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Transistor sidewall spacer stress modulation

  • US 7,132,704 B2
  • Filed: 01/13/2005
  • Issued: 11/07/2006
  • Est. Priority Date: 04/30/2003
  • Status: Expired due to Fees
First Claim
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1. An integrated circuit, comprising;

  • first and second transistors, each including a gate electrode over a gate dielectric over a semiconductor substrate;

    first spacer structures adjacent sidewalls of the first gate electrode and second spacer structures adjacent sidewalls of the second gate electrode; and

    first source/drain regions within the substrate and self-aligned to the first spacer structures and second source/drain regions within the substrate and self-aligned to the second spacer structures, wherein the first and second sidewall spacer structures comprise silicon nitride having a Si/N ratio of less than 0.8 and further wherein the first sidewall spacer structures include a distribution of an impurity selected from Xenon and Germanium.

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