Method for implementing a resonator under electrostatic forces

• US 7,127,946 B2
• Filed: 12/21/2005
• Issued: 10/31/2006
• Est. Priority Date: 02/06/2003
• Status: Active Grant

• Current Assignee: Safran Electronics & Defense
• Original Assignee: Sagem Defense Securite (Safran SA)
• Inventors: Renault, Alain
• Primary Examiner(s): Williams, Hezron
• Assistant Examiner(s): Hanley, John C
• Application Number:
  US11/312,426
• Publication Number:
  US 20060096375A1
• Time in Patent Office: 314 Days
• Field of Search: 735/041.2, 735/041.3, 73/17.7, 735/040.2
• US Class Current: 73/504.13
• CPC Class Codes: G01C 19/5691 of essentially three-dimensional vibrators, e.g. wine glass-type vibrators

Abstract

In an implementation in rate gyro mode, the method includes exciting the vibrating member with a combination of control signals including an amplitude control signal at a frequency twice the resonant frequency, and a quadrature control signal at DC. In free gyro mode, the method includes the steps of applying a combination of signals to common electrodes 5 and of applying the combination in alternation to main electrodes 5.1 and 5.2 and to auxiliary electrodes 7.1 and 7.2 interleaved between the main electrodes.

Claims

1. A method of implementing a resonator in free gyro mode, the resonator comprising a vibrating member adapted to be set into vibration at a resonant frequency under the effect of electrostatic forces generated by electrodes disposed facing a portion of the vibrating member, the method comprising the steps of:

exciting the vibrating member by means of a combination of control signals comprising, during a sustaining stage, an amplitude control signal at a frequency twice the resonant frequency of the vibrating member, and a DC quadrature control signal, both control signals being amplitude-modulated;

measuring vibration of the vibrating member; and

demodulating the vibration at the resonant frequency of the vibrating member,

wherein the amplitude control signal and the quadrature control signal are applied to common electrodes that are modally in quadrature.

2. A method according to claim 1, wherein the amplitude control signal is applied to at least half of the electrodes that are distributed in symmetrical manner.

3. A method according to claim 1, wherein the quadrature control signal is applied to electrodes on either side of a vibration node.