Micromechanical rotational rate sensor
First Claim
1. A micromechanical rotational rate sensor, comprising:
- a first Coriolis mass element and a second Coriolis mass element situated over a surface of a substrate;
an activating device adapted to activate vibrations of the first and the second Coriolis mass elements along a first axis; and
a detecting device adapted to detect deflections of the first and the second Coriolis elements along a second axis in accordance with a correspondingly acting Coriolis force, wherein the second axis is perpendicular to the first axis, wherein the first and the second axes run parallel to the surface of the substrate, and wherein the detecting device includes a first detection mass device and a second detection mass device; and
wherein centers of gravity of the first and the second Coriolis mass elements and the first and the second detection mass devices coincide at a common mass center of gravity when the first and the second Coriolis mass elements and the first and the second detection mass devices are at rest.
0 Assignments
0 Petitions
Accused Products
Abstract
An exemplary embodiment of the present invention creates a micromechanical rotational rate sensor having a first Coriolis mass element and a second Coriolis mass element which may be situated over a surface of a substrate. An exemplary embodiment of a micromechanical rotational rate sensor may have an activating device by which the first Coriolis mass element and the second Coriolis mass element are able to have vibrations activated along a first axis. An exemplary embodiment of a micromechanical rotational rate sensor may have a detection device by which deflections of the first Coriolis mass elements and of the second Coriolis element are able to be detected along a second axis, which is perpendicular to the first axis, on the basis of a correspondingly acting Coriolis force. The first axis and second axis may run parallel to the surface of the substrate. The detecting device may have a first detection mass device and a second detection mass device. The centers of gravity of the first Coriolis mass element, the second Coriolis mass element, the first detection mass device and the second detection mass device may coincide at a common mass center of gravity when they are at rest.
-
Citations
15 Claims
-
1. A micromechanical rotational rate sensor, comprising:
-
a first Coriolis mass element and a second Coriolis mass element situated over a surface of a substrate; an activating device adapted to activate vibrations of the first and the second Coriolis mass elements along a first axis; and a detecting device adapted to detect deflections of the first and the second Coriolis elements along a second axis in accordance with a correspondingly acting Coriolis force, wherein the second axis is perpendicular to the first axis, wherein the first and the second axes run parallel to the surface of the substrate, and wherein the detecting device includes a first detection mass device and a second detection mass device; and wherein centers of gravity of the first and the second Coriolis mass elements and the first and the second detection mass devices coincide at a common mass center of gravity when the first and the second Coriolis mass elements and the first and the second detection mass devices are at rest. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
-
Specification