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Laser device and exposure method

  • US 7,136,402 B1
  • Filed: 09/08/2000
  • Issued: 11/14/2006
  • Est. Priority Date: 09/10/1999
  • Status: Expired due to Term
First Claim
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1. A laser device which generates ultraviolet light, comprising:

  • a laser light generator which generates mono-wavelength laser light in a wavelength range of from an infrared region to a visible region;

    an optical amplifier including an optical fiber amplifier which amplifies the laser light generated by the laser light generator; and

    a wavelength converter which includes a plurality of nonlinear optical crystals which perform wavelength conversion of the laser light amplified by the optical amplifier, and a plurality of temperature controllers which perform temperature control of the plurality of the nonlinear optical crystals to tune phase matching angles at the time of wavelength conversion, wherein the wavelength converter generates ultraviolet light.

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