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Capacitance temperature sensor and temperature measuring device

  • US 7,134,785 B2
  • Filed: 04/26/2005
  • Issued: 11/14/2006
  • Est. Priority Date: 04/27/2004
  • Status: Active Grant
First Claim
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1. A capacitance temperature sensor in which temperature is measured by detecting capacitance of a parallel plate condenser which comprises a dielectric material comprising strontium titanate single crystal in which 30% by weight or less of oxygen-16 is substituted with oxygen-18 isotope.

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