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Acoustic wave sensor with reduced condensation and recovery time

  • US 7,134,319 B2
  • Filed: 08/12/2004
  • Issued: 11/14/2006
  • Est. Priority Date: 08/12/2004
  • Status: Expired due to Fees
First Claim
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1. An acoustic wave sensor apparatus, comprising:

  • a plezoelectric substrate having a surface thereon;

    at least one interdigital transducer and a passivation layer formed upon said piezoelectric substrate;

    an absorbent material formed upon said passivation layer, wherein said at least one interdigital transducer responds to a plurality of acoustic waves propagating across said surface of said piezoelectric substrate, wherein said plurality of acoustic waves propagating across said surface of said piezoelectric substrate comprise multiple mode frequency outputs, such that a plurality of frequency modes thereof are optimized while all remaining frequency modes among said multiple mode frequency outputs are suppressed in order to generate particular data indicative of a monitored chemical species in vicinity of said piezoelectric substrate, said passivation layer and said at least one interdigital transducer.

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