Unitary slot valve actuator with dual valves

• US 7,128,305 B2
• Filed: 04/19/2005
• Issued: 10/31/2006
• Est. Priority Date: 03/30/2000
• Status: Expired due to Fees

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Tomasch, Gregory A.
• Primary Examiner(s): KEASEL, ERIC S
• Application Number:
  US11/110,141
• Publication Number:
  US 20050178993A1
• Time in Patent Office: 560 Days
• Field of Search: 251/167, 251/195, 251/298, 251/211, 414/217, 137/613, 137/614.11, 137/614.13
• US Class Current: 251/211
• CPC Class Codes: F16K 3/18 by movement of the closure members
• CPC Class Codes: F16K 43/008 the main valve having a back-seat position, e.g. to service the spindle sealing
• CPC Class Codes: F16K 51/02 specially adapted for high-vacuum installations

Abstract

A unitary slot valve actuator is in a vacuum body between process and transport modules. A separate valve is provided on the unitary actuator for each of two valve slots, each slot being closed or opened according to the position of the unitary actuator. The separate valves allow a vacuum condition to be maintained in the transport module while an adjacent process module is open to the atmosphere for servicing. Access to both open valves for servicing is by centering the unitary actuator to hold both valves open, but not vertically-spaced, relative to the slots. The open valves are easily reached by a service worker through an access port. A computer workstation operates a controller for the slot closure, and for moving the unitary actuator and the valves from the open and centered position, away from the slots to expose seal surfaces around the slots for cleaning.

Claims

1. A dual slot valve for use in a semiconductor process cluster tool architecture arrangement, the dual slot valve comprising:

a housing having a first side and a second side, the housing having a first slot at the first side and a second slot at the second side for passing a substrate between a first module and a second module, the first module being attached to the first side of the housing and the second module being attached to the second side of the housing;

a first door being movably mounted within the housing to enable closure of the first slot;

a second door being movably mounted within the housing to enable closure of the second slot;

one door actuator, the one door actuator being connected to each of the first and second doors;

a mount configured to move the one door actuator with the first and second doors centered with respect to an axis, the mount being further configured to move the centered doors into a position between the first and second slots, the mount being further configured to cause the one door actuator to tip to a tipped orientation with respect to the axis so that in the tipped orientation either of the first and second doors closes a respective one of the first and second slots while the other of the first and second doors is positioned by the one door actuator with the respective other of the slots open; and

a computer-controlled controller for operating the mount so that the one door actuator centers the doors.

2. A dual slot valve as recited in claim 1, wherein when the first and second doors are centered with respect to the axis, each of the first door and the second door is in an open position that is spaced from and between each of the first slot and the second slot, the valve further comprising:

a centering mechanism for holding the mount so that the one door actuator is centered with respect to the axis and the first door and the second door are held in the open position; and

wherein the controller is configured so that the mount causes the one door actuator to move the centered doors along the axis out of the position between the first and second slots.

3. A dual slot valve as recited in claim 1, the dual slot valve further comprising:

a drive to cause the mount to move the one door actuator and position the first and second doors between the first and second slots.

4. A dual slot valve as recited in claim 3, the dual slot valve further comprising:

a centering mechanism for causing the mount to position the one door actuator with the first and second doors centered between the first and second slots as the one door actuator positions the first and second doors between the first and second slots.

5. A dual slot valve as recited in claim 1, the dual slot valve further comprising:

a tipping mechanism configured to act on the mount for tipping the one door actuator after the first and second doors have been positioned centered and between the first and second slots, the tipping mechanism positioning the mount to cause the one door actuator to tip to the tipped orientation.

6. A dual slot valve as recited in claim 1, the controller operates the mount so that the one door actuator tips to the tipped orientation to close the respective one of the first and second slots.

7. A dual slot valve as recited in claim 6, wherein the other door positioned with the respective other of the slots open is away from the respective other of the slots to permit maintenance of the respective other of the slots while operations continue in the module corresponding to the respective closed slot.

8. A dual slot valve for use in a semiconductor process cluster tool architecture arrangement, the dual slot valve comprising:

a housing having a first side and a second side, the housing having a first slot at the first side and a second slot at the second side for passing a substrate between a first module and a second module, the first module being attached to the first side of the housing and the second module being attached to the second side of the housing;

a first door mounted within the housing for movement in a direction of a first axis to enable closure of the first slot;

a second door mounted within the housing for movement in the direction of the first axis to enable closure of the second slot;

a common door actuator consisting of a single member, the single member mounting each of the first and second doors for the movement in the direction of the first axis, the common door actuator having a longitudinal axis;

a mount for moving the common door actuator with the longitudinal axis in an orientation perpendicular to the first axis so that the longitudinal axis and the doors are in a position centered between the first and second slots;

a tipping drive effective when the doors reach the position centered between the first and second slots to move the mount and cause the common door actuator to tip so that the common door actuator moves either of the first and second doors to close a respective one of the slots while the other of the first and second doors opens the respective other one of the slots; and

a computer workstation configured with computer program instructions for controlling movement of the mount to close the respective one of the slots while the other of the first and second doors opens the respective other one of the slots.

