Program for controlling laser apparatus and recording medium for recording program for controlling laser apparatus and capable of being read out by computer
First Claim
Patent Images
1. A laser treatment system comprising:
- means for inputting information on Computer Aided Design masks for a formation of a thin film transistor including a silicon island, a contact hole, and a wiring metal over a substrate by a person;
means for automatically extracting positional and directional information for irradiating a laser beam over the substrate provided with a marker in accordance with the information on the Computer Aided Design masks for the formation of thin film transistor;
means for obtaining an optimum driving condition of a laser system in accordance with the positional and directional information; and
means for controlling the laser system in accordance with the optimum driving condition of the laser system,wherein a position to be scanned with the laser beam is controlled in accordance with the Computer Aided Design masks on the basis of a position of the marker.
1 Assignment
0 Petitions
Accused Products
Abstract
The object of the present invention is to solve problems treatment time when using an SLS method or continuous-oscillation laser. An indispensable portion is scanned with a laser beam in order to crystallize a semiconductor film by driving a laser and so on in accordance with the positions of islands instead of scanning and irradiating the whole semiconductor film. The present invention makes it possible to omit the time for irradiating a portion to be removed through patterning after crystallizing the semiconductor film with a laser beam and greatly shorten the treatment time for one substrate.
-
Citations
25 Claims
-
1. A laser treatment system comprising:
-
means for inputting information on Computer Aided Design masks for a formation of a thin film transistor including a silicon island, a contact hole, and a wiring metal over a substrate by a person; means for automatically extracting positional and directional information for irradiating a laser beam over the substrate provided with a marker in accordance with the information on the Computer Aided Design masks for the formation of thin film transistor; means for obtaining an optimum driving condition of a laser system in accordance with the positional and directional information; and means for controlling the laser system in accordance with the optimum driving condition of the laser system, wherein a position to be scanned with the laser beam is controlled in accordance with the Computer Aided Design masks on the basis of a position of the marker. - View Dependent Claims (2, 3, 4, 5)
-
-
6. A laser treatment system comprising:
-
means for inputting information on Computer Aided Design masks for a formation of a thin film transistor including a silicon island, a contact hole, and a wiring metal over a substrate by a person; means for automatically extracting positional and directional information for irradiating a laser beam over the substrate provided with a marker in accordance with the information on the Computer Aided Design masks for the formation of thin film transistor and storing the positional and directional information in a database; means for obtaining an optimum driving condition of a laser system in accordance with the positional and directional information stored in the database; and means for controlling the laser system in accordance with the optimum driving condition of the laser system, wherein a position to be scanned with the laser beam is controlled in accordance with the Computer Aided Design masks on the basis of a position of the marker. - View Dependent Claims (7, 8, 9, 10)
-
-
11. A laser treatment system comprising:
-
means for inputting information on Computer Aided Design masks for a formation of a thin film transistor including a silicon island, a contact hole, and a wiring metal over a substrate by a person; means for automatically extracting positional and directional information for irradiating a laser beam over the substrate provided with a marker in accordance with the information on the Computer Aided Design masks for the formation of thin film transistor and storing the positional and directional information in a database; means for obtaining an optimum driving condition of a laser system for minimizing laser treatment time by considering speed of drive of the laser system and time required for changing drives of the laser system in accordance with the positional and directional information stored in the database; and means for controlling the laser system in accordance with the optimum driving condition of the laser system, wherein a position to be scanned with the laser beam is controlled in accordance with the Computer Aided Design masks on the basis of a position of the marker. - View Dependent Claims (12, 13, 14, 15)
-
-
16. A laser treatment system comprising:
-
means for inputting information on Computer Aided Design masks for a formation of a thin film transistor including a silicon island, a contact hole, and a wiring metal over a substrate by a person; means for automatically extracting positional and directional information for irradiating a laser beam over the substrate provided with a marker in accordance with the information on the Computer Aided Design masks for the formation of thin film transistor and storing the positional and directional information in a database; means for obtaining an optimum driving condition of a laser system for minimizing laser treatment time by considering speed of drive of the laser system, time required for changing drives of the laser system, and time required for starting actual driving after generating a driving command in accordance with the positional and directional information stored in the database; and means for controlling the laser system in accordance with the optimum driving condition of the laser system, wherein a position to be scanned with the laser beam is controlled in accordance with the Computer Aided Design masks on the basis of a position of the marker. - View Dependent Claims (17, 18, 19, 20)
-
-
21. A laser treatment system comprising:
-
means for inputting information on Computer Aided Design masks for a formation of a thin film transistor including a silicon island, a contact hole, and a wiring metal over a substrate by a person; means for automatically extracting positional and directional information for irradiating a laser beam over the substrate provided with a marker in accordance with the information on the Computer Aided Design masks for the formation of thin film transistor; means for obtaining an optimum driving condition of a laser system for minimizing laser treatment time by considering speed of drive of the laser system and time required for changing drives of the laser system in accordance with the positional and directional information; and means for controlling the laser system in accordance with the optimum driving condition of the laser system, wherein a position to be scanned with the laser beam is controlled in accordance with the Computer Aided Design masks on the basis of a position of the marker. - View Dependent Claims (22, 23, 24, 25)
-
Specification