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Methods and devices for inhibiting tilting of a mirror in an interferometric modulator

  • US 7,130,104 B2
  • Filed: 06/16/2005
  • Issued: 10/31/2006
  • Est. Priority Date: 09/27/2004
  • Status: Expired due to Fees
First Claim
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1. An interferometric modulator comprising:

  • a substrate;

    an optical layer positioned over the substrate, the optical layer being at least partially transmissive to incident light;

    a mirror positioned over the substrate and movable between a first position spaced from the optical layer by a first distance and a second position spaced from the optical layer by a second distance, the first distance being greater than the second distance, and the mirror having a surface away from the substrate, wherein light reflected by the interferometric modulator is interferometrically modulated; and

    at least one stationary member contacting the surface of the mirror when the mirror is in the first position, wherein the at least one stationary member is configured to inhibit movement of at least a portion of the mirror when the mirror is in the first position.

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