Micro-structure gap control technology and structure formed therefrom

• US 7,139,110 B2
• Filed: 06/09/2004
• Issued: 11/21/2006
• Est. Priority Date: 06/09/2003
• Status: Expired due to Fees

• Current Assignee: Walsin Lihwa Corporation
• Original Assignee: Walsin Lihwa Corporation
• Inventors: Huang, Long-Sun, Chen, Yang-Lin
• Primary Examiner(s): Dang, Hung
• Assistant Examiner(s): TRA, TUYEN Q
• Application Number:
  US10/864,182
• Publication Number:
  US 20050035419A1
• Time in Patent Office: 895 Days
• Field of Search: 359/290, 359/291, 359/292, 359/245, 359/248, 359/224, 359/223, 359/260
• US Class Current: 359/290
• CPC Class Codes: G02B 26/0808 by means of one or more diffracting elements
• CPC Class Codes: G02B 5/1857 using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams

Abstract

A grating manufactured by a micro-structure gap control technique is provided in this invention. The grating includes a first structural part, a second structural part and a substrate. The first structural part includes a first micro-structure and a concavity, the second structural part includes a second micro-structure and an island structure located within the concavity, wherein a gap exists between the inland structure and the concavity. Further, the substrate is bonded to the first structural part and the second structural part for supporting the first structural part and the second structural part.

Claims

1. A structure manufactured by a micro-structure gap control technique, comprising:

a first structural part comprising a concavity and a first micro structure having a sounding opening;

a second structural part comprising a second micro-structure and an island structure located within said concavity, wherein a gap exists between said island structure and said concavity; and

a substrate bonded to said first structural part and said second structural part for supporting said first structural part and said second structural part.

2. The structure as claimed in claim 1, wherein said first micro-structure and said second micro-structure are micro-electromechanical system (MEMS) micro-structures.

3. The structure as claimed in claim 2, wherein said first micro-structure and said second micro-structure comprise a micro-control gap.

4. The structure as claimed in claim 1, wherein said first micro-structure and said second micro-structure are manufactured by an anisotropic wet etching method.

5. The structure as claimed in claim 4, wherein an etching solution used in said anisotropic wet etching method is a potassium hydroxide solution.

6. The structure as claimed in claim 1, wherein said first micro-structure further comprises a first electrode layer, a first etch resist, and a suspending structure.

7. The structure as claimed in claim 6, wherein said second micro-structure further comprises a second electrode layer, and a second etch resist.

8. The structure as claimed in claim 7, wherein each of said first electrode layer and said second electrode layer comprises an adhesive layer and a metal.

9. The structure as claimed in claim 7, wherein each of said first etch resist and said second resist comprises a silicon dioxide layer and a silicon nitride layer.

10. The structure as claimed in claim 1, wherein said first structural part is connected to said second structural part by an anodic bonding.

11. The structure as claimed in claim 1, wherein said first structural part and said second structural part are array structures.

12. The structure as claimed in claim 1, wherein said island structure is one selected from a group consisting of a square stereoisland structure, a multilateral stereoisland structure, and a spherical stereoisland structure.

13. The structure as claimed in claim 1, wherein said concavity is one selected from a group consisting of a square concavity, a multilateral concavity, and a spherical concavity.