Methods and devices for inhibiting tilting of a mirror in an interferometric modulator

• US 7,130,104 B2
• Filed: 06/16/2005
• Issued: 10/31/2006
• Est. Priority Date: 09/27/2004
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: IDC, LLC
• Inventors: Cummings, William J.
• Primary Examiner(s): Thompson, Timothy
• Assistant Examiner(s): FANG, JERRY C
• Application Number:
  US11/154,283
• Publication Number:
  US 20060077527A1
• Time in Patent Office: 502 Days
• Field of Search: 359/290, 359/291, 359/223, 359/224, 345/107, 345/108
• US Class Current: 359/290
• CPC Class Codes: B81B 2201/047 Optical MEMS not provided for in B81B2201/042 - B81B2201/045
• CPC Class Codes: B81B 3/0051 For defining the movement, i.e. structures that guide or limit the movement of an element mechanical arrangements for preventing or damping vibration or shock H01H3/60
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26

Abstract

Interferometric modulators having a separable modulator architecture are disclosed having a reflective layer suspended from a flexible layer over a cavity. The interferometric modulators have one or more anti-tilt members that inhibit undesirable movement of the reflective layer, such as curling and/or tilting. The stabilization of the reflective layer by the anti-tilt members can improve the quality of the optical output of the interferometric modulators, as well as displays comprising such interferometric modulators.

Claims

1. An interferometric modulator comprising:

a substrate;

an optical layer positioned over the substrate, the optical layer being at least partially transmissive to incident light;

a mirror positioned over the substrate and movable between a first position spaced from the optical layer by a first distance and a second position spaced from the optical layer by a second distance, the first distance being greater than the second distance, and the mirror having a surface away from the substrate, wherein light reflected by the interferometric modulator is interferometrically modulated; and

at least one stationary member contacting the surface of the mirror when the mirror is in the first position, wherein the at least one stationary member is configured to inhibit movement of at least a portion of the mirror when the mirror is in the first position.

2. The interferometric modulator of claim 1, wherein the mirror is substantially parallel to the optical layer when in the first position.

3. The interferometric modulator of claim 1, wherein the mirror is substantially planar when in the first position.

4. The interferometric modulator of claim 1, wherein the at least one member inhibits movement of at least a portion of the mirror in a direction generally perpendicular to the mirror when the mirror is in the first position.

5. The interferometric modulator of claim 4, wherein the at least one member inhibits movement of at least a portion of the mirror in a direction generally parallel to the mirror when the mirror is in the first position.

6. The interferometric modulator of claim 4, wherein the at least one member inhibits rotational movement of at least a portion of the mirror when the mirror is in the first position.

7. The interferometric modulator of claim 1, wherein the at least one member inhibits movement of at least a portion of the mirror in a direction generally parallel to the mirror when the mirror is in the second position.

8. The interferometric modulator of claim 7, wherein the at least one member inhibits rotational movement of at least a portion of the mirror when the mirror is in the second position.

9. The interferometric modulator of claim 1, wherein the at least one member inhibits movement of at least a portion of the mirror in a direction generally parallel to the mirror when the mirror occupies a position between the first and second positions.

10. The interferometric modulator of claim 9, wherein the at least one member inhibits rotational movement of at least a portion of the mirror when the mirror occupies a position between the first and second positions.

11. The interferometric modulator of claim 4, wherein the at least one member comprises a single segment that is substantially curvilinear.

12. The interferometric modulator of claim 11, wherein an end portion of the at least one member contacts at least a portion of the mirror when the mirror is in the first position.

13. The interferometric modulator of claim 1, wherein the mirror further comprises at least one recess that contacts the at least one member when the mirror is in the first position.

14. The interferometric modulator of claim 1, wherein the mirror shields the at least one member from light incident to the interferometric modulator.

15. The interferometric modulator of claim 1, further comprising a mechanical layer attached to the mirror that suspends the mirror over the substrate, wherein the mechanical layer exerts a force on the mirror that facilitates contact between the at least one member and the surface of the mirror when the mirror is in the first position.

16. The interferometric modulator of claim 1, wherein the at least one member comprises a shaft segment substantially perpendicular to the mirror and a head segment connected to the shaft segment.

17. The interferometric modulator of claim 16, wherein the head segment is substantially perpendicular to the shaft segment.

18. The interferometric modulator of claim 16, wherein the head segment is at an acute angle to the shaft segment.

19. The interferometric modulator of claim 16, wherein the shaft segment inhibits movement of at least a portion of the mirror in a direction generally parallel to the mirror when the mirror is in the first position, and the head segment inhibits movement of at least a portion of the mirror in a direction generally perpendicular to the mirror when the mirror is in the first position.

