Method and apparatus for processing samples

• US 7,132,293 B2
• Filed: 05/27/2004
• Issued: 11/07/2006
• Est. Priority Date: 02/27/1989
• Status: Expired due to Fees

• Current Assignee: Hitachi, Ltd.
• Original Assignee: Hitachi, Ltd.
• Inventors: Sato, Yoshiaki, Nojiri, Kazuo, Torii, Yoshimi, Fukuyama, Ryooji, Kawahara, Hironobu, Kawasaki, Yoshinao
• Primary Examiner(s): Warden, Jill
• Assistant Examiner(s): Nagpaul, Jyoti
• Application Number:
  US10/854,155
• Publication Number:
  US 20040219687A1
• Time in Patent Office: 894 Days
• Field of Search: 422 99-100, 422/64, 422/65, 436/180, 436/43
• US Class Current: 436/43
• CPC Class Codes: H01L 21/02071 the processing being a delineation, e.g. RIE, of conductive layers
• CPC Class Codes: H01L 21/31138 by dry-etching
• CPC Class Codes: H01L 21/67028 for cleaning followed by drying, rinsing, stripping, blasting or the like
• CPC Class Codes: H01L 21/67069 for drying etching
• CPC Class Codes: H01L 21/67173 in-line arrangement
• CPC Class Codes: H01L 21/67745 characterized by movements or sequence of movements of transfer devices
• CPC Class Codes: Y10S 438/963 Removing process residues from vertical substrate surfaces
• CPC Class Codes: Y10T 436/11 Automated chemical analysis
• CPC Class Codes: Y10T 436/25 including sample preparation
• CPC Class Codes: Y10T 436/2575 Volumetric liquid transfer

Abstract

Disclosed is apparatus for treating samples, and a method of using the apparatus. The apparatus includes processing apparatus (a) for treating the samples (e.g., plasma etching apparatus), (b) for removing residual corrosive compounds formed by the sample treatment, (c) for wet-processing of the samples and (d) for dry-processing the samples. A plurality of wet-processing treatments of a sample can be performed. The wet-processing apparatus can include a plurality of wet-processing stations. The samples can either be passed in series through the plurality of wet-processing stations, or can be passed in parallel through the wet-processing stations.

Claims

1. An apparatus for processing samples under a reduced pressure, comprising:

plural processing chambers for processing said samples under a reduced pressure;

a buffer chamber also under a reduced pressure;

sample support structure for receiving samples from the atmosphere while the buffer chamber is maintained under reduced pressure;

barrier structure movable to permit said buffer chamber and said processing chambers to be in communication with, and be cut off from, each other;

a first sample scooping member arranged in said buffer chamber which can perform rotary motion such that, after the processing of a sample in one processing chamber of the plural processing chambers, the first sample scooping member can rotationally move to said one processing chamber and take out the processed sample from said one processing chamber, and can also rotationally move from said one processing chamber to another processing chamber to transfer said processed sample to said another processing chamber of the plural processing chambers;

a second sample scooping member, in addition to the first sample scooping member also arranged in said buffer chamber, and which can perform rotary motion to take out another sample from said sample support structure and transfer said another sample which has already been brought into said buffer chamber to said one processing chamber from which said processed sample has already been taken out; and

a sample table in said one processing chamber, said sample table including a sample delivery member, and wherein said first sample scooping member and said sample delivery member are movable relative to each other such that a processed sample can be delivered from said sample delivery member to said first sample scooping member.

2. The apparatus according to claim 1, wherein said first sample scooping member can transfer the sample from said one processing chamber to said another processing chamber through said buffer chamber.

3. The apparatus according to claim 1, wherein said sample delivery member can move up and down relative to the first sample scooping member, when the processed sample is delivered therefrom to the first sample scooping member.

4. An apparatus for processing samples under a reduced pressure, comprising:

plural processing chambers for processing said samples under a reduced pressure;

a buffer chamber also under a reduced pressure;

barrier structure movable to permit said buffer chamber and said processing chambers to be in communication with, and be cut off from, each other;

a first sample scooping member arranged in said buffer chamber which can perform rotary motion such that, after the processing of a sample in one processing chamber of the plural processing chambers, the first sample scooping member can rotationally move to said one processing chamber and take out the processed sample from said one processing chamber, and can also rotationally move from said one processing chamber to another processing chamber of the plural processing chambers to transfer said processed sample to said another processing chamber;

a second sample scooping member, in addition to the first sample scooping member, also arranged in said buffer chamber, and which can transfer another sample, which has already been brought into said buffer chamber, to said one processing chamber, from which said processed sample has already been taken out, and

a controller controlling said first and second sample scooping members such that said second sample scooping member transfers said another sample into said one processing chamber before said first sample scooping member transfers said processed sample to said another processing chamber.

5. The apparatus according to claim 4, wherein said second sample scooping member can move without movement of said first sample scooping member.

6. The apparatus according to claim 4, wherein said first sample scooping member can transfer the sample from said one processing chamber to said another processing chamber through said buffer chamber.

7. The apparatus according to claim 6, wherein said first sample scooping member can transfer the sample from said one processing chamber to said another processing chamber only through said buffer chamber.

8. The apparatus according to claim 4, wherein said first sample scooping member is a single member that can rotationally move from said one processing chamber to said another processing chamber to transfer said processed sample from said one processing chamber to said another processing chamber.

9. The apparatus according to claim 8, wherein said first sample scooping member can rotationally move such that in transferring said processed sample from said one processing chamber to said another processing chamber the motion by said first sample scooping member is only rotary motion.

10. The apparatus according to claim 4, wherein said first sample scooping member can rotationally move such that in transferring said processed sample from said one processing chamber to said another processing chamber the motion by said first sample scooping member is only rotary motion.