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Apparatus and method for anchoring micromachined structures

  • US 7,134,340 B2
  • Filed: 05/16/2005
  • Issued: 11/14/2006
  • Est. Priority Date: 07/19/2002
  • Status: Expired due to Term
First Claim
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1. A micromachined apparatus comprising:

  • a substrate; and

    a succession of individual elongated fixed finger structures anchored to the substrate, wherein each pair of adjacent elongated fixed finger structures is interdigitated with at least one movable finger structure, and wherein each of the elongated fixed finger structures is anchored to the substrate using one of an elongated anchor and multiple anchors.

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