the column selection element and the row selection element being coupled in series and located between an output line and a power supply line; and
the reference capacitor first electrode being electrically coupled to one of the row lines.
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Abstract
Aspects of the invention can provide an electrostatic capacitance detection device having M number of row lines and N number of column lines arranged in a matrix of M rows and N columns, and an electrostatic capacitance detection element formed at the intersection thereof. The electrostatic capacitance detection element can include a signal detection element, a signal amplifying element and a column selection element and a row selection element. The signal detection element can include a capacitance detecting electrode, a capacitance detecting dielectric layer, and a reference capacitor. One of a pair of electrodes in the reference capacitor is coupled to the row line. Accordingly, the invention can achieve a superior electrostatic capacitance detection device.
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Citations
21 Claims
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1. An electrostatic capacitance detection device that reads surface contours of a target object by detecting electrostatic capacitance, which changes according to a distance from the target object, comprising:
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output lines; power supply lines; M number of row lines, and N number of column lines that are arranged in a matrix of M rows and N columns; and an electrostatic capacitance detection element that is formed at intersections between the row lines and column lines; the electrostatic capacitance detection element including a signal detection element, a signal amplifying element, a column selection element and a row selection element; the signal detection element including a capacitance detecting electrode, a capacitance detecting dielectric layer and a reference capacitor; the reference capacitor including a reference capacitor first electrode, a reference capacitor dielectric layer and a reference capacitor second electrode; the signal amplifying element, the column selection element and the row selection element being coupled in series and located between an output line and a power supply line; and the reference capacitor first electrode being electrically coupled to one of the row lines. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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Specification