RF-mems switch
First Claim
1. An RF-MEMS switch comprising:
- a substrate;
a movable element;
an RF signal-conducting unit arranged on the substrate;
a plurality of movable electrodes disposed on the movable element, having a space provided therebetween in a direction of signal conduction of the RF signal-conducting unit and arranged above the RF signal-conducting unit;
a movable electrode displacing unit for displacing the plurality of movable electrodes at the same time in the same direction towards or away from the RF signal-conducting unit;
an upper member disposed above the movable element; and
at least one fixed electrode disposed on the upper member;
whereinwhen all of the plurality of movable electrodes are displaced in the direction away from the RF signal-conducting unit by the movable electrode displacing unit so as to be disposed at positions where a signal is switched on, conduction of an RF signal of the RF signal-conducting unit is switched on;
when all the plurality of movable electrodes are displaced in the direction towards the RF signal-conducting unit by the movable electrode displacing unit so as to be disposed at positions where the signal is switched off, conduction of the RF signal of the RF signal-conducting unit is switched off; and
an electrical length of the RF signal-conducting unit sandwiched between the plurality of movable electrodes is set such that an amplitude of a combined signal composed of RF signals reflected at positions of the RF signal-conducting unit facing the plurality of movable electrodes is less than an amplitude of each of signals reflected at positions of the RF signal-conducting unit facing the plurality of movable electrodes when the plurality of movable electrodes are disposed at positions where the signal is switched on.
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Accused Products
Abstract
An RF-MEMS switch includes a plurality of movable electrodes disposed with a space provided therebetween in the direction of RF signal conduction of an RF signal-conducting unit which is provided above the RF signal-conducting unit. A movable electrode displacing unit for displacing all the movable electrodes at the same time in the same direction towards or away from the RF signal-conducting unit is provided. The electrical length of the RF signal-conducting unit sandwiched between the movable electrodes is set such that the amplitude of a combined signal including signals reflected in positions of the RF signal-conducting unit facing the movable electrodes is less than the amplitude of each of reflected signals reflected in positions of the RE signal-conducting unit facing the movable electrodes when the movable electrodes are displaced away from the RF signal-conducting unit and signal conduction of the RF signal-conducting unit is switched on.
31 Citations
15 Claims
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1. An RF-MEMS switch comprising:
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a substrate; a movable element; an RF signal-conducting unit arranged on the substrate; a plurality of movable electrodes disposed on the movable element, having a space provided therebetween in a direction of signal conduction of the RF signal-conducting unit and arranged above the RF signal-conducting unit; a movable electrode displacing unit for displacing the plurality of movable electrodes at the same time in the same direction towards or away from the RF signal-conducting unit; an upper member disposed above the movable element; and at least one fixed electrode disposed on the upper member;
whereinwhen all of the plurality of movable electrodes are displaced in the direction away from the RF signal-conducting unit by the movable electrode displacing unit so as to be disposed at positions where a signal is switched on, conduction of an RF signal of the RF signal-conducting unit is switched on; when all the plurality of movable electrodes are displaced in the direction towards the RF signal-conducting unit by the movable electrode displacing unit so as to be disposed at positions where the signal is switched off, conduction of the RF signal of the RF signal-conducting unit is switched off; and an electrical length of the RF signal-conducting unit sandwiched between the plurality of movable electrodes is set such that an amplitude of a combined signal composed of RF signals reflected at positions of the RF signal-conducting unit facing the plurality of movable electrodes is less than an amplitude of each of signals reflected at positions of the RF signal-conducting unit facing the plurality of movable electrodes when the plurality of movable electrodes are disposed at positions where the signal is switched on. - View Dependent Claims (2, 3, 4, 5)
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6. An RF-MEMS switch comprising:
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a substrate; an RF signal-conducting unit arranged on the substrate; a movable element disposed above the substrate with a space provided therebetween and facing at least a portion of the RF signal-conducting unit; a plurality of movable electrodes arranged on the movable element and facing the RF signal-conducting unit; a movable element displacing unit for displacing the movable element in a direction towards or away from the substrate via electrostatic attraction; an upper member disposed above the movable element; and at least one fixed electrode disposed on the upper member;
whereinthe plurality of movable electrodes is disposed with a space provided therebetween in the direction of signal conduction of the RF signal-conducting unit; and the RF signal-conducting unit located between the plurality of movable electrodes defines a transmission line having a length that is less than or equal to a quarter of a wavelength of the conducting RF signal of the RF signal-conducting unit such that the RF signal-conducting unit located between the plurality of movable electrodes provides a characteristic impedance that is greater than a system impedance. - View Dependent Claims (7, 8, 9)
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10. An RF-MEMS switch comprising:
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a substrate; an RF signal-conducting unit arranged on the substrate; a plurality of movable elements disposed with a space provided therebetween in the direction of signal conduction of the RF signal-conducting unit, arranged above the substrate with a space provided therebetween, and facing at least a portion of the RF signal-conducting unit; movable electrodes arranged on the corresponding movable elements and facing the RF signal-conducting unit; a movable element displacing unit for displacing the movable elements in the direction towards or away from the substrate using electrostatic attraction; an upper member disposed above the movable element; and at least one fixed electrode disposed on the upper member;
whereinthe RF signal-conducting unit located between the plurality of movable electrodes defines a transmission line having a length that is less than or equal to a quarter of the wavelength of the conducting RF signal of the RF signal-conducting unit such that the RF signal-conducting unit located between the plurality of movable electrodes provides a characteristic impedance is greater than a system impedance. - View Dependent Claims (11, 12, 13, 14, 15)
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Specification