Surfacing of metal fluoride excimer optics

• US 7,128,984 B2
• Filed: 08/31/2004
• Issued: 10/31/2006
• Est. Priority Date: 08/31/2004
• Status: Active Grant

• Current Assignee: Corning Incorporated
• Original Assignee: Corning Incorporated
• Inventors: Wang, Jue, Maier, Robert L
• Primary Examiner(s): McNeil, Jennifer C.
• Assistant Examiner(s): Speer, Timothy M.
• Application Number:
  US10/930,401
• Publication Number:
  US 20060046099A1
• Time in Patent Office: 791 Days
• Field of Search: None
• US Class Current: 428/696
• CPC Class Codes: G02B 1/02 made of crystals, e.g. rock-salt, semi-conductors G02B1/08 takes precedence
• CPC Class Codes: G02B 1/14 Protective coatings, e.g. hard coatings
• CPC Class Codes: G02B 5/0278 used in transmission

Abstract

The invention is directed to improved coated metal fluoride single crystal optical elements suitable for use in below 250 nm optical lithography, and particularly below 200 nm lithography. The coated elements of the invention can be lenses, windows, prisms and other elements used in lithographic methods, including the laser sources used therein. The invention is also directed to a method of removing the quasi-Bielby layer formed when a shaped optical element is polished. Removal of the quasi-Bielby layer prior to coating results in improved durability and optical transmission characteristics of the coated lenses. The coating material can be any material that does not impede the transmission of below 250 nm electromagnetic radiation. Fluorine doped silicon dioxide is the preferred coating material.

Claims

1. A coated alkaline earth metal fluoride single crystal optical element suitable for use in optical lithography systems using below 250 nm electromagnetic radiation, said optical element comprising a shaped metal fluoride single crystal having a selected coating material on the element surfaces through which said electromagnetic radiation enters and exits;

wherein said coating is on a surface that has been cleaned of the quasi-Bielby layer present on the surface prior to the application of the coating material.

2. The optical element according to claim 1, wherein the alkaline earth metal fluoride is selected from the group consisting of calcium fluoride, barium fluoride, magnesium fluoride and strontium fluoride, and mixtures thereof.

3. The optical element according to claim 2, wherein said coating material is selected from the group consisting of high purity silicon dioxide, silicon nitride, silicon oxynitride, magnesium fluoride, aluminum oxide, fluorine-doped high purity silica, and aluminum doped high purity silica.

4. The optical element according to claim 3, wherein the metal fluoride is calcium fluoride and the coating material is fluorine doped high purity fused silica.

5. The optical element according to claim 4, wherein the coating is applied to a thickness in the range of 10 to 10,000 nanometers.

6. The optical element according to claim 1, wherein the coating is applied to a thickness in the range of 10 to 10,000 nanometers.

7. The optical element according to claim 1, wherein said optical element is a calcium fluoride element having a coating of fluorine doped silica deposited on the surfaces through which said electromagnetic radiation enters and exits the element.