Method and system for integrated circuit backside navigation
First Claim
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1. A method of backside navigation comprising:
- milling a fine fiducial opening through a substrate with a charged particle beam; and
endpointing said fine fiducial opening upon delineating a trench isolation structure to create a registration marker to register an image of said trench isolation structure to a reference image.
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Abstract
The backside navigation method of the present invention includes milling a fiducial opening through the substrate of an integrated circuit. The milling process is stopped when the fiducial opening reaches the bottom of a trench isolation structure. The trench isolation structure delineated by the fiducial opening may be imaged and registered to a computer aided design layout image to achieve sub-micron navigation resolution.
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Citations
21 Claims
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1. A method of backside navigation comprising:
milling a fine fiducial opening through a substrate with a charged particle beam; and
endpointing said fine fiducial opening upon delineating a trench isolation structure to create a registration marker to register an image of said trench isolation structure to a reference image.- View Dependent Claims (2, 3, 4, 5)
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6. A method of backside navigation comprising:
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forming a fiducial opening, wherein a portion of a trench isolation structure is delineated;
acquiring an image of said delineated portion of said trench isolation structure;
registering said acquired image and a reference image; andgenerating position control information as a function of said registered acquired image and said reference image. - View Dependent Claims (7, 8, 9, 10, 11, 12, 13, 14)
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15. A method of forming a backside marker in an integrated circuit comprising:
- forming a coarse fiducial opening;
forming a fine fiducial opening in said coarse fiducial opening, wherein said fine fiducial opening delineates a portion of a trench isolation structure. - View Dependent Claims (16, 17, 18, 19, 20, 21)
- forming a coarse fiducial opening;
Specification