Acoustic wave flow sensor

• US 7,140,261 B2
• Filed: 04/27/2005
• Issued: 11/28/2006
• Est. Priority Date: 04/27/2005
• Status: Expired due to Fees

• Current Assignee: Honeywell International Inc.
• Original Assignee: Honeywell International Inc.
• Inventors: Rahman, Aziz, Liu, James Z T
• Primary Examiner(s): THOMPSON, JEWEL VERGIE
• Application Number:
  US11/116,496
• Publication Number:
  US 20060243064A1
• Time in Patent Office: 580 Days
• Field of Search: 732/041.1, 732/042.3, 732/041.5, 732/042.6, 735/87, 737/02
• US Class Current: 73/861.25
• CPC Class Codes: G01F 1/662 Constructional details

Abstract

An acoustic wave flow sensor is disclosed, which includes a sensor substrate and an acoustic wave diaphragm etched upon the sensor substrate, wherein mechanical stress or strain is concentrated in the acoustic wave diaphragm. One or more interdigital transducers can be configured upon the acoustic wave diaphragm, wherein the sensor substrate, the acoustic wave diaphragm and the interdigital transducer(s) form an acoustic wave flow sensor, such that when the interdigital transducer and the acoustic wave diaphragm are exposed to a fluid in flow, the fluid in flow causes the acoustic wave diaphragm to experience a change in the mechanical stress or strain resulting in a detectable frequency and/or phase change in order to provide an indication of fluid flow.

Claims

1. An acoustic wave flow sensor, comprising;

a sensor substrate;

an acoustic wave diaphragm etched upon said sensor substrate, wherein a mechanical stress or strain is concentrated in said acoustic wave diaphragm; and

at least one interdigital transducer configured upon said acoustic wave diaphragm, wherein said sensor substrate, said acoustic wave diaphragm and said at least one interdigital transducer form an acoustic wave flow sensor, such that when said at least one interdigital transducer and said acoustic wave diaphragm are exposed to a fluid in flow, wherein said fluid flow is parallel to said acoustic wave diaphragm, said fluid in flow causes said acoustic wave diaphragm to experience a pulling force, wherein said pulling force pulls said acoustic wave diaphragm inward towards said fluid in flow creating a change in said mechanical stress or strain resulting in a detectable frequency change in order to provide an indication of said fluid in flow.

2. The sensor of claim 1 wherein said fluid in flow causes said acoustic wave diaphragm to experience a change in said mechanical stress or strain resulting in a detectable phase change in order to provide an indication of said fluid in flow.

3. The sensor of claim 1 wherein said sensor substrate comprises a piezoelectric material.

4. The sensor of claim 3 wherein said piezoelectric material comprises at least one of the following types of materials:

quartz, lithium niobate (LiNbO₃), lithium tantalite (LiTaO₃), Li₂B₄O₇, GaPO₄, langasite (La₃Ga₅SiO₁₄), ZnO, and an epitaxially grown nitride.

5. The sensor of claim 1 wherein said at least one interdigital transducer is formed from a material comprising at least one of the following types of materials:

a metal group material, an alloy, or a metal-nonmetal compounds.

6. The sensor of claim 1 further comprising an antenna configured upon said acoustic wave diaphragm in association with said at least one interdigital transducer.

7. The sensor of claim 6 further comprising an interrogator unit equipped with an antenna for transmitting interrogation signals to said acoustic wave flow sensor.

8. The sensor of claim 1 wherein said acoustic wave diaphragm comprises a surface acoustic wave (SAW) device.

9. The sensor of claim 8 wherein said SAW devices comprises an etched cavity parallel to said fluid in flow.

10. The sensor of claim 1 wherein said acoustic wave diaphragm comprises a bulk acoustic wave (BAW) device wherein said acoustic wave flow sensor is a surface acoustic wave (SAW), shear horizontal surface acoustic wave (SH-SAW), acoustic plate mode (APM), shear horizontal acoustic plate mode (SH-APM), surface transverse wave (STW) or flexural plate wave (FPW) device.

11. The sensor of claim 1 wherein said sensor substrate comprises a swept quartz substrate.

12. The sensor of claim 1 wherein said sensor substrate is configured form a double-polished SAW quartz wafer.

13. An acoustic wave flow sensor, comprising;

a sensor substrate comprising a piezoelectric material;

an acoustic wave diaphragm etched upon said sensor substrate, wherein a mechanical stress or strain is concentrated in said acoustic wave diaphragm; and

at least one interdigital transducer configured upon said acoustic wave diaphragm, wherein said sensor substrate, said acoustic wave diaphragm and said at least one interdigital transducer form an acoustic wave flow sensor, wherein when said at least one interdigital transducer and said acoustic wave diaphragm are exposed to a fluid in flow, wherein said acoustic wave diaphragm is parallel to said fluid in flow, said fluid in flow causes said acoustic wave diaphragm to experience a pulling force, wherein said pulling force pulls said acoustic wave diaphragm inward towards said fluid in flow creating a change in said mechanical stress or strain resulting in a detectable frequency or phase change in order to provide an indication of said fluid in flow.

14. The system of claim 13 wherein said acoustic wave flow sensor is adapted for use in a feedback loop of an oscillator in a wired implementation of said acoustic wave flowing sensing system.

15. The system of claim 13 wherein said acoustic wave flow sensor is utilized to detect temperature.

16. An acoustic wave flow sensing method, comprising;

providing a sensor substrate comprising a piezoelectric material;

etching an acoustic wave diaphragm upon said sensor substrate, wherein a mechanical stress or strain is concentrated in said acoustic wave diaphragm; and

configuring at least one interdigital transducer upon said acoustic wave diaphragm, wherein said sensor substrate, said acoustic wave diaphragm and said at least one interdigital transducer form an acoustic wave flow sensor,

exposing said at least one interdigital transducer and said acoustic wave diaphragm to a fluid in flow, wherein said acoustic wave diaphragm is parallel to said fluid in flow, wherein said fluid in flow causes said acoustic wave diaphragm to experience a pulling force, wherein said pulling force pulls said acoustic wave diaphragm inward towards said fluid in flow creating a change in said mechanical stress or strain resulting in a detectable frequency change in order to provide an indication of said fluid in flow.

17. The method of claim 16 wherein said fluid in flow causes said acoustic wave diaphragm to experience a change in said mechanical stress or strain resulting in a detectable phase change in order to provide an indication of said fluid in flow.

18. The method of claim 16 further comprising configuring said sensor substrate to comprise a swept quartz substrate.

19. The method of claim 16 further comprising configuring said sensor has a textured surface facing the liquid.

20. The method of claim 16 said indication of said fluid in flow is based on a flow induced shear stress measurement.

21. The method of claim 16 wherein the said acoustic wave sensor comprises an acoustic wave temperature sensor.