Please download the dossier by clicking on the dossier button x
×

Scribing and breaking apparatus, system therefor, and scribing and breaking method

  • US 7,131,562 B2
  • Filed: 01/16/2002
  • Issued: 11/07/2006
  • Est. Priority Date: 01/17/2001
  • Status: Expired due to Fees
First Claim
Patent Images

1. A separation apparatus, comprising:

  • first and second scribing means for scribing front and rear surfaces of a mother substrate made of a brittle material, the first and second scribing means being opposed to each other on an upper side and a lower side;

    a holding and transferring means for holding and transferring the mother substrate so that scribing lines of the mother substrate are located between the first and second scribing means;

    a first table, on which the mother substrate, being transferred between the first and second scribing means by the holding and transferring means, is mounted; and

    a pair of cameras for recognizing alignment marks provided on the mother substrate,wherein the first and second scribing means are controlled so that a deviation of the mother substrate set on the first table, relative to the first table, is obtained based on alignment marks recognized by the pair of cameras and the deviation is canceled by linear interpolation.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×