Two-axis actuator with large stage
First Claim
1. A two-axis actuator comprising:
- a substrate;
an anchor unit fixed on the substrate, the anchor unit comprising approximately rectangular sides, including first sides facing each other and extending in a first direction, the first sides having a plurality of corresponding discrete portions;
first actuating parts disposed in regions adjacent to second sides of the anchor unit extending in a second direction orthogonal to the first direction, the first actuating parts moveable in the first direction;
second actuating parts disposed a predetermined distance above the substrate and formed between the first actuating parts in a region adjacent to the first sides of the anchor unit extending in the first direction, the second actuating parts moveable in the second direction;
a stage of a rectangular shape disposed on the second actuating parts so as to be movable in the second direction;
a third actuating part separately disposed between the stage and the anchor unit, wherein the third actuating part is disposed on the first actuating parts as one body to move the stage in the first direction by a movement of the first actuating parts;
first direction deformable springs disposed at inner faces of the anchor unit for enabling the first actuating parts to move in the first direction; and
second deformable springs disposed at inner faces of the third actuating part for enabling the second actuating parts to move in the second direction.
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Accused Products
Abstract
A two-axis actuator having a large stage area and including includes a substrate, an anchor unit having sides approximately in a rectangular shape, fixed on the substrate, a plurality of first actuating parts actuating in a first direction and separated from the substrate within regions of both sides of the anchor unit, a plurality of second actuating parts actuating in a second direction between the first actuating parts, a rectangular shaped stage that actuates in the second direction, disposed above the second actuating parts, a third actuating part formed on the first actuating part, and elevated at a predetermined distance from the stage and the anchor unit, first direction deformable springs that support the first actuating part in inner parts of the anchor unit, and second direction deformable springs formed to fix the second actuating part in an inner part of the third actuating part.
16 Citations
21 Claims
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1. A two-axis actuator comprising:
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a substrate; an anchor unit fixed on the substrate, the anchor unit comprising approximately rectangular sides, including first sides facing each other and extending in a first direction, the first sides having a plurality of corresponding discrete portions; first actuating parts disposed in regions adjacent to second sides of the anchor unit extending in a second direction orthogonal to the first direction, the first actuating parts moveable in the first direction; second actuating parts disposed a predetermined distance above the substrate and formed between the first actuating parts in a region adjacent to the first sides of the anchor unit extending in the first direction, the second actuating parts moveable in the second direction; a stage of a rectangular shape disposed on the second actuating parts so as to be movable in the second direction; a third actuating part separately disposed between the stage and the anchor unit, wherein the third actuating part is disposed on the first actuating parts as one body to move the stage in the first direction by a movement of the first actuating parts; first direction deformable springs disposed at inner faces of the anchor unit for enabling the first actuating parts to move in the first direction; and second deformable springs disposed at inner faces of the third actuating part for enabling the second actuating parts to move in the second direction. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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Specification