Method for manufacturing small crystal resonator
First Claim
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1. A method of manufacturing a crystal resonator using a crystal substrate, comprising the steps of:
- forming a crystal resonator area and a side electrode shielding/formation block on said crystal substrate through etching by leaving a partial connection section, both said crystal resonator area and said side electrode shielding/formation block being separated from each other by a gap; and
applying vapor deposition through said gap diagonally toward a side of said crystal substrate, whereby a film is formed on said side in a first area but film formation is prevented in a second area of said side due to the existence of said side electrode shielding/formation block, and thereby forming an electrode film bisected in the thickness direction of said substrate on said side.
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Abstract
A crystal resonator area and side electrode shielding/formation blocks thereabout are formed on a crystal substrate through etching with both areas kept separate from each other with a gap. Vapor deposition is diagonally applied through this gap toward the side of the crystal substrate to thereby form an electrode film divided into two portions in the thickness direction of the substrate on the side.
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Citations
9 Claims
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1. A method of manufacturing a crystal resonator using a crystal substrate, comprising the steps of:
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forming a crystal resonator area and a side electrode shielding/formation block on said crystal substrate through etching by leaving a partial connection section, both said crystal resonator area and said side electrode shielding/formation block being separated from each other by a gap; and applying vapor deposition through said gap diagonally toward a side of said crystal substrate, whereby a film is formed on said side in a first area but film formation is prevented in a second area of said side due to the existence of said side electrode shielding/formation block, and thereby forming an electrode film bisected in the thickness direction of said substrate on said side. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification