Actuator device

• US 7,141,915 B2
• Filed: 07/22/2004
• Issued: 11/28/2006
• Est. Priority Date: 07/22/2003
• Status: Expired due to Fees

• Current Assignee: NGK Insulators Limited
• Original Assignee: NGK Insulators Limited
• Inventors: Takeuchi, Yukihisa, Kimura, Koji, Nanataki, Tsutomu, Shimogawa, Natsumi, Akao, Takayoshi
• Primary Examiner(s): Budd, Mark
• Application Number:
  US10/896,769
• Publication Number:
  US 20050082946A1
• Time in Patent Office: 859 Days
• Field of Search: 310/324, 310/328, 310330-332, 310/366
• US Class Current: 310/328
• CPC Class Codes: B81B 2201/032 Bimorph and unimorph actuators, e.g. piezo and thermo
• CPC Class Codes: B81B 3/0018 Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 26/0858 the reflecting means being moved or deformed by piezoelectric means
• CPC Class Codes: H04R 17/005 using a piezoelectric polymer
• CPC Class Codes: H04R 2201/003 Mems transducers or their use of the electrostatic type H04R19/005
• CPC Class Codes: H10N 30/2047 Membrane type
• CPC Class Codes: H10N 30/874 embedded within piezoelectric or electrostrictive material, e.g. via connections

Abstract

An actuator device has a drive section including a plurality of actuators arranged in a plane on a substrate, and a single first plate member to which drive forces from the actuators of the drive section are transmitted. A plurality of spacers are disposed between the first plate member and the substrate, forming m cells. Each of the actuators has a cavity, a vibrating section and a fixed section formed on the substrate. The rigidity of the first plate member is greater than the rigidity of the vibrating section of the actuator.

Claims

1. An actuator device comprising:

a plurality of actuators arranged in a plane; and

a plate member to which drive forces from said actuators are transmitted and to which said actuators are connected,

wherein each of said actuators has a vibrating section and a fixed section and said actuators jointly move in a same direction.

2. An actuator device according to claim 1, wherein the rigidity of said plate member is greater than the rigidity of said vibrating section.

3. An actuator device according to claim 2, wherein said plate member has concavities and convexities.

4. An actuator device according to claim 3, wherein said actuators and said plate member are connected to each other by displacement transmitters, and said actuators have portions connected to the displacement transmitter and having a width smaller than a width of said vibrating section.

5. An actuator device according to claim 3, wherein said actuators and said plate member are connected to each other by displacement transmitters, and said plate member has portions connected to the displacement transmitter and having a width smaller than a width of said vibrating section.

6. An actuator device according to claim 1, wherein said vibrating sections are of a shape which is convex toward said plate member or concave toward said plate member.

7. An actuator device according to claim 6, wherein said vibrating sections are of an arch shape or a wavy shape.

8. An actuator device according to claim 1, further comprising:

a second plate member;

said second plate member having a plate surface facing a plate surface of said plate member.

9. An actuator device according to claim 8, wherein said second plate member comprises an optical waveguide plate into which light from a light source is introduced, and picture element assemblies are disposed on a surface of said plate member which faces said optical waveguide plate, wherein said actuator device serves as a display device for controlling light leaking from said optical waveguide plate with said picture element assemblies brought into and out of contact with said optical waveguide plate.

10. An actuator device according to claim 8, wherein said second plate member serves as a fixed electrode of a variable capacitor or the fixed electrode of said variable capacitor is disposed on said second plate member, and said plate member serves as a movable electrode of said variable capacitor or the movable electrode of said variable capacitor is disposed on said plate member.

11. An actuator device according to claim 8, wherein said second plate member comprises a transparent plate, and said plate member has a light reflecting surface in a region facing said second plate member.

12. An actuator device comprising:

a plurality of cells arranged in a plane;

each of said cells having a plurality of actuators arranged in a plane and a plate member to which drive forces from said actuators are transmitted;

each of said actuators having a vibrating section and a fixed section.

13. An actuator device according to claim 12, wherein the plate members of said cells are connected to each other.

14. An actuator device according to claim 12, wherein the plate members are connected to each other by joints, the rigidity of all of or part of said joints being smaller than the rigidity of said plate member.

15. An actuator device according to claim 14, further comprising:

gap forming members for forming gaps between said fixed sections and said plate members in said actuators;

said joints interconnecting said plate members and said fixed sections being joined to each other by said gap forming members.

16. An actuator device according to claim 12, further comprising:

a second plate member;

said second plate member having a plate surface facing a plate surface of said plate member.

17. An actuator device according to claim 16, wherein said second plate member comprises an optical waveguide plate into which light from a light source is introduced, and picture element assemblies are disposed on a surface of said plate member which faces said optical waveguide plate, wherein said actuator device serves as a display device for controlling light leaking from said optical waveguide plate with said picture element assemblies brought into and out of contact with said optical waveguide plate.

18. An actuator device according to claim 16, wherein said second plate member serves as a fixed electrode of a variable capacitor or the fixed electrode of said variable capacitor is disposed on said second plate member, and said plate member serves as a movable electrode of said variable capacitor or the movable electrode of said variable capacitor is disposed on said plate member.

19. An actuator device according to claim 16, wherein said second plate member comprises a transparent plate, and said plate member has a light reflecting surface in a region facing said second plate member.