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Method and apparatus for reticle inspection using aerial imaging

  • US 7,133,548 B2
  • Filed: 05/08/2001
  • Issued: 11/07/2006
  • Est. Priority Date: 10/13/1999
  • Status: Expired due to Term
First Claim
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1. An apparatus for inspecting a multiple die reticle that is used with an optical exposure system under a set of exposure conditions, said multiple die reticle including at least a first die and a second die, said apparatus comprising:

  • an optical system simulating said set of exposure conditions of said optical exposure system;

    a scanner for acquiring a plurality of aerial images of said multiple die reticle under said set of exposure conditions;

    said plurality of aerial images of said reticle comprising a first plurality of aerial images of said first die and a second plurality of aerial images of said second die; and

    an image processing module for detecting variations in line width of said first die of said reticle using said first plurality of aerial images of said first die and said second plurality of aerial images of said second die of said multiple die reticle.

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