Scribing and breaking apparatus, system therefor, and scribing and breaking method
First Claim
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1. A separation apparatus, comprising:
- first and second scribing means for scribing front and rear surfaces of a mother substrate made of a brittle material, the first and second scribing means being opposed to each other on an upper side and a lower side;
a holding and transferring means for holding and transferring the mother substrate so that scribing lines of the mother substrate are located between the first and second scribing means;
a first table, on which the mother substrate, being transferred between the first and second scribing means by the holding and transferring means, is mounted; and
a pair of cameras for recognizing alignment marks provided on the mother substrate,wherein the first and second scribing means are controlled so that a deviation of the mother substrate set on the first table, relative to the first table, is obtained based on alignment marks recognized by the pair of cameras and the deviation is canceled by linear interpolation.
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Abstract
A separation apparatus comprising a first and a second scribing means for scribing front and rear surfaces of a first mother substrate made of a brittle material along first predetermined scribing lines previously provided on the front and rear surfaces of the first mother substrate, the first and second scribing means being opposed to each other on an upper side and a lower side, and a holding and transferring means for holding and transferring the first mother substrate so that the first predetermined scribing lines of the first mother substrate are located between the first and second scribing means.
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Citations
29 Claims
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1. A separation apparatus, comprising:
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first and second scribing means for scribing front and rear surfaces of a mother substrate made of a brittle material, the first and second scribing means being opposed to each other on an upper side and a lower side; a holding and transferring means for holding and transferring the mother substrate so that scribing lines of the mother substrate are located between the first and second scribing means; a first table, on which the mother substrate, being transferred between the first and second scribing means by the holding and transferring means, is mounted; and a pair of cameras for recognizing alignment marks provided on the mother substrate, wherein the first and second scribing means are controlled so that a deviation of the mother substrate set on the first table, relative to the first table, is obtained based on alignment marks recognized by the pair of cameras and the deviation is canceled by linear interpolation. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A separation system, comprising at least a first separation apparatus and at least a second separation apparatus,
wherein the first separation apparatus comprises: -
a first and a second scribing means for scribing front and rear surfaces of a first mother substrate made of a brittle material, the first and second means being opposed to each other on an upper side and a lower side; a first holding and transferring means for holding and transferring the first mother substrate so that first predetermined scribing lines of the first mother substrate are located between the first and second scribing means; a first table, on which the mother substrate, being transferred between the first and second scribing means by the holding and transferring means, is mounted; and a first pair of cameras for recognizing alignment marks provided on the mother substrate, wherein the first and second scribing means are controlled so that a deviation of the first mother substrate set on the first table, relative to the first table, is obtained based on alignment marks recognized by the first pair of cameras and the deviation is canceled by linear interpolation, the second separation apparatus comprises; a third and a fourth scribing means for scribing front and rear surfaces of a second mother substrate separated from the first mother substrate by the first separation apparatus, the third and fourth scribing means being opposed to each other on an upper side and a lower side; a second holding and transferring means for holding and transferring the second mother substrate so that second predetermined scribing lines, previously provided on the second mother substrate and crossing the first predetermined scribing lines, are located between the third and fourth scribing means; a second table, wherein the second mother substrate is placed on the second table while the second mother substrate is transferred between the third and fourth scribing means by the second holding and transfening means; and a second pair of cameras for recognizing alignment marks provided on the second mother substrate, wherein the third and fourth scribing means are controlled so that a deviation of the second mother substrate set on the second table, relative to the second table, is obtained based on alignment marks recognized by the second pair of cameras and the deviation is canceled by linear interpolation.
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19. A separation method, comprising the steps of:
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holding a mother substrate having both sides made of a brittle material by a holding and transferring means; transferring and setting the mother substrate on a first table by the holding and transferring means so that the mother substrate is located between a first and a second scribing means opposed to each other; recognizing alignment marks on the mother substrate by a first pair of cameras; obtaining a deviation of the mother substrate set on the first table, relative to the first table, based on the alignment marks recognized by the first pair of cameras; and forming scribing lines on the mother substrate using the first and second scribing means by the first and second scribing means being transferred along predetermined scribing lines on the mother substrate while canceling the deviation by linear interpolation. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27, 28)
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29. A separation method, comprising the steps of:
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in a first separation apparatus, holding a mother substrate having both sides made of a brittle material by a first holding and transferring means; transferring and setting the mother substrate on a first table by the first holding and transferring means so that the mother substrate is located between a first and a second scribing means opposed to each other; recognizing alignment marks on the mother substrate by a first pair of cameras; obtaining a deviation of the mother substrate set on the first table, relative to the first table, based on the alignment marks recognized by the first pair of cameras; and forming scribing lines on the mother substrate using the first and second scribing means by the first and second scribing means being transferred along first predetermined scribing lines on the mother substrate while canceling the deviation by linear interpolation, and in a second separation apparatus, holding the separated mother substrate by a second holding and transferring means; transferring and setting the separated mother substrate on a second table by the second holding and transferring means so that the separated mother substrate is located between a third and a fourth scribing means opposed to each other; recognizing the alignment marks on the mother substrate by a second pair of cameras; obtaining a deviation of the mother substrate set on the second table, relative to the second table, based on the alignment marks recognized by the second pair of cameras; and forming scribing lines on the mother substrate using the third and fourth scribing means by the third and fourth scribing means being transferred along second predetermined scribing lines on the mother substrate while canceling the deviation by linear interpolation.
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Specification