Liquid drop emitter with split thermo-mechanical actuator
First Claim
1. A liquid drop emitter comprising:
- (a) a chamber formed in a substrate and including a nozzle for emitting drops of a liquid;
(b) a thermo-mechanical actuator, extending into the chamber from at least one wall of the chamber, the thermo-mechanical actuator including a movable element comprising a plurality of layers, the movable element residing in a first position proximate to the nozzle;
(c) the movable element including a bending portion which bends when heated, the bending portion including at least one opening through the plurality of layers of the movable element to permit passage of the liquid through the at least one opening; and
(d) apparatus adapted to apply heat pulses to the movable element resulting rapid deflection of the movable element to a second position, ejection of a liquid drop, and passage of liquid through the at least one opening.
8 Assignments
0 Petitions
Accused Products
Abstract
An apparatus for a liquid drop emitter, especially for use in an ink jet printhead, is disclosed. A chamber filled with a liquid, a nozzle and a thermo-mechanical actuator, extending into the chamber from at least one wall of the chamber is disclosed. A movable element of the thermo-mechanical actuator is configured with a bending portion which bends when heated, the bending portion having at least one actuator opening for passage of the liquid. Apparatus is adapted to apply heat pulses to the bending portion resulting in rapid deflection of the movable element, ejection of a liquid drop, and passage of liquid through the at least one actuator opening. A movable element configured as a cantilever or as a beam extending from anchor walls of the chamber is disclosed. The thermo-mechanical actuator may be formed as a laminate structure including a layer constructed of a deflector material having a high coefficient of thermal expansion and that is electrically resistive, for example, titanium aluminide. Apparatus adapted to apply heat pulses comprising a resistive heater formed in the deflector material in the bending portion is also disclosed.
31 Citations
19 Claims
-
1. A liquid drop emitter comprising:
-
(a) a chamber formed in a substrate and including a nozzle for emitting drops of a liquid; (b) a thermo-mechanical actuator, extending into the chamber from at least one wall of the chamber, the thermo-mechanical actuator including a movable element comprising a plurality of layers, the movable element residing in a first position proximate to the nozzle; (c) the movable element including a bending portion which bends when heated, the bending portion including at least one opening through the plurality of layers of the movable element to permit passage of the liquid through the at least one opening; and (d) apparatus adapted to apply heat pulses to the movable element resulting rapid deflection of the movable element to a second position, ejection of a liquid drop, and passage of liquid through the at least one opening. - View Dependent Claims (2, 3, 4, 5, 6, 7)
-
-
8. A liquid drop emitter comprising:
-
(a) a chamber formed in a substrate and including a nozzle for emitting drops of a liquid; (b) a thermo-mechanical actuator including a cantilevered element extending from an anchor wall of the chamber and a free end residing in a first position proximate to the nozzle, the cantilevered element comprising a plurality of layers; (c) the cantilevered element including a bending portion which bends when heated, the bending portion including at least one opening through the plurality of layers, located in a center of the bending portion, to permit passage of the liquid through the at least one opening; and (d) apparatus adapted to apply heat pulses to the thermo-mechanical actuator resulting rapid deflection of the free end to a second position, ejection of a liquid drop, and passage of liquid through the at least one opening. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
-
Specification