Micro-electromechanical fluid ejection device having actuator mechanisms located in chamber roof structure
First Claim
1. A micro-electromechanical fluid ejection device that comprisesa substrate that defines a plurality of fluid supply channels and a plurality of chambers in fluid communication with respective fluid supply channels;
- a drive circuitry layer that is positioned on the substrate;
a plurality of roof structures that are connected to the drive circuitry layer to cover respective fluid chambers, each roof structure defining a fluid ejection port; and
at least one actuator that is positioned in each roof structure, each actuator being electrically connected to the drive circuitry layer to be displaceable into and out of its respective chamber to eject a drop of fluid from the fluid ejection port,wherein at least some of the roof structures comprise a fixed portion in contact with the fluid that remains stationary during fluid ejection, each fixed portion comprising a rim that defines the fluid ejection port and support arms that extend from the drive circuitry layer to support the rim above the respective fluid inlet channel, the actuator arms being interposed between consecutive support arms.
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0 Petitions
Accused Products
Abstract
A micro-electromechanical fluid ejection device includes a substrate that defines a plurality of fluid supply channels and a plurality of chambers in fluid communication with respective fluid supply channels. A drive circuitry layer is positioned on the substrate. A plurality of roof structures is connected to the drive circuitry layer to cover respective fluid chambers. Each roof structure defines a fluid ejection port. At least one actuator is positioned in each roof structure. Each actuator is electrically connected to the drive circuitry layer to be displaceable into and out of its respective chamber to eject a drop of fluid from the fluid ejection port. At least some of the roof structures have a fixed portion that remains stationary during fluid ejection.
21 Citations
10 Claims
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1. A micro-electromechanical fluid ejection device that comprises
a substrate that defines a plurality of fluid supply channels and a plurality of chambers in fluid communication with respective fluid supply channels; -
a drive circuitry layer that is positioned on the substrate; a plurality of roof structures that are connected to the drive circuitry layer to cover respective fluid chambers, each roof structure defining a fluid ejection port; and at least one actuator that is positioned in each roof structure, each actuator being electrically connected to the drive circuitry layer to be displaceable into and out of its respective chamber to eject a drop of fluid from the fluid ejection port, wherein at least some of the roof structures comprise a fixed portion in contact with the fluid that remains stationary during fluid ejection, each fixed portion comprising a rim that defines the fluid ejection port and support arms that extend from the drive circuitry layer to support the rim above the respective fluid inlet channel, the actuator arms being interposed between consecutive support arms. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification