Methods and systems for processing a substrate using a dynamic liquid meniscus
First Claim
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1. A method of moving a meniscus from a first surface to a second surface, comprising:
- forming a meniscus between a proximity head and a first surface, the proximity head including;
a plurality of source inlets in the proximity head; and
a plurality of source outlets in the proximity head, wherein forming the meniscus includes injecting a selected liquid from the first plurality of ports between the proximity head and the first surface and applying a vacuum to the second plurality of ports between the proximity head and the first surface; and
moving the meniscus from the first surface to an adjacent second surface.
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Abstract
A system and method of moving a meniscus from a first surface to a second surface includes forming a meniscus between a head and a first surface. The meniscus can be moved from the first surface to an adjacent second surface, the adjacent second surface being parallel to the first surface. The system and method of moving the meniscus can also be used to move the meniscus along an edge of a substrate.
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Citations
27 Claims
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1. A method of moving a meniscus from a first surface to a second surface, comprising:
forming a meniscus between a proximity head and a first surface, the proximity head including; a plurality of source inlets in the proximity head; and a plurality of source outlets in the proximity head, wherein forming the meniscus includes injecting a selected liquid from the first plurality of ports between the proximity head and the first surface and applying a vacuum to the second plurality of ports between the proximity head and the first surface; and
moving the meniscus from the first surface to an adjacent second surface.- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
Specification