Capacitance temperature sensor and temperature measuring device
First Claim
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1. A capacitance temperature sensor in which temperature is measured by detecting capacitance of a parallel plate condenser which comprises a dielectric material comprising strontium titanate single crystal in which 30% by weight or less of oxygen-16 is substituted with oxygen-18 isotope.
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Abstract
A capacitance temperature sensor in which temperature is measured by detecting capacitance of a parallel plate condenser which comprises a dielectric material comprising strontium titanate single crystal in which (a) 30% by weight or less of oxygen-16 or (b) 30% by weight to 50% by weight of oxygen-16 is substituted with oxygen-18 isotope.
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8 Claims
- 1. A capacitance temperature sensor in which temperature is measured by detecting capacitance of a parallel plate condenser which comprises a dielectric material comprising strontium titanate single crystal in which 30% by weight or less of oxygen-16 is substituted with oxygen-18 isotope.
- 2. A capacitance temperature sensor in which temperature is measured by detecting capacitance of a parallel plate condenser which comprises a dielectric material comprising strontium titanate single crystal in which 30% by weight to 50% by weight of oxygen-16 is substituted with oxygen-18 isotope.
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