MEMS teeter-totter accelerometer having reduced non-linearty

• US 7,140,250 B2
• Filed: 06/06/2005
• Issued: 11/28/2006
• Est. Priority Date: 02/18/2005
• Status: Active Grant

• Current Assignee: Honeywell International Inc.
• Original Assignee: Honeywell International Inc.
• Inventors: Malametz, David L., Leonardson, Ronald B.
• Primary Examiner(s): KWOK, HELEN C
• Application Number:
  US11/145,909
• Publication Number:
  US 20060185433A1
• Time in Patent Office: 540 Days
• Field of Search: 735/041.2, 735/041.4, 735/143.2, 735/142.9, 735/143.6, 735/143.8, 735/040.2, 735/040.4
• US Class Current: 73/504.14
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 2015/0831 the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration

Abstract

An apparatus and method for force sensing device having a pendulous mechanism proof mass formed in a silicon semiconductor substrate and structured for rotation about an intermediate rotational axis, the proof mass being substantially rectangular in shape with opposing first and second lateral peripheral edges and opposing first and second endwise peripheral edges. A plurality of capacitor comb teeth are formed symmetrically along the opposing first and second endwise peripheral proof mass edges and along the opposing first and second lateral peripheral proof mass edges adjacent to the first and second endwise peripheral edges, and one or more mass reduction apertures are formed in an interior portion of the proof mass on one side of the intermediate hinge axis.

Claims

1. A force sensing device, comprising:

a pendulous mechanism proof mass formed in a silicon semiconductor substrate, the proof mass being substantially rectangular in shape with opposing first and second lateral peripheral edges and opposing first and second endwise peripheral edges and being structured for rotation about a rotational axis positioned substantially intermediate of the first and second lateral peripheral edges between the opposing first and second endwise peripheral edges;

a plurality of capacitor comb teeth formed symmetrically along the opposing first and second endwise peripheral edges of the proof mass and along the opposing first and second lateral peripheral proof mass edges adjacent to the first and second endwise peripheral edges; and

one or more mass reduction apertures formed in an interior portion of the proof mass on one side of the rotational axis.

2. The device of claim 1 wherein the plurality of capacitor comb teeth formed along the opposing first and second lateral peripheral proof mass edges are limited to symmetrical zones adjacent to the opposing first and second endwise peripheral proof mass edges and spaced away from the rotational axis.

3. The device of claim 2, further comprising opposing first and second symmetrical zones along the opposing first and second lateral peripheral proof mass edges and adjacent to the rotational axis, the first and second symmetrical zones being free of the capacitor comb teeth.

4. The device of claim 2 wherein the proof mass is substantially symmetrical in length and width relative to the rotational axis.

5. The device of claim 4 wherein a center of mass of the proof mass is offset from the rotational axis on an opposite side of the proof mass from the one or more mass reduction apertures.

6. The device of claim 5 wherein the one or more mass reduction apertures further comprises a single mass reduction aperture.

7. The inertial device of claim 1, further comprising:

a frame substantially surrounding the proof mass;

a plurality of capacitor comb teeth formed symmetrically along opposing first and second endwise interior peripheral frame edges and positioned to form a plurality of endwise capacitors with the plurality of capacitor comb teeth formed along the opposing first and second endwise peripheral proof mass edges; and

a plurality of capacitor comb teeth formed symmetrically along opposing first and second lateral peripheral interior frame edges adjacent to the first and second endwise interior peripheral frame edges and positioned to form a plurality of lateral capacitors with the plurality of capacitor comb teeth formed symmetrically along the opposing first and second lateral peripheral proof mass edges.

8. The device of claim 7, further comprising one or more flexures formed between the proof mass and the frame, the rotational axis being offset away from an axis of the one or more flexures and toward the center of mass of the proof mass.

9. A force sensing device comprising:

a frame;

a proof mass surrounded by the frame and suspended therefrom for out-of-plane rotation on a pair of torsional flexures positioned substantially intermediate of a length dimension of the proof mass; and

first and second pluralities of capacitors formed between a first plurality of comb teeth formed on exterior peripheral edges of the proof mass and a cooperating second plurality of comb teeth formed on interior peripheral edges of the frame, the first and second pluralities of capacitors being spaced symmetrically about a center of rotation of the proof mass.

10. The device of claim 9 wherein the first plurality of capacitors further comprises a first plurality of comb teeth positioned within lateral zones along opposing first and second lateral exterior peripheral edges of the proof mass adjacent to first and second endwise exterior peripheral edges thereof operable in cooperation with a first plurality of comb teeth positioned within lateral zones along opposing first and second lateral interior peripheral frame edges adjacent to first and second endwise interior peripheral frame edges;

and

wherein the second plurality of capacitors further comprises a second plurality of comb teeth positioned within endwise zones along the opposing first and second endwise exterior peripheral edges of the proof mass operable in cooperation with a second plurality of comb teeth positioned within endwise zones along the opposing first and second endwise interior peripheral frame edges.

