×

Active cantilever for nanomachining and metrology

  • US 7,137,292 B1
  • Filed: 03/31/2005
  • Issued: 11/21/2006
  • Est. Priority Date: 03/08/2001
  • Status: Expired due to Fees
First Claim
Patent Images

1. A probe for carrying a tip having sub-micron dimensions comprising:

  • a body member;

    a cantilever having a fixed end attached to the body member;

    an actuation member connected to the body member and extending toward the cantilever;

    a bearing segment disposed along a portion of the cantilever, the bearing segment having a tip holder; and

    a drive track having a traction surface, the drive track flexibly connected to the cantilever and disposed in opposed relation to the tip holder, wherein the traction surface is in facing relation to the tip holder,the drive track having an end region connected to the actuation member,wherein first dimensional changes of the actuation member effect linear motion of the drive track along a long axis thereof,wherein second dimensional changes of the actuation member effect lateral motion to position the drive track in a first position wherein the traction surface is positioned so as to be out of contact with a tip received in the tip holder or in a second configuration wherein the traction surface is positioned so as to be in contact relation with a tip received in the tip holder,wherein combinations of the first dimensional changes and the second dimensional changes cooperate to produce motion of a tip device received in the tip holder.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×