Integrated high vacuum pumping system

• US 7,140,847 B2
• Filed: 08/11/2004
• Issued: 11/28/2006
• Est. Priority Date: 08/11/2004
• Status: Active Grant

• Current Assignee: Edwards Vacuum, LLC (Atlas Copco AB)
• Original Assignee: BOC Group Pty Limited (Linde Plc)
• Inventors: Enomoto, Yoshihiro, Boger, Michael S., Bailey, Christopher M., Murphy, Daimhin Paul
• Primary Examiner(s): Rodriguez, William H.
• Application Number:
  US10/916,081
• Publication Number:
  US 20060034715A1
• Time in Patent Office: 839 Days
• Field of Search: 417/423.4, 417/423.14, 417/440, 417/296
• US Class Current: 417/296
• CPC Class Codes: F04B 37/14 to obtain high vacuum
• CPC Class Codes: F04B 53/06 Venting
• CPC Class Codes: F04D 19/042 Turbomolecular vacuum pumps
• CPC Class Codes: F04D 27/0269 by changing flow path between different stages or between a plurality of compressors; load distribution between compressors

Abstract

The present invention relates to the integration of a TMP with the associated bypass line and valves so that a single sub-assembly is created. The housing of the TMP is significantly modified to accommodate the associated equipment necessary for constructing a high-vacuum system.

Claims

1. An integrated vacuum pumping system for gas delivery comprising:

a housing with integral flange for connection to a process chamber;

a cavity within said housing, said cavity comprising a turbo-molecular pump;

an inlet valve integrated into the housing and moveably connected to the housing, said inlet valve located within said cavity at a position between the turbo-molecular pump and the process chamber;

a bypass line integrally located within the housing, said bypass line in valved communication with the cavity at a plurality of locations along the bypass line, with at least one location being located on either side of the inlet valve;

a bypass valve integrally located within the bypass line for regulating bypass flow between the cavity and the process chamber; and

an exhaust valve located integrally within the housing at a distance from the bypass valve and proximate to the cavity.

8. The apparatus of claim 1, wherein the inlet valve is selected from the group consisting of a gate valve, a throttle valve, and a combination gate/throttle valve.

2. An apparatus for delivering gas comprising:

a housing with integral flange for connection to a process chamber;

a cavity integrated within the housing, said cavity comprising a turbo-molecular pump;

an inlet valve integrated within the housing and moveably connected to the housing, said inlet valve located within said cavity at a position between the turbo-molecular pump and the process chamber;

a bypass line integrally located within the housing, said bypass line in valved communication with the cavity at a plurality of locations along the bypass line, with at least one location being located on either side of the inlet valve;

a bypass valve located within the bypass line for regulating bypass flow within said bypass line between the cavity and the process chamber; and

an exhaust valve for regulating flow from the cavity to the bypass line, said exhaust valve located proximate to said bypass valve.

3. The apparatus of claim 2, wherein the bypass valve and exhaust valve are combined into a three-way valve.

4. The apparatus of claim 2, wherein the exhaust valve is attached to the turbo-molecular pump outlet.

5. The apparatus of claim 2, wherein the housing is connected to the base of the turbo-molecular pump.

6. The apparatus of claim 2, wherein the housing and the valves are in thermal contact with each other.

7. The apparatus of claim 2, wherein the bypass line is a milling within the housing.

9. The apparatus of claim 2, wherein the housing, the inlet valve, bypass valve, exhaust valve and by pass line are maintained at substantially similar temperatures during operation.

10. The apparatus of claim 2, wherein the housing is dimensioned and constructed to contain fractured segments of the turbo-molecular pump in the event of pump failure.

11. A method for delivering gas comprising the steps of:

directing a flow from a source to an apparatus for delivering gas, said apparatus comprising;

a housing with integral flange for connection to a process chamber;

a cavity within said housing, said cavity comprising a turbo-molecular pump;

an inlet valve integrated into the housing and moveably connected to the housing, said inlet valve located within said cavity at a position between the turbo-molecular pump and the process chamber;

a bypass line integrally located within the housing, said bypass line in valved communication with the cavity at a plurality of locations along the bypass line, with at least one location being located on either side of the inlet valve;

a bypass valve located within the bypass line for regulating bypass flow between the cavity and the process chamber;

an exhaust valve located at a distance from the bypass valve and proximate to the cavity;

conditioning the flow within the cavity; and

delivering the flow from the cavity.

12. A method for delivering gas comprising the steps of:

directing a flow from a source to an apparatus for delivering gas, said apparatus comprising;

a housing with integral flange for connection to a process chamber;

a cavity within said housing, said cavity comprising a turbo-molecular pump;

an inlet valve integrated into the housing and moveably connected to the housing, said inlet valve located within said cavity at a position between the turbo-molecular pump and the process chamber;

a bypass line integrally located within the housing, said bypass line in valved communication with the cavity at a plurality of locations along the bypass line, with at least one location being located on either side of the inlet valve;

a bypass valve located within the bypass line for regulating bypass flow within said bypass line between the cavity and the process chamber; and

an exhaust valve for regulating flow from the cavity to the bypass line, said exhaust valve located proximate to said bypass valve;

conditioning the flow within the cavity; and

delivering the flow from the cavity.