20. The interferometric modulator of claim 16, wherein the head segment contacts at least a portion of the surface of the mirror when the mirror is in the first position.

21. The interferometric modulator of claim 16, wherein at least a portion of the head segment has a width larger than a width of the shaft segment.

22. The interferometric modulator of claim 16, wherein the shape of the head segment is selected from the group comprising substantially rectangular, substantially conical, barbed, substantially spherical, oblong, and substantially hook-shaped.

23. The interferometric modulator of claim 16, wherein the shape of the shaft is selected from the group consisting of:

substantially conical, substantially rectangular, substantially triangular, and substantially round.

24. The interferometric modulator of claim 16, wherein the head segment further comprises a convex portion that contacts at least a portion of the mirror when the mirror is in the first position.

25. The interferometric modulator of claim 24, wherein the mirror further comprises a recessed portion that contacts the convex portion of the head segment when the mirror is in the first position.

26. The interferometric modulator of claim 16, wherein the at least one member further comprises a contact region connected to the head segment, wherein said contact region contacts at least a portion of the surface of the mirror when the mirror is in the first position.

27. An interferometric modulator comprising:

a substrate;

an optical layer positioned over the substrate, the optical layer being at least partially transmissive to incident light;

a mirror positioned over the substrate and movable between a first position spaced from the optical layer by a first distance and a second position spaced from the optical layer by a second distance, the first distance being greater than the second distance, and the mirror having a surface facing away from the substrate, wherein light reflected by the interferometric modulator is interferometrically modulated; and

at least one stationary mirror-stabilizing means configured to maintain the mirror in a desired orientation when the mirror is in the first position, said mirror-stabilizing means contacting the surface of the mirror when the mirror is in the first position.

28. The interferometric modulator of claim 27, wherein the mirror-stabilizing means is configured to maintain the mirror in a substantially planar orientation when the mirror is in the first position.

29. The interferometric modulator of claim 27, wherein the mirror-stabilizing means is configured to maintain the mirror substantially parallel to the substrate when the mirror is in the first position.

30. An interferometric modulator comprising:

a substrate;

an optical layer positioned over the substrate, the optical layer being at least partially transmissive to incident light;

a mirror positioned over the substrate and movable between a first position spaced from the optical layer by a first distance and a second position spaced from the optical layer by a second distance, the first distance being greater than the second distance, and the mirror having a surface away from the substrate; and

at least one stationary member contacting the surface of the mirror when the mirror is in the first position, wherein the at least one stationary member comprises a single segment that is substantially curvilinear and is configured to inhibit movement of at least a portion of the mirror in a direction generally perpendicular to the mirror when the mirror is in the first position.

31. The interferometric modulator of claim 30, wherein an end portion of the at least one member contacts at least a portion of the mirror when the mirror is in the first position.

32. An interferometric modulator comprising:

a substrate;

an optical layer positioned over the substrate, the optical layer being at least partially transmissive to incident light;

a mirror positioned over the substrate and movable between a first position spaced from the optical layer by a first distance and a second position spaced from the optical layer by a second distance, the first distance being greater than the second distance, and the mirror having a surface away from the substrate;

at least one stationary member contacting the surface of the mirror when the mirror is in the first position, wherein the at least one stationary member is configured to inhibit movement of at least a portion of the mirror when the mirror is in the first position; and

a mechanical layer attached to the mirror that suspends the mirror over the substrate, wherein the mechanical layer exerts a force on the mirror that facilitates contact between the at least one member and the surface of the mirror when the mirror is in the first position.

33. An interferometric modulator comprising:

means for supporting at least a portion of the interferometric modulator;

means for transmitting light, the transmitting means positioned over the supporting means, the transmitting means at least partially transmissive to incident light;

means for reflecting light, the reflecting means positioned over the supporting means and movable between a first position spaced from the transmitting means by a first distance and a second position spaced from the transmitting means by a second distance, the first distance being greater than the second distance, and the reflecting means having a surface away from the supporting means, wherein light reflected by the interferometric modulator is interferometrically modulated; and

means for stabilizing the reflecting means, the stabilizing means contacting the surface of the reflecting means when the reflecting means is in the first position, wherein the stabilizing means is configured to inhibit movement of at least a portion of the reflecting means when the reflecting means is in the first position.

34. The interferometric modulator of claim 33, wherein the supporting means comprises a substrate.

35. The interferometric modulator of claim 33, wherein the transmitting means comprises an optical layer.

36. The interferometric modulator of claim 33, wherein the reflecting means comprises a mirror.

37. The interferometric modulator of claim 33, wherein the stabilizing means comprises at least one stationary member.