Microfluidic large scale integration

• US 7,143,785 B2
• Filed: 09/24/2003
• Issued: 12/05/2006
• Est. Priority Date: 09/25/2002
• Status: Active Grant

• Current Assignee: California Institute of Technology
• Original Assignee: California Institute of Technology
• Inventors: Quake, Stephen R., Thorsen, Todd A., Maerkl, Sebastian J., Bao, Xiaoyan, Studer, Vincent
• Primary Examiner(s): Hepperle, Stephen M.
• Application Number:
  US10/670,997
• Publication Number:
  US 20040112442A1
• Time in Patent Office: 1,168 Days
• Field of Search: 137/597, 251/28, 251/61.1
• US Class Current: 137/597
• CPC Class Codes: B01L 2300/0861 Configuration of multiple channels and/or chambers in a single devices
• CPC Class Codes: B01L 2300/0887 Laminated structure
• CPC Class Codes: B01L 2400/0481 squeezing of channels or chambers
• CPC Class Codes: B01L 2400/0655 pinch valves
• CPC Class Codes: B01L 3/5025 for parallel transport of multiple samples
• CPC Class Codes: B01L 3/50273 characterised by the means or forces applied to move the fluids micropumps F04B19/006, of the membrane type F04B43/043
• CPC Class Codes: B01L 3/502738 characterised by integrated valves microvalves F16K99/0001
• CPC Class Codes: B81B 2201/0214 Biosensors; Chemical sensors
• CPC Class Codes: B81B 2201/054 Microvalves
• CPC Class Codes: B81B 2201/07 Data storage devices, static or dynamic memories
• CPC Class Codes: B81C 1/00119 Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems
• CPC Class Codes: C12Q 1/28 involving peroxidase
• CPC Class Codes: F15C 5/00 Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
• CPC Class Codes: F16K 11/20 operated by separate actuating members with one plug turning in another F16K11/12
• CPC Class Codes: F16K 2099/0074 using photolithography, e.g. etching
• CPC Class Codes: F16K 2099/0076 using electrical discharge machining [EDM], milling or drilling
• CPC Class Codes: F16K 2099/0078 using moulding or stamping
• CPC Class Codes: F16K 2099/008 Multi-layer fabrications
• CPC Class Codes: F16K 2099/0084 Chemistry or biology, e.g. "lab-on-a-chip" technology
• CPC Class Codes: F16K 2099/0094 Micropumps
• CPC Class Codes: F16K 99/0001 : Microvalves microdevices B81B1/00; manufacture or treatment of devices or systems in or on a substrate B81C1/00; microfluidic structures B01L3/5027; micropumps F04B19/006
• CPC Class Codes: F16K 99/0015 : Diaphragm or membrane valves
• CPC Class Codes: F16K 99/0059 : actuated by a pilot fluid
• CPC Class Codes: Y10T 137/0318 : Processes
• CPC Class Codes: Y10T 137/0329 : Mixing of plural fluids of diverse characteristics or conditions
• CPC Class Codes: Y10T 137/2224 : Structure of body of device
• CPC Class Codes: Y10T 137/85938 : Non-valved flow dividers
• CPC Class Codes: Y10T 137/87249 : Multiple inlet with multiple outlet

Abstract

High-density microfluidic chips contain plumbing networks with thousands of micromechanical valves and hundreds of individually addressable chambers. These fluidic devices are analogous to electronic integrated circuits fabricated using large scale integration (LSI). A component of these networks is the fluidic multiplexor, which is a combinatorial array of binary valve patterns that exponentially increases the processing power of a network by allowing complex fluid manipulations with a minimal number of inputs. These integrated microfluidic networks can be used to construct a variety of highly complex microfluidic devices, for example the microfluidic analog of a comparator array, and a microfluidic memory storage device resembling electronic random access memories.

Claims

1. A microfluidic device comprising:

a microfluidic flow channel formed in a first layer;

a first microfluidic control channel formed in a second layer adjacent to the first layer, the first microfluidic control channel separated from the microfluidic flow channel by a first deflectable membrane integral with the first layer or the second layer; and

a second microfluidic control channel adjacent to the first microfluidic control channel and separated from the first microfluidic control channel by a second deflectable membrane.

2. The microfluidic device of claim 1 wherein the first layer underlies the second layer.

3. The microfluidic device of claim 1 wherein the first layer overlies the second layer.

4. The microfluidic device of claim 1 wherein the second microfluidic control channel is formed in a third layer adjacent to the second layer.

5. The microfluidic device of claim 1 wherein:

the microfluidic flow channel comprises a network of flow channels;

the first microfluidic control channel comprises a branched network of channels sharing a common inlet and having widened portions; and

the second microfluidic control channel comprises a network of channels having separate inlets and also having widened portions.