11. The device of claim 10 wherein the first plurality of comb teeth positioned within the lateral zones are limited to portions of the first and second lateral exterior peripheral edges of the proof mass that are spaced away from the flexures;

and

wherein lateral zones along opposing first and second lateral exterior peripheral edges of the proof mass adjacent to the flexures are free of the comb teeth.

12. The device of claim 11 wherein the lateral zones along opposing first and second exterior lateral peripheral edges of the proof mass adjacent to the flexures extend substantially one half or more of a distance between the flexures and the respective opposing first and second endwise exterior peripheral edges of the proof mass.

13. The device of claim 9, further comprising one or more mass reduction apertures formed in an interior portion of the proof mass on one side of the flexures.

14. The device of claim 13 wherein the center of rotation of the proof mass is offset from a hinge axis formed by the flexures suspending the proof mass from the frame;

and

wherein the proof mass rotates about a rotational axis that is offset from the hinge axis formed by the flexures and passes through the center of rotation of the proof mass.

15. A method for fabrication of a capacitive comb tooth sensor having substantially symmetrical differential signal detection, the method comprising:

in a substrate formed of semiconductor silicon material and having first and second opposing substantially parallel spaced-apart planar surfaces, forming a substantially rectangular pendulous mechanism proof mass structure having a plurality of capacitive comb tooth sensors spaced symmetrically about a computed center of rotation thereof, with first and second endwise groupings of the comb tooth sensors being positioned along each of respective opposing first and second end portions of the proof mass distal from the center of rotation, and first and second lateral groupings of the comb tooth sensors being positioned along each of respective extreme side portions of the proof mass adjacent to each of the opposing end portions and spaced away from the center of rotation with central zones of each of the side portions being devoid of the comb tooth sensors;

in the substrate, forming a frame structure having a substantially rectangular aperture surrounding the proof mass and spaced therefrom;

in the substrate, forming one or more flexures between the proof mass and the frame positioned substantially intermediate of a length dimension of the proof mass, the one or more flexures being structured for out-of-plane rotation of the proof mass relative to the frame about a rotational axis that passes through the computed center of rotation; and

in the substrate, forming a plurality of comb teeth in first and second endwise groupings along respective first and second endwise interior peripheral edges of the frame and being positioned to cooperate with respective first and second endwise groupings of the comb tooth sensors of the proof mass, and first and second lateral groupings of comb teeth along respective first and second opposing interior peripheral lateral edges of the frame and being positioned to cooperate with respective first and second lateral groupings of the comb tooth sensors of the proof mass.

16. The method of claim 15 wherein the forming a substantially rectangular pendulous mechanism proof mass structure further comprises forming one or more mass reduction apertures therein positioned on one side of the one or more flexures.

17. The method of claim 16 wherein the forming a plurality of comb teeth between the proof mass and the frame and positioned substantially symmetrically about the rotational axis further comprises:

along a first end edge of the proof mass positioned on a first side of the rotational axis and spaced away therefrom, forming a first endwise grouping of the comb tooth sensors;

along a second end edge of the proof mass positioned on an opposite second side of the rotational axis and spaced away therefrom, forming a second endwise grouping of the comb tooth sensors that is symmetrical with the first endwise grouping of the comb tooth sensors;

on a first portion of the proof mass positioned on the first side of the rotational axis, forming first and second lateral groupings of the comb tooth sensors along respective first and second opposing side edges of the proof mass and spaced away from the rotational axis with the first and second lateral groupings being substantially symmetric about the computed center of rotation;

on a second portion of the proof mass positioned on the second side of the rotational axis opposite from the first portion of the proof mass, forming third and fourth lateral groupings of the comb tooth sensors along respective first and second opposing side edges of the proof mass that are spaced away from the rotational axis with the third and fourth lateral groupings of the comb tooth sensors being substantially symmetric about the computed center of rotation and being symmetric about the rotational axis with respective first and second lateral groupings of the comb tooth sensors on the first side of the rotational axis.

18. The method of claim 17 wherein the rotational axis is offset from a hinge axis that passes through the one or more flexures, the rotational axis being offset in a direction that is opposite from the one or more mass reduction apertures.

19. The method of claim 18 wherein each of the first and second endwise groupings of the comb tooth sensors further comprises a pair of endwise groupings of the comb tooth sensors that are spaced apart substantially symmetrically on opposite sides of a lengthwise centerline of the proof mass that passes through the computed center of rotation.

20. The method of claim 15, further comprising determining by computer modeling the computed center of rotation and the rotational axis for the substantially rectangular pendulous mechanism proof mass structure having multiple capacitive comb tooth sensors and that is suspended for rotation on one or more torsional flexures positioned substantially intermediate of the length dimension of the proof mass.