Method of dynamically designing a preventative maintenance schedule based upon sensor data, and system for accomplishing same
First Claim
1. A method, comprising:
- operating a process tool, said process tool having a plurality of sensors operatively coupled to said tool for sensing at least one parameter associated with the operation of said process tool;
obtaining data from said sensors; and
deciding preventative maintenance procedures that are not to be performed on said process tool if said data obtained from said sensors indicates that a number of abnormal process events that occurred with respect to said aspect of said process tool exceeds an allowable limit.
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Accused Products
Abstract
In one example, the method includes operating a process tool that has a plurality of sensors for sensing at least one parameter associated with the operation of the process tool, obtaining data from the sensors and determining at least one maintenance activity for the process tool based upon the data obtained from the sensors. In another example, data from the sensors is provided to a controller that analyzes the data and indicates desired variations in at least one maintenance activity to be performed on the process tool based upon the analysis of the data. In yet another example, the controller identifies a plurality of maintenance activities to be performed on the process tool based upon the analysis of the data.
17 Citations
28 Claims
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1. A method, comprising:
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operating a process tool, said process tool having a plurality of sensors operatively coupled to said tool for sensing at least one parameter associated with the operation of said process tool; obtaining data from said sensors; and deciding preventative maintenance procedures that are not to be performed on said process tool if said data obtained from said sensors indicates that a number of abnormal process events that occurred with respect to said aspect of said process tool exceeds an allowable limit. - View Dependent Claims (2, 3, 4, 5)
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6. A method, comprising:
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operating a process tool, said process tool having a plurality of sensors operatively coupled to said tool for sensing at least one parameter associated with the operation of said process tool; obtaining data from said sensors; and designing a preventative maintenance program for said process tool based upon said data obtained from said sensors, wherein designing said preventative maintenance program comprises deciding preventative maintenance activities that are not to be performed on said tool based upon said data obtained from said sensors. - View Dependent Claims (7, 8, 9, 10, 11, 12, 13)
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14. A method, comprising:
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operating a process tool, said process tool having a plurality of sensors operatively coupled to said tool for sensing at least one parameter associated with the operation of said process tool; obtaining data from said sensors; and providing said data to a controller that analyzes said data obtained from said sensors and indicates at least one preventative maintenance activity that is not to be performed on said process tool based upon said analysis of said data. - View Dependent Claims (15, 16, 17, 18)
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19. A method, comprising:
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operating a process tool, said process tool having a plurality of sensors operatively coupled to said tool for sensing at least one parameter associated with the operation of said process tool; obtaining data from said sensors; and providing said data to a controller that analyzes said data obtained from said sensors and identifies a plurality of maintenance activities that are not to be performed on said process tool based upon said analysis of said data. - View Dependent Claims (20, 21, 22, 23)
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24. A system, comprising:
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a process tool adapted to perform a process operation; a plurality of sensors operatively coupled to said process tool to sense at least one parameter associated with the process operation of said process tool; and a controller for analyzing data sensed by said plurality of sensors and determining at least one maintenance activity that is not to be performed on said process tool based upon said data sensed by said sensors, wherein said controller is adapted to increase at least one maintenance activity on an aspect of said process tool if said data obtained from said sensors indicates that a number of abnormal process events that occurred with respect to said aspect of said process tool exceeds an allowable limit. - View Dependent Claims (25, 26, 27, 28)
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Specification