6. The microfluidic device of claim 5 wherein:

a number of branches of the first control channel network equals a number of the flow channels, each first control channel branch including only one widened portion at a corresponding flow channel branch; and

the channels of the second control channel network are arranged in a multiplexor configuration, thereby defining an inverse multiplexor structure.

7. The microfluidic device of claim 5 wherein:

a number of branches of the first control channel network is fewer than a number of the flow channels and have widened portions arranged in a first multiplexor configuration; and

a number of channels of the second control channel network is fewer than a number of the flow channels and have widened portions arranged in a second multiplexor configuration, thereby defining a cascaded multiplexor structure.

8. The microfluidic device of claim 5 wherein at least one of the first control channel network and the second control channel network comprise a first stage having at least xlogxn control channels, where n is the number of flow channels and x is an integer greater than 2.

9. The microfluidic device of claim 8 wherein the at least one of the first control channel network and the second control channel network further comprises a second stage having at least xlogxn control channels, where n is the number of flow channels and x is an integer greater than 1.

10. The A microfluidic device comprising:

a microfluidic flow channel formed in a first layer;

a first microfluidic control channel formed in a second layer adjacent to the first layer, the first microfluidic control channel separated from the microfluidic flow channel by a first deflectable membrane; and

a second microfluidic control channel adjacent to the first microfluidic control channel and separated from the first microfluidic control channel by a second deflectable membrane, wherein the second microfluidic control channel is formed in the first layer and does not intersect with the microfluidic flow channel.

11. The microfluidic device of claim 10 wherein:

the microfluidic flow channel comprises a network of flow channels;

the first microfluidic control channel comprises a branched network of channels sharing a common inlet and having widened portions; and

the second microfluidic control channel comprises a network of channels having separate inlets and also having widened portions.

12. The microfluidic device of claim 11 wherein:

a number of branches of the first control channel network equals a number of the flow channels, each first control channel branch including only one widened portion at a corresponding flow channel branch; and

the channels of the second control channel network are arranged in a multiplexor configuration, thereby defining an inverse multiplexor structure.

13. The microfluidic device of claim 11 wherein:

a number of branches of the first control channel network is fewer than a number of the flow channels and have widened portions arranged in a first multiplexor configuration; and

a number of channels of the second control channel network is fewer than a number of the flow channels and have widened portions arranged in a second multiplexor configuration, thereby defining a cascaded multiplexor structure.

14. The microfluidic device of claim 11 wherein at least one of the first control channel network and the second control channel network comprise a first stage having at least xlogxn control channels, where n is the number of flow channels and x is an integer greater than 2.

15. The microfluidic device of claim 14 wherein the at least one of the first control channel network and the second control channel network further comprises a second stage having at least xlogxn control channels, where n is the number of flow channels and x is an integer greater than 1.

16. A microfluidic device comprising:

a microfluidic flow channel formed in a first layer;

a first microfluidic control channel formed in a second layer adjacent to the first layer, the first microfluidic control channel separated from the microfluidic flow channel by a first deflectable membrane;

a second microfluidic control channel adjacent to the first microfluidic control channel and separated from the first microfluidic control channel by a second deflectable membrane; and

a third microfluidic control channel adjacent to the second microfluidic control channel and separated from the second microfluidic control channel by a third deflectable membrane.

17. The microfluidic device of claim 16 wherein:

the first microfluidic flow channel comprises a network of flow channels;

the first microfluidic control channel comprises a first branched network of channels sharing a first common inlet and having widened portions;

the second microfluidic control channel comprises a second branched network of channels sharing a second common inlet and also having widened portions; and

the third microfluidic control channel comprises a network of channels having separate inlets and also having widened portions.

18. The microfluidic device of claim 17 wherein:

a number of branches of the first control channel network equals a number of the flow channels, each first control channel branch including only one widened portion at a corresponding flow channel branch; and

the channels of the second control channel network are arranged in a multiplexor configuration, thereby defining an inverse multiplexor structure.

19. The microfluidic device of claim 17 wherein:

a number of branches of the first control channel network is fewer than a number of the flow channels and have widened portions arranged in a first multiplexor configuration; and

a number of channels of the second control channel network is fewer than a number of the flow channels and have widened portions arranged in a second multiplexor configuration, thereby defining a cascaded multiplexor structure.

20. The microfluidic device of claim 17 wherein at least one of the first control channel network, the second control channel network, and the third control channel network comprise a first stage having at least xlogxn control channels, where n is the number of flow channels and x is an integer greater than 2.

21. The microfluidic device of claim 20 wherein the at least one of the first control channel network, the second control channel network, and the third control channel network further comprises a second stage having at least xlogxn control channels, where n is the number of flow channels and x is an integer greater than 1.