9. A dual-slot valve as recited in claim 8, the tipping drive further comprising a mechanism configured to act on the mount for tipping the common door actuator, the tipping changing the orientation of the longitudinal axis with respect to the first axis from perpendicular to an acute angle, wherein when the tipping is in a first direction along the first axis the common door actuator moves the first door to close the first slot while the second door opens the second slot, and wherein when the tipping is in a second direction along the first axis the common door actuator moves the second door to close the second slot while the first door opens the first slot.

10. A dual-slot valve as recited in claim 8, further comprising:

a drive for causing the mount to move the common door actuator with the longitudinal axis in the orientation perpendicular to the first axis; and

a controller connected to the workstation for operating the drive so that the mount moves the common door actuator with the longitudinal axis in the orientation perpendicular to the first axis and the tipping drive is effective to tip the common door actuator when the doors reach the position centered between the first and second slots.

11. A dual-slot valve as recited in claim 10, further comprising:

an assembly for holding the mount to position the common door actuator with the first and second doors in the position centered between the first and second slots as the common door actuator is moved with the longitudinal axis in the orientation perpendicular to the first axis.

12. A dual-slot valve as recited in claim 8, wherein the mount is configured so that in response to the computer workstation the mount moves the common door actuator to space the doors from the first axis.

13. A dual slot valve for use in a semiconductor process cluster tool architecture arrangement provided with a process module and a transport module, the dual slot valve comprising:

a vacuum body having a first process module side and a second transport module side, the vacuum body having a process module slot at the first side and a transport module slot at the second side for passing a substrate between the process module and the transport module, the first side of the body having a first wall surface and the second side of the body having a second wall surface;

a common actuator having a door-mount end movable in the body toward and away from each of the process module slot and the transport module slot along a closure path, the door-mount end being movable away from the body along an access path that is generally perpendicular to the closure path to provide a line of clear sight between the process module slot and the transport module slot;

a first door mounted to the door-mount end of the common actuator for movement along the closure path to open and close the process module slot, the first door being mounted by the common actuator for movement along the access path between an up position and a down position, in the up position the first door being parallel to and away from the first wall surface of the body to permit accessing of the first wall surface;

a second door mounted to the door-mount end of the common actuator for movement along the closure path to open and close the transport module slot, the second door being mounted by the common actuator for movement along the access path between an up position and a down position, in the up position the second door being parallel to and away from the second wall surface of the body to permit accessing of the second wall surface; and

a dual acting actuator mechanism having a first drive for moving the door-mount end of the common actuator in the body toward and away from each of the process module slot and the transport module slot along the closure path, the actuator mechanism having a second drive for moving the door-mount end of the common actuator away from the body along the access path.

14. A dual slot valve according to claim 13, further comprising:

the common actuator having a bias-drive end opposite to the door-mount end, the common actuator being mounted for rotation on an axis located between the bias-drive end and the door-mount end; and

a dual-acting resilient bias mechanism attached to the bias-drive end of the actuator for resiliently holding the door-mount end of the actuator between and away from each of the process module slot and the transport module slot along the closure path.

15. A dual slot valve according to claim 13, further comprising:

a controller for separately controlling the first drive and the second drive; and

a computer workstation connected to the controller for enabling the first door to be in other than the closed position for servicing the process module at the same time as the second door is in the closed position to allow the transport module to operate other than in a service mode.

16. A dual slot valve according claim 15, further comprising:

the vacuum body having a door-access port to facilitate servicing the doors; and

the computer workstation comprising computer program instructions to cause the controller to operate the dual acting actuator mechanism and move the first door and the second door along the access path to the respective up position, and to move the first door along the closure path into an open position, and to move the second door along the closure path to close the second slot, in the up position of both doors with the first door in the open position the first door being in a position to be replaced with another door supplied through the door-access port.

17. A dual slot valve according to claim 15, further comprising:

the common actuator having a bias-drive end opposite to the door-mount end, the common actuator being mounted for rotation on an axis located between the bias-drive end and the door-mount end;

a dual-acting resilient bias mechanism configured to act on the bias-drive end of the actuator for rotating the bias drive end of the common actuator on the axis to releasably hold the door-mount end of the common actuator in a position between and away from each of the process module slot and the transport module slot along the closure path;

the vacuum body having a door-access port to facilitate access to the vacuum body; and

the computer workstation comprising computer program instructions to cause the controller to operate the dual acting actuator mechanism and allow the bias mechanism to releasably hold the door-mount end in the between and away position and to move the first door and the second door along the access path to the down position to enable servicing of the first and second wall surfaces through the door-access port.