Active cantilever for nanomachining and metrology

• US 7,137,292 B1
• Filed: 03/31/2005
• Issued: 11/21/2006
• Est. Priority Date: 03/08/2001
• Status: Expired due to Fees

• Current Assignee: Terraspan LLC
• Original Assignee: General Nanotechnology LLC
• Inventors: Kley, Victor B.
• Primary Examiner(s): NOLAND, THOMAS
• Application Number:
  US11/097,677
• Time in Patent Office: 600 Days
• Field of Search: 731/05, 738/665, 977/732, 977/860, 977872-873, 977/953
• US Class Current: 73/105
• CPC Class Codes: B24B 37/11 Lapping tools
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01Q 70/02 Probe holders
• CPC Class Codes: Y10S 977/86 Scanning probe structure
• CPC Class Codes: Y10S 977/872 Positioner
• CPC Class Codes: Y10S 977/873 Tip holder

Abstract

A probe assembly suited for use in a scanning probe microscope (SPM) system includes a cantilever have an attachment to a main body portion. A suitable tip disposed at the free end of the cantilever provides various functions. According to various embodiments of the invention, the tip and cantilever members have active components to produce kinetic action, thus facilitating the utility of the probe assembly in various SPM applications.

Claims

1. A probe for carrying a tip having sub-micron dimensions comprising:

a body member;

a cantilever having a fixed end attached to the body member;

an actuation member connected to the body member and extending toward the cantilever;

a bearing segment disposed along a portion of the cantilever, the bearing segment having a tip holder; and

a drive track having a traction surface, the drive track flexibly connected to the cantilever and disposed in opposed relation to the tip holder, wherein the traction surface is in facing relation to the tip holder,

the drive track having an end region connected to the actuation member,

wherein first dimensional changes of the actuation member effect linear motion of the drive track along a long axis thereof,

wherein second dimensional changes of the actuation member effect lateral motion to position the drive track in a first position wherein the traction surface is positioned so as to be out of contact with a tip received in the tip holder or in a second configuration wherein the traction surface is positioned so as to be in contact relation with a tip received in the tip holder,

wherein combinations of the first dimensional changes and the second dimensional changes cooperate to produce motion of a tip device received in the tip holder.

2. The probe of claim 1 wherein the tip holder has an arcuate bearing surface for receiving a tip having a cylindrical shaft and the combination of the first and the second dimensional changes cooperate to produce rotational motion.

3. The probe of claim 1 wherein the bearing segment is integral with the cantilever.

4. The probe of claim 1 wherein the traction surface comprises a plurality of gear teeth so as to engage corresponding gear teeth formed on a tip device.

5. The probe of claim 1 wherein the traction surface is a friction surface so as to provide frictional contact with a tip device received in the tip holder.

6. A scanning microscope system comprising a controller unit, a translation unit coupled to received translation signals from the controller unit, and a probe as claimed in claim 1 coupled to the translation unit, the translation unit operable to effect incremental motion in 3-dimensional space in increments of about one micron or less.